[Scan]
initial_time=2016-01-27T21:49:45
final_time=2016-01-27T21:50:05
ip_count=19
run=1025
dataset=4
scan=277
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08846E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=6.48546E-10
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=3.23534E-10
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=6.40512E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=5.44572E-10
mult1=-9.93304E-9
mult2=-2.65873E-9
rf_tmon=-4.90296E-3
rf_agc=3.33696E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=3.6124E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64793E0
bslens_imon=2.60343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19948E1
lens5a_imon=1.99961E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05213E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53708E1
cs_ef1b_imon=2.76705E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04911E1
cs_ea1_imon=2.59387E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38023E0
lens1_imon=2.64944E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6466E1
os_ef1alow_imon=2.99364E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04056E1
cs_ea2_imon=1.53241E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=2.90641E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=3.83878E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=2.88869E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=1.88175E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6374E1
os_ef1bup_imon=3.08991E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24856E0
cs_ionrep_imon=1.1767E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=2.91753E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=7.46667E-10
tplens_vset=1.4E-1
tplens_vmon=1.6432E0
tplens_imon=-1.21917E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.51117E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.58585E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98424E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=3.91161E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23853E0
ionrepsh_imon=1.74336E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33805E1
lens5b_imon=2.17552E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74756E1
cs_ef2b_imon=3.12466E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.54575E-1
os_ea2_imon=-5.07712E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71043E1
cs_ef2a_imon=3.19208E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64072E0
os_ef2alow_imon=-2.46685E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.32939E-1
os_ef2bup_imon=-5.35479E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10776E1
os_restr2_imon=2.86749E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.33078E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.25028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72943E1
iondef1_imon=1.0914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.09198E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.97574E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=2.59709E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10581E0
cs_ionaccel_imon=-1.68144E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47098E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56162E1
einzel_imon=7.70869E-6
window_vset=0.0E0
window_vmon=2.13052E-1
window_imon=-9.48164E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39234E-4
mask2_vset=0.0E0
mask2_vmon=-1.86906E1
mask2_imon=-6.35391E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.15511E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.79409E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.32854E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.46907E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33882E1
os_fil1_imon=5.79306E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.60019E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62355E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30661E1
cs_fil1_imon=9.97555E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63519E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62475E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10433E-2
os_fil2_imon=-2.42592E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.46612E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.45152E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29527E-1
cs_fil2_imon=-2.46067E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.98741E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21441E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30212E-3
inlet_lpb_pmon=3.00852E-1
chamber_ion_pmon=1.19891E-7
chamber_cvt_pmon=2.51287E-3
foreline_cvt_pmon=2.51287E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.20602E-1
res40_imon=-2.37997E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-8.16584E-1	-7.99012E-1	-9.13134E0	-9.14173E0	4.50611E-3	9.38416E-2	2.7413E1	-3.26449E1	-3.26272E1	2.67806E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.99175E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0965E0	-8.16655E-1	-7.98821E-1	-9.13115E0	-9.14204E0	4.43459E-3	9.37939E-2	2.7242E1	-3.26767E1	-3.25971E1	2.6792E1	1.19891E-7	2.51919E-3	2.51919E-3	6.3074E-3	3.006E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16512E-1	-7.9875E-1	-9.13105E0	-9.14185E0	4.64916E-3	9.38416E-2	2.73865E1	-3.26695E1	-3.26499E1	2.67939E1	1.20004E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.99941E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.16536E-1	-7.98631E-1	-9.13115E0	-9.14202E0	4.673E-3	9.36031E-2	2.72019E1	-3.26408E1	-3.26319E1	2.68111E1	1.20191E-7	2.52027E-3	2.52027E-3	6.29624E-3	3.01475E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.16703E-1	-7.98249E-1	-9.13122E0	-9.14178E0	4.55379E-3	9.36985E-2	2.7391E1	-3.26524E1	-3.265E1	2.68082E1	1.20311E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16226E-1	-7.98488E-1	-9.131E0	-9.1419E0	4.45843E-3	9.38892E-2	2.72606E1	-3.26601E1	-3.26458E1	2.68032E1	1.19861E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16488E-1	-7.98821E-1	-9.13122E0	-9.14209E0	4.48227E-3	9.40323E-2	2.73223E1	-3.26565E1	-3.25999E1	2.67951E1	1.20016E-7	2.5165E-3	2.5165E-3	6.3074E-3	3.03321E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16774E-1	-7.98726E-1	-9.13119E0	-9.14211E0	4.50611E-3	9.38416E-2	2.72895E1	-3.26561E1	-3.26338E1	2.68154E1	1.19937E-7	2.51838E-3	2.51838E-3	6.3131E-3	3.02154E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16536E-1	-7.98678E-1	-9.13122E0	-9.14195E0	4.69685E-3	9.38416E-2	2.72084E1	-3.26502E1	-3.26296E1	2.68034E1	1.20122E-7	2.51771E-3	2.51771E-3	6.28006E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16655E-1	-7.98297E-1	-9.13126E0	-9.14209E0	5.14984E-3	9.41038E-2	2.73784E1	-3.2635E1	-3.26242E1	2.6804E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99686E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16584E-1	-7.98655E-1	-9.13117E0	-9.14187E0	4.36306E-3	9.37939E-2	2.72582E1	-3.26723E1	-3.26428E1	2.68094E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01871E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16488E-1	-7.98655E-1	-9.13088E0	-9.14171E0	4.76837E-3	9.36508E-2	2.74602E1	-3.26697E1	-3.25765E1	2.6796E1	1.20017E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.16703E-1	-7.9844E-1	-9.13117E0	-9.14199E0	4.60148E-3	9.33886E-2	2.71895E1	-3.25599E1	-3.26402E1	2.68046E1	1.20055E-7	2.5131E-3	2.5131E-3	6.33436E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.16512E-1	-7.98202E-1	-9.13112E0	-9.14171E0	4.74453E-3	9.36747E-2	2.73112E1	-3.26597E1	-3.26095E1	2.67998E1	1.20069E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16512E-1	-7.98559E-1	-9.13095E0	-9.14154E0	4.72069E-3	9.38892E-2	2.72379E1	-3.2629E1	-3.26325E1	2.681E1	1.2033E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.16369E-1	-7.98845E-1	-9.13095E0	-9.14214E0	5.00679E-3	9.39131E-2	2.73904E1	-3.26543E1	-3.26098E1	2.68046E1	1.20311E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.01223E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16083E-1	-7.98583E-1	-9.1311E0	-9.14204E0	5.19753E-3	9.377E-2	2.72095E1	-3.26478E1	-3.2606E1	2.67989E1	1.20084E-7	2.5147E-3	2.5147E-3	6.32418E-3	3.01209E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.16178E-1	-7.98583E-1	-9.13122E0	-9.14226E0	4.74453E-3	9.38177E-2	2.73321E1	-3.26554E1	-3.26188E1	2.6795E1	1.20142E-7	2.51814E-3	2.51814E-3	6.32858E-3	3.01104E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.16226E-1	-7.98607E-1	-9.13126E0	-9.14214E0	4.95911E-3	9.37223E-2	2.73428E1	-3.26955E1	-3.26341E1	2.68154E1	1.19925E-7	2.51359E-3	2.51359E-3	6.30182E-3	3.0041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.16464E-1	-7.98678E-1	-9.13126E0	-9.14195E0	4.93526E-3	9.38177E-2	2.72943E1	-3.26573E1	-3.26236E1	2.6807E1	1.19891E-7	2.51287E-3	2.51287E-3	6.30212E-3	3.00852E-1