[Scan]
initial_time=2016-01-27T21:51:34
final_time=2016-01-27T21:51:54
ip_count=19
run=1025
dataset=4
scan=281
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08804E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=6.66761E-10
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=3.27039E-10
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=6.37853E-10
ql4_vset=
ql4_vmon=-9.14154E0
ql4_imon=5.51355E-10
mult1=-1.0113E-8
mult2=-2.69168E-9
rf_tmon=-5.48782E-3
rf_agc=3.26818E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=3.8197E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65347E0
bslens_imon=2.54467E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19876E1
lens5a_imon=1.97182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05014E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=2.76864E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02028E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=2.58619E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38878E0
lens1_imon=2.5291E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64582E1
os_ef1alow_imon=2.98622E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03989E1
cs_ea2_imon=1.5163E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84284E1
cs_ef1a_imon=2.89981E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=4.03905E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10974E1
os_restr1_imon=2.88619E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15189E1
os_ea1_imon=1.89512E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63434E1
os_ef1bup_imon=3.09793E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23717E0
cs_ionrep_imon=1.19354E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93366E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01854E1
cs_anode1_imon=2.91421E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=7.78461E-10
tplens_vset=1.4E-1
tplens_vmon=1.64208E0
tplens_imon=-2.89685E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26001E1
iondef3_imon=1.51552E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26716E1
iondef2_imon=1.59612E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0288E2
lens6_imon=2.98369E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=3.5553E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=1.74757E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33749E1
lens5b_imon=2.18635E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74728E1
cs_ef2b_imon=3.12712E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.15818E-1
os_ea2_imon=-4.60992E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06067E2
lens4b_imon=2.00693E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.19407E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62737E0
os_ef2alow_imon=-2.54887E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.20011E-1
os_ef2bup_imon=-5.21508E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10812E1
os_restr2_imon=2.86128E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.31447E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01685E1
cs_anode2_imon=2.23345E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72718E1
iondef1_imon=1.06935E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67766E1
iondef4_imon=1.09107E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=2.02717E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=3.10719E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14117E0
cs_ionaccel_imon=-1.80933E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02033E2
cs_ionfocb_imon=1.47359E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5621E1
einzel_imon=7.84353E-6
window_vset=0.0E0
window_vmon=2.17871E-1
window_imon=-9.68598E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86552E1
mask2_imon=-5.40447E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.24784E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.48474E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.48533E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.40854E0
defgridb_imon=6.3368E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33923E1
os_fil1_imon=4.85335E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.14331E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62125E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30723E1
cs_fil1_imon=9.96497E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6459E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62312E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.26389E-2
os_fil2_imon=-2.47063E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.76731E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.48569E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.25656E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.79424E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21557E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.20363E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.10084E-1
res40_imon=-2.3815E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.16393E-1	-7.9875E-1	-9.1315E0	-9.14168E0	4.98295E-3	9.36031E-2	2.72467E1	-3.26425E1	-3.26372E1	2.68202E1	1.20301E-7	2.52266E-3	2.52266E-3	6.31332E-3	2.98792E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16131E-1	-7.98726E-1	-9.13146E0	-9.1418E0	4.72069E-3	9.38416E-2	2.73778E1	-3.26764E1	-3.26299E1	2.67959E1	1.20004E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.16274E-1	-7.98559E-1	-9.13148E0	-9.14187E0	5.03063E-3	9.37223E-2	2.72493E1	-3.26649E1	-3.26831E1	2.67887E1	1.20453E-7	2.51854E-3	2.51854E-3	6.32273E-3	3.01121E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16107E-1	-7.99012E-1	-9.13155E0	-9.14199E0	5.38826E-3	9.40323E-2	2.73959E1	-3.2672E1	-3.26166E1	2.68076E1	1.19626E-7	2.52147E-3	2.52147E-3	6.31332E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.16488E-1	-7.99012E-1	-9.13126E0	-9.14156E0	5.07832E-3	9.35078E-2	2.72384E1	-3.26194E1	-3.26518E1	2.68148E1	1.20158E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.16751E-1	-7.98559E-1	-9.13122E0	-9.14202E0	4.64916E-3	9.37223E-2	2.7337E1	-3.26364E1	-3.26249E1	2.67943E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.02133E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16631E-1	-7.98583E-1	-9.1311E0	-9.14171E0	4.8399E-3	9.37939E-2	2.71997E1	-3.26553E1	-3.26235E1	2.68082E1	1.20092E-7	2.51919E-3	2.51919E-3	6.3074E-3	3.00348E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.16393E-1	-7.9844E-1	-9.13148E0	-9.14185E0	5.14984E-3	9.31501E-2	2.73832E1	-3.26296E1	-3.26152E1	2.68148E1	1.20045E-7	2.52407E-3	2.52407E-3	6.3074E-3	2.989E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.16321E-1	-7.98869E-1	-9.1315E0	-9.14192E0	4.93526E-3	9.33409E-2	2.72732E1	-3.26549E1	-3.26354E1	2.68022E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.96671E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09333E0	-8.16655E-1	-7.99108E-1	-9.13167E0	-9.14187E0	5.14984E-3	9.33647E-2	2.73778E1	-3.26855E1	-3.26332E1	2.6795E1	1.20158E-7	2.52599E-3	2.52599E-3	6.32356E-3	2.97647E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.1656E-1	-7.98392E-1	-9.13155E0	-9.14204E0	4.55379E-3	9.4223E-2	2.7412E1	-3.26597E1	-3.26224E1	2.67968E1	1.19965E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16441E-1	-7.98202E-1	-9.13143E0	-9.14202E0	4.60148E-3	9.377E-2	2.73153E1	-3.26861E1	-3.26194E1	2.68088E1	1.20122E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16154E-1	-7.98798E-1	-9.13148E0	-9.14207E0	4.41074E-3	9.37939E-2	2.71618E1	-3.25481E1	-3.26012E1	2.68007E1	1.20226E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.16369E-1	-7.98917E-1	-9.13143E0	-9.14183E0	4.673E-3	9.35078E-2	2.74783E1	-3.26624E1	-3.2631E1	2.68229E1	1.19697E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.02253E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16584E-1	-7.98249E-1	-9.13119E0	-9.14154E0	4.57764E-3	9.34839E-2	2.73916E1	-3.26813E1	-3.26128E1	2.67962E1	1.2011E-7	2.51747E-3	2.51747E-3	6.32107E-3	3.00631E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.16751E-1	-7.98249E-1	-9.13141E0	-9.14192E0	4.57764E-3	9.36031E-2	2.71435E1	-3.26661E1	-3.2616E1	2.67821E1	1.20004E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.00966E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-8.1625E-1	-7.98583E-1	-9.13129E0	-9.14214E0	4.79221E-3	9.33647E-2	2.74225E1	-3.2682E1	-3.26478E1	2.6819E1	1.20226E-7	2.52428E-3	2.52428E-3	6.33486E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.1625E-1	-7.98321E-1	-9.13124E0	-9.14204E0	4.8399E-3	9.38177E-2	2.73946E1	-3.26657E1	-3.26032E1	2.68088E1	1.2026E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.99686E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16536E-1	-7.98416E-1	-9.13138E0	-9.14214E0	4.76837E-3	9.37223E-2	2.73346E1	-3.26667E1	-3.26555E1	2.67897E1	1.19809E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16417E-1	-7.98059E-1	-9.13165E0	-9.14154E0	5.00679E-3	9.36985E-2	2.72718E1	-3.26716E1	-3.26001E1	2.67766E1	1.20363E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.98665E-1