[Scan]
initial_time=2016-01-27T21:50:12
final_time=2016-01-27T21:50:32
ip_count=19
run=1025
dataset=4
scan=278
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08787E-4
ql1_vset=
ql1_vmon=-8.16202E-1
ql1_imon=6.68705E-10
ql2_vset=
ql2_vmon=-7.98988E-1
ql2_imon=3.10838E-10
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=6.81412E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=5.61619E-10
mult1=-1.02678E-8
mult2=-2.81145E-9
rf_tmon=-3.99626E-3
rf_agc=3.38341E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=3.67856E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64828E0
bslens_imon=2.52521E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19804E1
lens5a_imon=1.99869E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05256E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53645E1
cs_ef1b_imon=2.7519E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02253E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.5749E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35504E0
lens1_imon=2.63422E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6453E1
os_ef1alow_imon=2.98855E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0395E1
cs_ea2_imon=1.52876E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84861E1
cs_ef1a_imon=2.89475E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=3.98815E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11299E1
os_restr1_imon=2.8893E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15274E1
os_ea1_imon=1.87293E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6359E1
os_ef1bup_imon=3.08041E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24042E0
cs_ionrep_imon=1.20172E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93498E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01744E1
cs_anode1_imon=2.91927E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=7.96866E-10
tplens_vset=1.4E-1
tplens_vmon=1.62586E0
tplens_imon=-1.76778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26178E1
iondef3_imon=1.50813E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26726E1
iondef2_imon=1.58444E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98568E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=3.80874E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31699E0
ionrepsh_imon=1.75224E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33846E1
lens5b_imon=2.18284E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74923E1
cs_ef2b_imon=3.12556E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.09978E-1
os_ea2_imon=-4.49312E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00467E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70927E1
cs_ef2a_imon=3.19329E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62932E0
os_ef2alow_imon=-2.60725E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.47257E-1
os_ef2bup_imon=-5.34742E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10818E1
os_restr2_imon=2.86672E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.28682E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01867E1
cs_anode2_imon=2.24707E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72903E1
iondef1_imon=1.08959E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68208E1
iondef4_imon=1.09223E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.04856E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=2.70236E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-1.54855E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47292E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56048E1
einzel_imon=7.8085E-6
window_vset=0.0E0
window_vmon=2.12681E-1
window_imon=-1.05812E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82608E2
mask1_imon=2.39259E-4
mask2_vset=0.0E0
mask2_vmon=-1.86792E1
mask2_imon=-7.00031E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.42304E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.49642E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.38411E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.59369E0
defgridb_imon=6.15381E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33893E1
os_fil1_imon=5.12581E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.83094E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62215E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30687E1
cs_fil1_imon=9.96426E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6378E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62533E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.19424E-2
os_fil2_imon=-2.3344E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.74038E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.3785E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3105E-1
cs_fil2_imon=-2.02302E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.30488E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21519E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.70414E-1
res40_imon=-2.50216E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16488E-1	-7.98607E-1	-9.13136E0	-9.14204E0	4.64916E-3	9.38177E-2	2.73877E1	-3.2672E1	-3.26378E1	2.67908E1	1.19738E-7	2.52147E-3	2.52147E-3	6.30149E-3	3.00479E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.16178E-1	-7.98798E-1	-9.13155E0	-9.14204E0	4.86374E-3	9.38416E-2	2.71818E1	-3.26626E1	-3.26431E1	2.68256E1	1.19953E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16488E-1	-7.9844E-1	-9.13155E0	-9.14226E0	4.48227E-3	9.377E-2	2.73129E1	-3.26687E1	-3.26308E1	2.67902E1	1.20106E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.99175E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.16154E-1	-7.98917E-1	-9.13155E0	-9.14221E0	4.76837E-3	9.40084E-2	2.73375E1	-3.26314E1	-3.26284E1	2.68028E1	1.20278E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01871E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.16059E-1	-7.98798E-1	-9.1316E0	-9.14204E0	4.91142E-3	9.377E-2	2.72502E1	-3.26726E1	-3.26449E1	2.68256E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09642E0	-8.16226E-1	-7.98488E-1	-9.13162E0	-9.14185E0	4.95911E-3	9.37462E-2	2.73183E1	-3.26621E1	-3.26176E1	2.67992E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16631E-1	-7.98154E-1	-9.13126E0	-9.1419E0	5.17368E-3	9.38177E-2	2.72504E1	-3.26579E1	-3.25882E1	2.67782E1	1.20158E-7	2.52599E-3	2.52599E-3	6.32356E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.16536E-1	-7.98225E-1	-9.13136E0	-9.14197E0	5.17368E-3	9.37223E-2	2.73291E1	-3.26795E1	-3.2611E1	2.68202E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.02659E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.1625E-1	-7.98488E-1	-9.13131E0	-9.14166E0	4.72069E-3	9.377E-2	2.72763E1	-3.26843E1	-3.26663E1	2.681E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.16011E-1	-7.98273E-1	-9.1315E0	-9.14171E0	4.74453E-3	9.39846E-2	2.72937E1	-3.26657E1	-3.26254E1	2.68028E1	1.20278E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.9926E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.16298E-1	-7.98202E-1	-9.13129E0	-9.14214E0	4.98295E-3	9.38416E-2	2.73334E1	-3.2659E1	-3.26443E1	2.67946E1	1.20069E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16011E-1	-7.98512E-1	-9.13115E0	-9.14187E0	4.52995E-3	9.39131E-2	2.73273E1	-3.26524E1	-3.2617E1	2.68094E1	1.20122E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16202E-1	-7.98011E-1	-9.13126E0	-9.14166E0	4.79221E-3	9.4223E-2	2.72871E1	-3.26819E1	-3.26645E1	2.6783E1	1.19861E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16011E-1	-7.98583E-1	-9.13141E0	-9.14183E0	4.79221E-3	9.38416E-2	2.73086E1	-3.26579E1	-3.26437E1	2.67938E1	1.20055E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.01223E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.15988E-1	-7.98368E-1	-9.13134E0	-9.14204E0	4.81606E-3	9.37462E-2	2.73616E1	-3.26771E1	-3.26452E1	2.67836E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9943E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.16011E-1	-7.98416E-1	-9.13143E0	-9.14202E0	4.55379E-3	9.35555E-2	2.72664E1	-3.26585E1	-3.26158E1	2.68065E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00041E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.16178E-1	-7.98774E-1	-9.13177E0	-9.14185E0	4.74453E-3	9.34124E-2	2.72727E1	-3.26628E1	-3.26479E1	2.68126E1	1.20375E-7	2.51679E-3	2.51679E-3	6.3543E-3	3.0223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16417E-1	-7.98583E-1	-9.13131E0	-9.14173E0	4.95911E-3	9.36747E-2	2.73369E1	-3.26933E1	-3.26248E1	2.68088E1	1.20045E-7	2.50818E-3	2.50818E-3	6.31879E-3	2.9944E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16178E-1	-7.98965E-1	-9.13124E0	-9.14187E0	4.74453E-3	9.36031E-2	2.72774E1	-3.26266E1	-3.26083E1	2.67989E1	1.19925E-7	2.5225E-3	2.5225E-3	6.3074E-3	3.00942E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16202E-1	-7.98988E-1	-9.13119E0	-9.14168E0	5.07832E-3	9.38892E-2	2.72903E1	-3.26726E1	-3.26178E1	2.68208E1	1.19953E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01738E-1