[Scan]
initial_time=2016-01-27T21:57:51
final_time=2016-01-27T21:58:10
ip_count=19
run=1025
dataset=4
scan=295
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=6.31011E-10
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=3.20232E-10
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=6.14691E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=5.44584E-10
mult1=-1.04292E-8
mult2=-2.98712E-9
rf_tmon=-5.01028E-3
rf_agc=3.30114E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=3.66747E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65206E0
bslens_imon=2.60697E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19913E1
lens5a_imon=1.99182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05344E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53724E1
cs_ef1b_imon=2.76214E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02369E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=2.58715E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38318E0
lens1_imon=2.82995E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64428E1
os_ef1alow_imon=2.98919E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03938E1
cs_ea2_imon=1.53453E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=2.89404E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=3.79491E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=2.87927E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=1.89059E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63449E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27333E0
cs_ionrep_imon=1.17528E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93466E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=2.89657E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=7.1032E-10
tplens_vset=1.4E-1
tplens_vmon=1.65618E0
tplens_imon=-1.96244E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26087E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26959E1
iondef2_imon=1.58904E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98526E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=3.6968E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30873E0
ionrepsh_imon=1.74336E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33545E1
lens5b_imon=2.19286E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.14091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.28029E-1
os_ea2_imon=-5.04173E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00584E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.20254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64441E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.34354E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=2.86629E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.30813E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.241E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73073E1
iondef1_imon=1.09317E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67925E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=1.90685E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=3.00312E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-1.81582E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02039E2
cs_ionfocb_imon=1.47194E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56177E1
einzel_imon=7.82119E-6
window_vset=0.0E0
window_vmon=2.32359E-1
window_imon=-8.89599E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86849E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.64001E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.741E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.35685E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.4425E0
defgridb_imon=6.24548E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33906E1
os_fil1_imon=4.3017E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.10388E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62093E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30641E1
cs_fil1_imon=9.97513E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63369E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62629E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02836E-2
os_fil2_imon=-2.38966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.07615E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.33762E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.26353E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21599E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.36144E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.68302E-1
res40_imon=-2.37083E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.16536E-1	-7.98225E-1	-9.13122E0	-9.14192E0	5.07832E-3	9.39846E-2	2.72534E1	-3.26543E1	-3.26248E1	2.68016E1	1.19902E-7	2.52384E-3	2.52384E-3	6.32896E-3	2.98665E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.16298E-1	-7.98559E-1	-9.13148E0	-9.14211E0	5.22137E-3	9.36985E-2	2.73886E1	-3.26657E1	-3.2635E1	2.67872E1	1.19965E-7	2.51443E-3	2.51443E-3	6.29098E-3	2.97704E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16393E-1	-7.98368E-1	-9.13167E0	-9.14209E0	4.74453E-3	9.35555E-2	2.72467E1	-3.26797E1	-3.25995E1	2.68007E1	1.19965E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.00563E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16345E-1	-7.98225E-1	-9.13146E0	-9.1418E0	4.8399E-3	9.35316E-2	2.7296E1	-3.26505E1	-3.2597E1	2.68041E1	1.19953E-7	2.51847E-3	2.51847E-3	6.28056E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16321E-1	-7.98225E-1	-9.13131E0	-9.14204E0	4.79221E-3	9.3627E-2	2.73249E1	-3.26837E1	-3.26368E1	2.68238E1	1.20226E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02728E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.15916E-1	-7.9844E-1	-9.13136E0	-9.14197E0	5.07832E-3	9.38654E-2	2.72955E1	-3.26404E1	-3.2626E1	2.67717E1	1.2033E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16274E-1	-7.98726E-1	-9.13141E0	-9.14228E0	4.98295E-3	9.36747E-2	2.72432E1	-3.26344E1	-3.26032E1	2.6825E1	1.20004E-7	2.52492E-3	2.52492E-3	6.31278E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16607E-1	-7.98559E-1	-9.13138E0	-9.14221E0	4.74453E-3	9.36031E-2	2.72613E1	-3.26693E1	-3.26556E1	2.68155E1	1.20563E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.0041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16345E-1	-7.98297E-1	-9.13146E0	-9.14223E0	4.74453E-3	9.34839E-2	2.73159E1	-3.26597E1	-3.2593E1	2.68202E1	1.19683E-7	2.51783E-3	2.51783E-3	6.3126E-3	3.01237E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16631E-1	-7.98345E-1	-9.13148E0	-9.14197E0	4.55379E-3	9.35793E-2	2.73918E1	-3.26797E1	-3.26484E1	2.68022E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16345E-1	-7.98273E-1	-9.1311E0	-9.14221E0	4.60148E-3	9.36747E-2	2.72622E1	-3.26517E1	-3.26168E1	2.67956E1	1.19902E-7	2.51096E-3	2.51096E-3	6.30202E-3	2.9892E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16226E-1	-7.98178E-1	-9.13143E0	-9.14216E0	4.79221E-3	9.35078E-2	2.72859E1	-3.26494E1	-3.26494E1	2.68124E1	1.20297E-7	2.51248E-3	2.51248E-3	6.31858E-3	2.98554E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.16011E-1	-7.98059E-1	-9.13153E0	-9.14223E0	5.17368E-3	9.39131E-2	2.72654E1	-3.26699E1	-3.25966E1	2.67878E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.1594E-1	-7.98297E-1	-9.13177E0	-9.14218E0	5.00679E-3	9.38177E-2	2.72769E1	-3.26506E1	-3.26218E1	2.68274E1	1.20174E-7	2.51443E-3	2.51443E-3	6.3514E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.15845E-1	-7.98202E-1	-9.13169E0	-9.14199E0	5.03063E-3	9.3627E-2	2.73189E1	-3.26512E1	-3.26609E1	2.6801E1	1.19861E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16083E-1	-7.98488E-1	-9.13179E0	-9.14183E0	4.95911E-3	9.36508E-2	2.73198E1	-3.26419E1	-3.26119E1	2.68136E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00453E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16011E-1	-7.98392E-1	-9.1316E0	-9.14176E0	4.72069E-3	9.37939E-2	2.72868E1	-3.26514E1	-3.26272E1	2.68377E1	1.20226E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.16202E-1	-7.98035E-1	-9.13179E0	-9.1419E0	4.64916E-3	9.34362E-2	2.73405E1	-3.26518E1	-3.26248E1	2.68028E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.9943E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.1656E-1	-7.98345E-1	-9.13186E0	-9.14178E0	5.19753E-3	9.35078E-2	2.73045E1	-3.26673E1	-3.25995E1	2.6801E1	1.20069E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.9874E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16059E-1	-7.98368E-1	-9.1316E0	-9.14207E0	4.88758E-3	9.34124E-2	2.73073E1	-3.26959E1	-3.26087E1	2.67925E1	1.2026E-7	2.51954E-3	2.51954E-3	6.36144E-3	3.00966E-1