[Scan]
initial_time=2016-01-27T21:53:21
final_time=2016-01-27T21:53:41
ip_count=19
run=1025
dataset=4
scan=285
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08785E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=6.46484E-10
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=3.22807E-10
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=6.62339E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=5.54955E-10
mult1=-9.15653E-9
mult2=-2.76833E-9
rf_tmon=-4.91651E-3
rf_agc=3.23417E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=3.81935E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64811E0
bslens_imon=2.5702E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19755E1
lens5a_imon=1.99244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53694E1
cs_ef1b_imon=2.76466E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04586E2
lens23_imon=1.02262E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04958E1
cs_ea1_imon=2.56599E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36956E0
lens1_imon=2.84057E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.9863E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03774E1
cs_ea2_imon=1.54795E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83787E1
cs_ef1a_imon=2.89116E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=4.04215E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=2.87386E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15185E1
os_ea1_imon=1.89727E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.09118E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27853E0
cs_ionrep_imon=1.19287E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93355E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=2.90666E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=7.14147E-10
tplens_vset=1.4E-1
tplens_vmon=1.63482E0
tplens_imon=-2.41667E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26172E1
iondef3_imon=1.50866E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26555E1
iondef2_imon=1.57751E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98292E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=3.83973E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2545E0
ionrepsh_imon=1.74911E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33778E1
lens5b_imon=2.19865E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.21081E-1
os_ea2_imon=-5.22853E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00543E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.19317E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61317E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.46368E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=2.87098E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.31947E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.24533E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73641E1
iondef1_imon=1.10058E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68112E1
iondef4_imon=1.09314E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.99314E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=2.93005E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-1.614E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47107E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56123E1
einzel_imon=7.76713E-6
window_vset=0.0E0
window_vmon=2.16141E-1
window_imon=-1.0698E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.86921E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.49456E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=7.11244E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.11604E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.59982E0
defgridb_imon=6.09945E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33909E1
os_fil1_imon=4.09147E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.34104E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62166E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30698E1
cs_fil1_imon=9.96329E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63681E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6217E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.24738E-2
os_fil2_imon=-2.37765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.41892E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.32998E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-2.19745E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28638E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21524E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.26371E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=2.91417E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.15845E-1	-7.98631E-1	-9.13119E0	-9.14228E0	4.81606E-3	9.35555E-2	2.71452E1	-3.2649E1	-3.26136E1	2.67989E1	1.20435E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.02922E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.16321E-1	-7.98607E-1	-9.13141E0	-9.14218E0	5.14984E-3	9.37462E-2	2.74508E1	-3.26856E1	-3.26284E1	2.68022E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16011E-1	-7.98321E-1	-9.13119E0	-9.14183E0	5.34058E-3	9.37939E-2	2.7385E1	-3.26873E1	-3.26585E1	2.67944E1	1.20243E-7	2.51755E-3	2.51755E-3	6.31012E-3	3.00378E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16345E-1	-7.98535E-1	-9.13126E0	-9.1418E0	5.29289E-3	9.38416E-2	2.72096E1	-3.26759E1	-3.26014E1	2.67944E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.16321E-1	-7.98678E-1	-9.13103E0	-9.14202E0	4.81606E-3	9.377E-2	2.72096E1	-3.26735E1	-3.26512E1	2.6813E1	1.19861E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16751E-1	-7.98488E-1	-9.13126E0	-9.1419E0	5.126E-3	9.39131E-2	2.71833E1	-3.26442E1	-3.26038E1	2.6806E1	1.20174E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16703E-1	-7.98106E-1	-9.13115E0	-9.1419E0	4.95911E-3	9.38892E-2	2.72835E1	-3.26693E1	-3.26392E1	2.68046E1	1.20201E-7	2.51777E-3	2.51777E-3	6.3114E-3	3.00654E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0965E0	-8.16584E-1	-7.98225E-1	-9.13107E0	-9.14171E0	4.72069E-3	9.37223E-2	2.74986E1	-3.26372E1	-3.2598E1	2.6811E1	1.20069E-7	2.5199E-3	2.5199E-3	6.34588E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.16464E-1	-7.98488E-1	-9.13105E0	-9.14202E0	4.69685E-3	9.36031E-2	2.72956E1	-3.26648E1	-3.2626E1	2.68205E1	1.19732E-7	2.51575E-3	2.51575E-3	6.3126E-3	3.00494E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09696E0	-8.16202E-1	-7.98416E-1	-9.13129E0	-9.14207E0	4.86374E-3	9.36747E-2	2.7105E1	-3.2653E1	-3.26068E1	2.68274E1	1.19937E-7	2.51838E-3	2.51838E-3	6.3074E-3	2.99981E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09634E0	-8.16298E-1	-7.98321E-1	-9.13148E0	-9.14197E0	4.64916E-3	9.36031E-2	2.72992E1	-3.26467E1	-3.26231E1	2.68256E1	1.19757E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09688E0	-8.16321E-1	-7.98702E-1	-9.13143E0	-9.14214E0	4.72069E-3	9.38654E-2	2.73124E1	-3.26474E1	-3.26327E1	2.67998E1	1.20435E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.16298E-1	-7.98607E-1	-9.13129E0	-9.14192E0	4.98295E-3	9.36747E-2	2.73305E1	-3.26703E1	-3.26024E1	2.67986E1	1.20278E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09627E0	-8.16679E-1	-7.98631E-1	-9.13124E0	-9.14199E0	5.07832E-3	9.34839E-2	2.71969E1	-3.26518E1	-3.26344E1	2.68064E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02659E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09704E0	-8.16298E-1	-7.98655E-1	-9.13155E0	-9.14183E0	4.76837E-3	9.37223E-2	2.7123E1	-3.26543E1	-3.26536E1	2.68274E1	1.20004E-7	2.52169E-3	2.52169E-3	6.28592E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.1625E-1	-7.98249E-1	-9.13153E0	-9.14192E0	4.8399E-3	9.40323E-2	2.71026E1	-3.26747E1	-3.265E1	2.6792E1	1.20017E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9978E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16226E-1	-7.98726E-1	-9.13138E0	-9.14183E0	4.64916E-3	9.38177E-2	2.72205E1	-3.26741E1	-3.26214E1	2.6785E1	1.20017E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.16178E-1	-7.98774E-1	-9.13129E0	-9.14159E0	4.81606E-3	9.36031E-2	2.74571E1	-3.26524E1	-3.26302E1	2.6798E1	1.19902E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.01738E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.16345E-1	-7.98368E-1	-9.13126E0	-9.14195E0	4.64916E-3	9.33647E-2	2.73241E1	-3.26707E1	-3.26144E1	2.67824E1	1.20226E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16488E-1	-7.98488E-1	-9.13117E0	-9.14185E0	4.72069E-3	9.36985E-2	2.73641E1	-3.26555E1	-3.26172E1	2.68112E1	1.19965E-7	2.52209E-3	2.52209E-3	6.26371E-3	2.9978E-1