[Scan]
initial_time=2016-01-27T21:52:27
final_time=2016-01-27T21:52:47
ip_count=19
run=1025
dataset=4
scan=283
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.1594E-1
ql1_imon=6.91485E-10
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=3.0427E-10
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=6.74152E-10
ql4_vset=
ql4_vmon=-9.14223E0
ql4_imon=5.32019E-10
mult1=-1.01377E-8
mult2=-2.90496E-9
rf_tmon=-4.34408E-3
rf_agc=3.32182E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=3.97325E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64871E0
bslens_imon=2.54496E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19953E1
lens5a_imon=1.98127E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05032E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=2.75961E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.58582E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37857E0
lens1_imon=2.63148E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64362E1
os_ef1alow_imon=2.99315E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03895E1
cs_ea2_imon=1.52632E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84172E1
cs_ef1a_imon=2.90161E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=4.22645E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=2.87999E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15246E1
os_ea1_imon=1.88249E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.09298E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26652E0
cs_ionrep_imon=1.18854E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.91603E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=8.23724E-10
tplens_vset=1.4E-1
tplens_vmon=1.63122E0
tplens_imon=-2.20037E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26107E1
iondef3_imon=1.51479E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26744E1
iondef2_imon=1.57932E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98483E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=4.05419E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26892E0
ionrepsh_imon=1.75199E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33568E1
lens5b_imon=2.19324E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.31295E-1
os_ea2_imon=-4.94013E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.005E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.18957E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62579E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.61985E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10895E1
os_restr2_imon=2.87098E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.30469E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01647E1
cs_anode2_imon=2.24857E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71918E1
iondef1_imon=1.08904E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67872E1
iondef4_imon=1.09458E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.05263E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=2.88534E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14336E0
cs_ionaccel_imon=-1.67887E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0204E2
cs_ionfocb_imon=1.47287E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.40168E-1
window_imon=-1.05538E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39034E-4
mask2_vset=0.0E0
mask2_vmon=-1.86915E1
mask2_imon=-5.14787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.51259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.01653E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.16651E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.65396E0
defgridb_imon=6.11747E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33937E1
os_fil1_imon=5.33484E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.32302E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62107E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30694E1
cs_fil1_imon=9.97044E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63988E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62456E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18289E-2
os_fil2_imon=-2.34161E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.07965E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.44083E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.20346E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38249E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21621E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3445E-3
inlet_lpb_pmon=3.006E-1
chamber_ion_pmon=1.19991E-7
chamber_cvt_pmon=2.51393E-3
foreline_cvt_pmon=2.51393E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.13351E-1
res40_imon=-2.42129E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-8.16655E-1	-7.98273E-1	-9.1316E0	-9.14159E0	4.72069E-3	9.35555E-2	2.72225E1	-3.26856E1	-3.26408E1	2.68142E1	1.20209E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.9841E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.15701E-1	-7.98559E-1	-9.13124E0	-9.14204E0	4.76837E-3	9.35555E-2	2.74532E1	-3.26673E1	-3.26396E1	2.68157E1	1.20017E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.9952E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16083E-1	-7.98869E-1	-9.13103E0	-9.14197E0	4.45843E-3	9.37939E-2	2.7206E1	-3.26657E1	-3.2647E1	2.68046E1	1.20158E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.0071E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.15797E-1	-7.98774E-1	-9.13103E0	-9.14173E0	4.91142E-3	9.37223E-2	2.73305E1	-3.2659E1	-3.26431E1	2.67962E1	1.19913E-7	2.50789E-3	2.50789E-3	6.30192E-3	3.01347E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.15988E-1	-7.98678E-1	-9.13098E0	-9.14178E0	4.95911E-3	9.39131E-2	2.74992E1	-3.26669E1	-3.26194E1	2.6807E1	1.20209E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.97647E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09371E0	-8.16345E-1	-7.98297E-1	-9.13119E0	-9.14221E0	4.79221E-3	9.377E-2	2.7349E1	-3.26512E1	-3.26164E1	2.68148E1	1.19705E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.97187E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16321E-1	-7.98011E-1	-9.13124E0	-9.14195E0	4.69685E-3	9.38892E-2	2.7242E1	-3.26639E1	-3.26777E1	2.68188E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.97394E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.16131E-1	-7.98702E-1	-9.13134E0	-9.14176E0	4.62532E-3	9.377E-2	2.72585E1	-3.26773E1	-3.26213E1	2.68182E1	1.20069E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.98222E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16083E-1	-7.98559E-1	-9.13124E0	-9.1418E0	4.74453E-3	9.34124E-2	2.72576E1	-3.26368E1	-3.2626E1	2.6795E1	1.2033E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.16417E-1	-7.98845E-1	-9.13136E0	-9.14168E0	4.98295E-3	9.36508E-2	2.73748E1	-3.26723E1	-3.26386E1	2.67944E1	1.20174E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.16011E-1	-7.98893E-1	-9.13115E0	-9.14171E0	4.8399E-3	9.36031E-2	2.71867E1	-3.26669E1	-3.26386E1	2.68232E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.16321E-1	-7.98678E-1	-9.13136E0	-9.14214E0	4.36306E-3	9.37462E-2	2.73393E1	-3.26693E1	-3.2622E1	2.67984E1	1.19757E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.16178E-1	-7.98678E-1	-9.13136E0	-9.14176E0	4.41074E-3	9.38654E-2	2.73153E1	-3.26451E1	-3.25796E1	2.68007E1	1.1988E-7	2.51369E-3	2.51369E-3	6.28667E-3	3.00247E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16321E-1	-7.98702E-1	-9.13105E0	-9.14218E0	4.673E-3	9.34601E-2	2.72408E1	-3.26561E1	-3.26278E1	2.6816E1	1.20005E-7	2.51874E-3	2.51874E-3	6.33065E-3	3.00916E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16321E-1	-7.98726E-1	-9.13136E0	-9.14199E0	4.48227E-3	9.3627E-2	2.73506E1	-3.26478E1	-3.26464E1	2.6792E1	1.20122E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00041E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16512E-1	-7.98416E-1	-9.13155E0	-9.14197E0	4.36306E-3	9.37223E-2	2.71927E1	-3.26814E1	-3.26227E1	2.67998E1	1.20157E-7	2.51845E-3	2.51845E-3	6.32047E-3	2.99535E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.16441E-1	-7.98821E-1	-9.13165E0	-9.14192E0	4.60148E-3	9.3627E-2	2.72552E1	-3.26621E1	-3.26002E1	2.67974E1	1.20078E-7	2.51886E-3	2.51886E-3	6.3126E-3	2.98768E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.16774E-1	-7.98607E-1	-9.1316E0	-9.14211E0	4.57764E-3	9.38177E-2	2.73628E1	-3.26494E1	-3.26549E1	2.68244E1	1.20278E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.98481E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.15892E-1	-7.98559E-1	-9.13143E0	-9.14223E0	4.64916E-3	9.34124E-2	2.73451E1	-3.26689E1	-3.26521E1	2.6803E1	1.20017E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.1594E-1	-7.98559E-1	-9.13131E0	-9.14223E0	4.43459E-3	9.37462E-2	2.71918E1	-3.26744E1	-3.26107E1	2.67872E1	1.19991E-7	2.51393E-3	2.51393E-3	6.3445E-3	3.006E-1