[Scan]
initial_time=2016-01-27T21:52:54
final_time=2016-01-27T21:53:14
ip_count=19
run=1025
dataset=4
scan=284
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.15821E-1
ql1_imon=6.71744E-10
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=3.1122E-10
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=6.56319E-10
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=5.60653E-10
mult1=-9.64702E-9
mult2=-2.81548E-9
rf_tmon=-4.87054E-3
rf_agc=3.34141E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=3.84271E-10
bslens_vset=-6.2E0
bslens_vmon=-6.632E0
bslens_imon=2.56095E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20243E1
lens5a_imon=1.97979E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=2.75853E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=2.58326E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36843E0
lens1_imon=2.64236E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.99027E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03861E1
cs_ea2_imon=1.54302E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=2.90233E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=4.15707E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=2.87819E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15229E1
os_ea1_imon=1.87785E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26036E0
cs_ionrep_imon=1.18519E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01665E1
cs_anode1_imon=2.90738E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=7.62677E-10
tplens_vset=1.4E-1
tplens_vmon=1.62492E0
tplens_imon=-2.98887E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26836E1
iondef3_imon=1.51754E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26174E1
iondef2_imon=1.58231E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98516E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=3.86298E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26154E0
ionrepsh_imon=1.73274E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33333E1
lens5b_imon=2.2095E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.13695E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.36288E-1
os_ea2_imon=-5.53725E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00545E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71023E1
cs_ef2a_imon=3.19137E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6408E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.49371E-1
os_ef2bup_imon=-5.37293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=2.86413E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23008E2
cs_ionfoca_imon=6.32016E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.24245E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73082E1
iondef1_imon=1.09494E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67998E1
iondef4_imon=1.07836E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.00012E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=2.75064E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12413E0
cs_ionaccel_imon=-1.68968E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.47277E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56279E1
einzel_imon=7.76713E-6
window_vset=0.0E0
window_vmon=2.29956E-1
window_imon=-1.05178E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.86861E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.50551E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.77993E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.33208E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.47793E0
defgridb_imon=6.33396E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33891E1
os_fil1_imon=4.86031E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.44916E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62157E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3067E1
cs_fil1_imon=9.96852E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64486E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.621E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.2183E-2
os_fil2_imon=-2.37765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.47899E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.5148E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.16141E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26836E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21409E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.03286E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=5.07655E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=222
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16011E-1	-7.99036E-1	-9.13117E0	-9.14221E0	4.98295E-3	9.36985E-2	2.71879E1	-3.26506E1	-3.2629E1	2.67968E1	1.20311E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.9892E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.15558E-1	-7.98535E-1	-9.13141E0	-9.14204E0	4.64916E-3	9.36031E-2	2.71765E1	-3.25599E1	-3.26368E1	2.68005E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.98156E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.15725E-1	-7.98655E-1	-9.13138E0	-9.14211E0	4.69685E-3	9.34601E-2	2.72007E1	-3.26909E1	-3.26006E1	2.67952E1	1.19705E-7	2.51334E-3	2.51334E-3	6.36244E-3	2.9952E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16178E-1	-7.9875E-1	-9.1316E0	-9.14202E0	4.60148E-3	9.37939E-2	2.73824E1	-3.26543E1	-3.25995E1	2.68118E1	1.20174E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00563E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16107E-1	-7.98774E-1	-9.13146E0	-9.14199E0	4.72069E-3	9.36747E-2	2.72354E1	-3.26663E1	-3.26128E1	2.68256E1	1.20055E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.15916E-1	-7.98559E-1	-9.13167E0	-9.14216E0	4.55379E-3	9.39608E-2	2.74301E1	-3.26482E1	-3.26356E1	2.68016E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.16035E-1	-7.98798E-1	-9.13165E0	-9.14226E0	4.43459E-3	9.36508E-2	2.72354E1	-3.2653E1	-3.26122E1	2.68058E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.15964E-1	-7.98893E-1	-9.13143E0	-9.14214E0	4.52995E-3	9.377E-2	2.72856E1	-3.2649E1	-3.26319E1	2.68024E1	1.2033E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.1625E-1	-7.98631E-1	-9.13124E0	-9.14214E0	4.48227E-3	9.36747E-2	2.73184E1	-3.26631E1	-3.25739E1	2.67902E1	1.20099E-7	2.5199E-3	2.5199E-3	6.31007E-3	2.99007E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16441E-1	-7.98988E-1	-9.13136E0	-9.14214E0	4.76837E-3	9.36508E-2	2.72561E1	-3.26712E1	-3.25897E1	2.68076E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16417E-1	-7.9875E-1	-9.13119E0	-9.14209E0	4.81606E-3	9.37939E-2	2.74219E1	-3.26732E1	-3.2626E1	2.67821E1	1.20005E-7	2.5199E-3	2.5199E-3	6.31902E-3	2.99535E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16202E-1	-7.99203E-1	-9.13103E0	-9.14171E0	4.43459E-3	9.36031E-2	2.71069E1	-3.26455E1	-3.26166E1	2.67932E1	1.19991E-7	2.53083E-3	2.53083E-3	6.30212E-3	3.01104E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.1594E-1	-7.99012E-1	-9.13117E0	-9.14178E0	4.48227E-3	9.34124E-2	2.73237E1	-3.26579E1	-3.26122E1	2.68094E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16178E-1	-7.98941E-1	-9.1311E0	-9.14183E0	4.74453E-3	9.32932E-2	2.74193E1	-3.26416E1	-3.26356E1	2.68046E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16298E-1	-7.9875E-1	-9.13143E0	-9.14176E0	4.98295E-3	9.35555E-2	2.71885E1	-3.26705E1	-3.26176E1	2.6783E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.15988E-1	-7.98583E-1	-9.13146E0	-9.14166E0	5.19753E-3	9.3627E-2	2.70744E1	-3.26849E1	-3.26032E1	2.67986E1	1.20226E-7	2.52428E-3	2.52428E-3	6.33486E-3	2.9978E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-8.16154E-1	-7.98774E-1	-9.13131E0	-9.14171E0	5.00679E-3	9.36985E-2	2.71954E1	-3.26744E1	-3.26231E1	2.68215E1	1.20004E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.01223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-8.16011E-1	-7.98988E-1	-9.13115E0	-9.1418E0	4.60148E-3	9.35793E-2	2.73616E1	-3.26639E1	-3.26482E1	2.68184E1	1.19861E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.1594E-1	-7.9844E-1	-9.13112E0	-9.14195E0	5.00679E-3	9.34839E-2	2.73517E1	-3.26838E1	-3.2616E1	2.67776E1	1.20069E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.03449E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.15821E-1	-7.98345E-1	-9.13103E0	-9.14209E0	5.03063E-3	9.37223E-2	2.73082E1	-3.26174E1	-3.26836E1	2.67998E1	1.20158E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.03286E-1