[Scan]
initial_time=2016-01-27T21:55:09
final_time=2016-01-27T21:55:29
ip_count=19
run=1025
dataset=4
scan=289
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-8.16011E-1
ql1_imon=6.62851E-10
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=2.80535E-10
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=6.54078E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=5.2979E-10
mult1=-1.00414E-8
mult2=-2.81243E-9
rf_tmon=-4.03176E-3
rf_agc=3.40125E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=3.60775E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65383E0
bslens_imon=2.5114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19759E1
lens5a_imon=1.99253E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=2.75817E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.0216E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05136E1
cs_ea1_imon=2.58326E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37964E0
lens1_imon=2.80517E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6453E1
os_ef1alow_imon=2.98594E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03678E1
cs_ea2_imon=1.52214E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=2.90954E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=3.88515E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=2.87422E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15359E1
os_ea1_imon=1.87785E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.09803E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23794E0
cs_ionrep_imon=1.17493E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93303E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02097E1
cs_anode1_imon=2.90666E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=7.79033E-10
tplens_vset=1.4E-1
tplens_vmon=1.65382E0
tplens_imon=-3.09505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.49595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26428E1
iondef2_imon=1.57842E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98448E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=3.66461E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25623E0
ionrepsh_imon=1.74796E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33451E1
lens5b_imon=2.18118E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.41597E-1
os_ea2_imon=-5.04173E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00676E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71077E1
cs_ef2a_imon=3.19101E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63179E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52374E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=2.8717E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.30671E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.24389E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72937E1
iondef1_imon=1.08538E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67644E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.95966E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=2.55716E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11512E0
cs_ionaccel_imon=-1.75455E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47367E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.80677E-6
window_vset=0.0E0
window_vmon=1.72894E-1
window_imon=-1.00853E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86795E1
mask2_imon=-6.58946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.48427E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=5.99772E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5016E3
multb_neg_imon=7.36039E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.50746E0
defgridb_imon=6.12514E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33881E1
os_fil1_imon=5.01048E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.46118E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62143E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3065E1
cs_fil1_imon=9.96756E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63021E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62245E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.117E-2
os_fil2_imon=-2.38966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.63806E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.60845E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.0593E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16625E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21527E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30221E-3
inlet_lpb_pmon=3.0E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.51783E-3
foreline_cvt_pmon=2.51783E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.83919E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16059E-1	-7.98464E-1	-9.13136E0	-9.14214E0	4.98295E-3	9.37223E-2	2.73457E1	-3.26602E1	-3.26011E1	2.68123E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.97647E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.16154E-1	-7.98011E-1	-9.13119E0	-9.14197E0	5.14984E-3	9.3627E-2	2.73007E1	-3.26678E1	-3.2626E1	2.67851E1	1.19941E-7	2.51182E-3	2.51182E-3	6.32328E-3	2.99343E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.16393E-1	-7.98059E-1	-9.13122E0	-9.1418E0	4.79221E-3	9.38416E-2	2.73294E1	-3.2681E1	-3.26538E1	2.68019E1	1.20154E-7	2.51838E-3	2.51838E-3	6.33592E-3	3.00251E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.16131E-1	-7.98726E-1	-9.13126E0	-9.1419E0	4.74453E-3	9.37939E-2	2.73016E1	-3.26632E1	-3.26154E1	2.682E1	1.19991E-7	2.51709E-3	2.51709E-3	6.32328E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16107E-1	-7.98368E-1	-9.13129E0	-9.14192E0	4.74453E-3	9.36747E-2	2.72961E1	-3.26675E1	-3.2638E1	2.68262E1	1.20278E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9978E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16298E-1	-7.98631E-1	-9.13115E0	-9.14195E0	4.64916E-3	9.38892E-2	2.73016E1	-3.26614E1	-3.26337E1	2.681E1	1.20311E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.15988E-1	-7.98202E-1	-9.13131E0	-9.14168E0	4.8399E-3	9.38892E-2	2.72797E1	-3.26437E1	-3.25806E1	2.68175E1	1.19809E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.16226E-1	-7.98392E-1	-9.13117E0	-9.14183E0	4.95911E-3	9.40084E-2	2.72811E1	-3.2644E1	-3.26615E1	2.67896E1	1.19953E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.01738E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.16226E-1	-7.98345E-1	-9.13115E0	-9.14178E0	5.126E-3	9.37462E-2	2.72853E1	-3.26344E1	-3.2602E1	2.68076E1	1.20226E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.03449E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.15868E-1	-7.98488E-1	-9.13112E0	-9.14192E0	4.81606E-3	9.36031E-2	2.73183E1	-3.26999E1	-3.26308E1	2.6798E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00453E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16011E-1	-7.98631E-1	-9.13126E0	-9.14214E0	4.64916E-3	9.37223E-2	2.72805E1	-3.26681E1	-3.26807E1	2.68052E1	1.20069E-7	2.51771E-3	2.51771E-3	6.34037E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-8.15916E-1	-7.98416E-1	-9.13124E0	-9.14185E0	4.64916E-3	9.36747E-2	2.7278E1	-3.26874E1	-3.25942E1	2.6801E1	1.19861E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.15797E-1	-7.98273E-1	-9.13091E0	-9.14202E0	4.72069E-3	9.36985E-2	2.73838E1	-3.26717E1	-3.26543E1	2.67854E1	1.20226E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.02922E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.16083E-1	-7.98225E-1	-9.13088E0	-9.14221E0	4.33922E-3	9.38177E-2	2.72949E1	-3.26362E1	-3.26086E1	2.68244E1	1.20017E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.15725E-1	-7.98297E-1	-9.13126E0	-9.14235E0	4.50611E-3	9.33886E-2	2.73151E1	-3.26667E1	-3.26366E1	2.68267E1	1.2014E-7	2.51918E-3	2.51918E-3	6.33188E-3	2.99217E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.16393E-1	-7.98249E-1	-9.13138E0	-9.14204E0	4.31538E-3	9.36031E-2	2.72775E1	-3.26523E1	-3.26523E1	2.67851E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.16202E-1	-7.98249E-1	-9.1315E0	-9.14202E0	4.673E-3	9.38177E-2	2.72841E1	-3.26506E1	-3.2617E1	2.67665E1	1.19819E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.01209E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16441E-1	-7.98583E-1	-9.13134E0	-9.14202E0	4.43459E-3	9.36985E-2	2.73139E1	-3.2662E1	-3.26425E1	2.6789E1	1.20158E-7	2.52492E-3	2.52492E-3	6.31817E-3	2.99941E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.15988E-1	-7.98416E-1	-9.13155E0	-9.14199E0	4.93526E-3	9.377E-2	2.73269E1	-3.26875E1	-3.2612E1	2.68378E1	1.20363E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.16011E-1	-7.98512E-1	-9.13146E0	-9.14192E0	4.93526E-3	9.3627E-2	2.72937E1	-3.26428E1	-3.26278E1	2.67644E1	1.20226E-7	2.51783E-3	2.51783E-3	6.30221E-3	3.0E-1