[Scan]
initial_time=2016-01-27T21:57:24
final_time=2016-01-27T21:57:43
ip_count=19
run=1025
dataset=4
scan=294
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08833E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=6.43134E-10
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=3.06714E-10
ql3_vset=
ql3_vmon=-9.13172E0
ql3_imon=6.04999E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=5.57315E-10
mult1=-9.81263E-9
mult2=-2.78049E-9
rf_tmon=-4.87292E-3
rf_agc=3.27147E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=4.02415E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6668E0
bslens_imon=2.63174E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19877E1
lens5a_imon=1.99855E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=2.77439E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02252E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04776E1
cs_ea1_imon=2.58219E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36253E0
lens1_imon=2.59989E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.99243E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04251E1
cs_ea2_imon=1.51259E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=2.90161E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=4.0586E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=2.87422E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15229E1
os_ea1_imon=1.89661E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.08397E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23145E0
cs_ionrep_imon=1.17847E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=2.90774E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=7.72274E-10
tplens_vset=1.4E-1
tplens_vmon=1.66267E0
tplens_imon=-3.02427E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26032E1
iondef3_imon=1.49878E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26693E1
iondef2_imon=1.56603E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98459E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=3.78203E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29339E0
ionrepsh_imon=1.74371E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33781E1
lens5b_imon=2.18012E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.45726E-1
os_ea2_imon=-4.617E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00559E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.20687E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62038E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.25945E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=2.86737E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.28442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.24389E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73243E1
iondef1_imon=1.09529E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.99772E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=2.82335E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12413E0
cs_ionaccel_imon=-1.8014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.01987E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56171E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.20346E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39217E-4
mask2_vset=0.0E0
mask2_vmon=-1.86861E1
mask2_imon=-5.97678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.48427E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.9746E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.23651E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.51632E0
defgridb_imon=6.08267E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33915E1
os_fil1_imon=4.62606E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.6654E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62171E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30637E1
cs_fil1_imon=9.96684E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63934E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62189E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.19298E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.53906E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.43507E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.20346E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22031E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21493E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=3.01356E-1
chamber_ion_pmon=1.20142E-7
chamber_cvt_pmon=2.51919E-3
foreline_cvt_pmon=2.51919E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.70104E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.15988E-1	-7.98774E-1	-9.13141E0	-9.14202E0	4.81606E-3	9.35078E-2	2.72721E1	-3.26714E1	-3.26331E1	2.67966E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.99941E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16178E-1	-7.98583E-1	-9.13148E0	-9.14197E0	4.76837E-3	9.34124E-2	2.72997E1	-3.26717E1	-3.26765E1	2.68004E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.1594E-1	-7.9875E-1	-9.13129E0	-9.14173E0	5.14984E-3	9.37939E-2	2.73249E1	-3.26609E1	-3.26314E1	2.67902E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01085E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.16226E-1	-7.98535E-1	-9.13153E0	-9.14199E0	4.60148E-3	9.3627E-2	2.73147E1	-3.26693E1	-3.26344E1	2.68106E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00563E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16107E-1	-7.98249E-1	-9.13131E0	-9.14221E0	4.72069E-3	9.34839E-2	2.72991E1	-3.26669E1	-3.26146E1	2.68304E1	1.19861E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.1594E-1	-7.98583E-1	-9.13126E0	-9.14207E0	4.673E-3	9.36747E-2	2.7275E1	-3.26579E1	-3.2613E1	2.67938E1	1.20017E-7	2.51007E-3	2.51007E-3	6.34588E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16083E-1	-7.98607E-1	-9.1311E0	-9.1418E0	4.74453E-3	9.35793E-2	2.72971E1	-3.2667E1	-3.26113E1	2.67896E1	1.20158E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16345E-1	-7.98249E-1	-9.13122E0	-9.14197E0	4.86374E-3	9.377E-2	2.73234E1	-3.26413E1	-3.26172E1	2.67856E1	1.19872E-7	2.52027E-3	2.52027E-3	6.32418E-3	2.99879E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.15892E-1	-7.98106E-1	-9.13115E0	-9.14187E0	4.64916E-3	9.36508E-2	2.72336E1	-3.26621E1	-3.26609E1	2.67988E1	1.20414E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.99175E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16298E-1	-7.97915E-1	-9.13136E0	-9.14192E0	4.72069E-3	9.35078E-2	2.73689E1	-3.27038E1	-3.26277E1	2.67976E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.16369E-1	-7.98488E-1	-9.13153E0	-9.14192E0	4.76837E-3	9.35793E-2	2.73198E1	-3.26536E1	-3.26058E1	2.67884E1	1.20016E-7	2.51345E-3	2.51345E-3	6.3074E-3	2.99663E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-8.16154E-1	-7.98297E-1	-9.13177E0	-9.14216E0	4.95911E-3	9.35793E-2	2.73128E1	-3.26915E1	-3.26756E1	2.68238E1	1.19705E-7	2.51116E-3	2.51116E-3	6.29645E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.16345E-1	-7.98678E-1	-9.13162E0	-9.14209E0	5.126E-3	9.34124E-2	2.72443E1	-3.27074E1	-3.26543E1	2.6803E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.1625E-1	-7.98154E-1	-9.13165E0	-9.14202E0	5.29289E-3	9.39131E-2	2.73754E1	-3.26861E1	-3.26254E1	2.68052E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01738E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.16536E-1	-7.98082E-1	-9.13138E0	-9.14202E0	5.14984E-3	9.37939E-2	2.73069E1	-3.26338E1	-3.259E1	2.67998E1	1.20017E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.97963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0934E0	-8.1625E-1	-7.98368E-1	-9.13162E0	-9.1424E0	5.17368E-3	9.39131E-2	2.73039E1	-3.26705E1	-3.26314E1	2.68004E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.98222E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.16131E-1	-7.9813E-1	-9.13165E0	-9.14207E0	5.17368E-3	9.35793E-2	2.73222E1	-3.26915E1	-3.26154E1	2.68198E1	1.2033E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16083E-1	-7.98321E-1	-9.13153E0	-9.14187E0	5.22137E-3	9.36747E-2	2.73381E1	-3.265E1	-3.26128E1	2.68148E1	1.20042E-7	2.51393E-3	2.51393E-3	6.31269E-3	3.00348E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.16464E-1	-7.98225E-1	-9.13165E0	-9.14195E0	4.91142E-3	9.36985E-2	2.73097E1	-3.26556E1	-3.26359E1	2.68088E1	1.19819E-7	2.51136E-3	2.51136E-3	6.32978E-3	2.99613E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16321E-1	-7.98225E-1	-9.13172E0	-9.14214E0	4.74453E-3	9.39131E-2	2.73243E1	-3.26693E1	-3.26032E1	2.68154E1	1.20142E-7	2.51919E-3	2.51919E-3	6.31798E-3	3.01356E-1