[Scan]
initial_time=2016-01-27T21:56:57
final_time=2016-01-27T21:57:17
ip_count=19
run=1025
dataset=4
scan=293
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08835E-4
ql1_vset=
ql1_vmon=-8.15797E-1
ql1_imon=6.60944E-10
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=3.02517E-10
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=6.09148E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=5.56719E-10
mult1=-1.03978E-8
mult2=-2.97999E-9
rf_tmon=-3.19989E-3
rf_agc=3.41881E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=4.01664E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67695E0
bslens_imon=2.59183E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20187E1
lens5a_imon=1.99929E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05122E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53881E1
cs_ef1b_imon=2.76142E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02348E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04772E1
cs_ea1_imon=2.57609E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34913E0
lens1_imon=2.62427E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03931E1
cs_ea2_imon=1.52596E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=2.90774E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=4.12297E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11394E1
os_restr1_imon=2.86737E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=1.90989E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.08541E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2551E0
cs_ionrep_imon=1.16835E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93564E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=2.90522E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=7.12109E-10
tplens_vset=1.4E-1
tplens_vmon=1.64744E0
tplens_imon=-1.51543E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26183E1
iondef3_imon=1.49172E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26679E1
iondef2_imon=1.57824E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=4.07004E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24068E0
ionrepsh_imon=1.74514E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3376E1
lens5b_imon=2.17558E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.26489E-1
os_ea2_imon=-4.18309E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00832E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.19497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62399E0
os_ef2alow_imon=-2.44291E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.60183E-1
os_ef2bup_imon=-5.17832E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=2.87819E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30469E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.23452E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73021E1
iondef1_imon=1.08147E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68232E1
iondef4_imon=1.08341E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.06569E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=2.82645E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10191E0
cs_ionaccel_imon=-1.62841E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47446E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.8356E-6
window_vset=0.0E0
window_vmon=2.14339E-1
window_imon=-1.09863E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.87011E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.53061E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.44913E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.20617E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.50659E0
defgridb_imon=6.05619E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33916E1
os_fil1_imon=4.65008E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.82157E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62188E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30645E1
cs_fil1_imon=9.96918E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63603E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62511E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.31187E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.01958E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.44083E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.25151E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14823E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21531E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.62295E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16154E-1	-7.98726E-1	-9.13122E0	-9.14207E0	4.55379E-3	9.32455E-2	2.73051E1	-3.26449E1	-3.26496E1	2.67845E1	1.20122E-7	2.51552E-3	2.51552E-3	6.28552E-3	3.00041E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.16274E-1	-7.98631E-1	-9.13157E0	-9.14195E0	4.43459E-3	9.36031E-2	2.74119E1	-3.26779E1	-3.26136E1	2.68298E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16369E-1	-7.98535E-1	-9.13146E0	-9.14204E0	4.57764E-3	9.33886E-2	2.72684E1	-3.26458E1	-3.26146E1	2.6807E1	1.19953E-7	2.51096E-3	2.51096E-3	6.31278E-3	3.02769E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.16345E-1	-7.98202E-1	-9.13129E0	-9.14216E0	4.76837E-3	9.36508E-2	2.73135E1	-3.26603E1	-3.26458E1	2.68166E1	1.2033E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.00041E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16536E-1	-7.98464E-1	-9.13157E0	-9.14209E0	4.673E-3	9.377E-2	2.73213E1	-3.26771E1	-3.26561E1	2.68118E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.1594E-1	-7.98726E-1	-9.13134E0	-9.1419E0	4.93526E-3	9.38416E-2	2.7334E1	-3.26614E1	-3.26225E1	2.6814E1	1.20383E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.97187E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16274E-1	-7.9875E-1	-9.13143E0	-9.14226E0	4.72069E-3	9.37462E-2	2.72931E1	-3.26801E1	-3.26026E1	2.68142E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.9841E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.16441E-1	-7.98583E-1	-9.13174E0	-9.14187E0	4.93526E-3	9.35316E-2	2.72462E1	-3.26573E1	-3.26158E1	2.68088E1	1.20383E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16298E-1	-7.98416E-1	-9.13162E0	-9.14204E0	4.76837E-3	9.36031E-2	2.72874E1	-3.26596E1	-3.26213E1	2.67998E1	1.19861E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.15988E-1	-7.98392E-1	-9.13169E0	-9.14228E0	5.10216E-3	9.38892E-2	2.73496E1	-3.26633E1	-3.26122E1	2.67932E1	1.20158E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.02253E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.16083E-1	-7.98249E-1	-9.13148E0	-9.14216E0	5.03063E-3	9.37939E-2	2.73228E1	-3.26744E1	-3.26366E1	2.67914E1	1.20122E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.1563E-1	-7.98655E-1	-9.13143E0	-9.14192E0	4.69685E-3	9.38654E-2	2.73117E1	-3.26633E1	-3.25912E1	2.67974E1	1.198E-7	2.52061E-3	2.52061E-3	6.35601E-3	2.97901E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.15725E-1	-7.98678E-1	-9.13141E0	-9.14197E0	4.31538E-3	9.36031E-2	2.72336E1	-3.26699E1	-3.26681E1	2.68064E1	1.20069E-7	2.52538E-3	2.52538E-3	6.33486E-3	2.95899E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.15654E-1	-7.98416E-1	-9.1311E0	-9.14197E0	4.41074E-3	9.38177E-2	2.73033E1	-3.26903E1	-3.26314E1	2.68424E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.95899E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.15773E-1	-7.9844E-1	-9.13143E0	-9.14204E0	4.79221E-3	9.38892E-2	2.74072E1	-3.26711E1	-3.26314E1	2.68088E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.96671E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16202E-1	-7.98655E-1	-9.13141E0	-9.14209E0	4.91142E-3	9.39131E-2	2.7309E1	-3.26652E1	-3.26176E1	2.68205E1	1.20017E-7	2.50898E-3	2.50898E-3	6.32386E-3	2.97704E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.15988E-1	-7.9875E-1	-9.13141E0	-9.14214E0	5.14984E-3	9.377E-2	2.73364E1	-3.26354E1	-3.26425E1	2.68274E1	1.19967E-7	2.51752E-3	2.51752E-3	6.33297E-3	3.01365E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.15868E-1	-7.98368E-1	-9.13188E0	-9.14218E0	4.81606E-3	9.37939E-2	2.72961E1	-3.2623E1	-3.26374E1	2.68124E1	1.20311E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.03286E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.15797E-1	-7.98368E-1	-9.13131E0	-9.14199E0	4.64916E-3	9.37462E-2	2.72272E1	-3.26449E1	-3.26071E1	2.6807E1	1.20174E-7	2.5199E-3	2.5199E-3	6.34588E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.15797E-1	-7.98225E-1	-9.13146E0	-9.14211E0	4.673E-3	9.36508E-2	2.73021E1	-3.26679E1	-3.26183E1	2.68232E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00966E-1