[Scan]
initial_time=2016-01-27T21:58:44
final_time=2016-01-27T21:59:04
ip_count=19
run=1025
dataset=4
scan=297
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-8.16131E-1
ql1_imon=6.37555E-10
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=2.95591E-10
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=6.57535E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=5.52046E-10
mult1=-9.53482E-9
mult2=-2.83105E-9
rf_tmon=-7.06965E-3
rf_agc=3.11206E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=4.03821E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6367E0
bslens_imon=2.65311E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19953E1
lens5a_imon=1.99208E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05039E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=2.76358E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04928E1
cs_ea1_imon=2.57176E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35694E0
lens1_imon=2.58822E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64897E1
os_ef1alow_imon=2.99171E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03961E1
cs_ea2_imon=1.54074E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8395E1
cs_ef1a_imon=2.89368E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=4.09496E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=2.87674E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=1.89187E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.08758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21485E0
cs_ionrep_imon=1.17736E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93355E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.89801E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=7.3024E-10
tplens_vset=1.4E-1
tplens_vmon=1.67808E0
tplens_imon=-1.55148E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26036E1
iondef3_imon=1.50397E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26514E1
iondef2_imon=1.58977E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.98522E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=3.78931E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28755E0
ionrepsh_imon=1.74803E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3379E1
lens5b_imon=2.19504E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.16275E-1
os_ea2_imon=-4.83199E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00543E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.20038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61317E0
os_ef2alow_imon=-2.62311E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.46368E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11009E1
os_restr2_imon=2.86665E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.31082E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.23812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73558E1
iondef1_imon=1.09048E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.99963E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=2.91431E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11512E0
cs_ionaccel_imon=-1.68247E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02043E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.77794E-6
window_vset=0.0E0
window_vmon=2.67197E-1
window_imon=-1.05899E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39264E-4
mask2_vset=0.0E0
mask2_vmon=-1.86825E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.5955E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.36621E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.33234E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.5126E0
defgridb_imon=6.13189E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33913E1
os_fil1_imon=4.52394E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.43114E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62143E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30604E1
cs_fil1_imon=9.97086E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62804E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62201E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.24738E-2
os_fil2_imon=-2.38966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.68031E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.53106E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25034E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.214E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.83919E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.16393E-1	-7.9844E-1	-9.13115E0	-9.14216E0	5.00679E-3	9.40323E-2	2.72992E1	-3.26691E1	-3.26402E1	2.67896E1	1.20174E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.16011E-1	-7.9906E-1	-9.13124E0	-9.14228E0	4.95911E-3	9.3627E-2	2.73484E1	-3.26705E1	-3.26446E1	2.67848E1	1.20158E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.01995E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.15845E-1	-7.98559E-1	-9.13084E0	-9.14207E0	4.81606E-3	9.37462E-2	2.73098E1	-3.26502E1	-3.26372E1	2.68018E1	1.20435E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00041E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.1594E-1	-7.98607E-1	-9.131E0	-9.14211E0	4.79221E-3	9.36747E-2	2.72696E1	-3.2648E1	-3.26217E1	2.67824E1	1.20106E-7	2.51417E-3	2.51417E-3	6.28056E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.15892E-1	-7.98631E-1	-9.13136E0	-9.14214E0	4.673E-3	9.37223E-2	2.73234E1	-3.26579E1	-3.2593E1	2.68172E1	1.2033E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.15678E-1	-7.98464E-1	-9.13141E0	-9.14195E0	4.79221E-3	9.35078E-2	2.73177E1	-3.26741E1	-3.26284E1	2.6801E1	1.19953E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.98665E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.15916E-1	-7.98345E-1	-9.1315E0	-9.14166E0	4.3869E-3	9.39369E-2	2.73003E1	-3.26615E1	-3.26777E1	2.68076E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.15773E-1	-7.98321E-1	-9.13131E0	-9.14214E0	4.62532E-3	9.38892E-2	2.72829E1	-3.2659E1	-3.26055E1	2.6806E1	1.20435E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.98222E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16059E-1	-7.98368E-1	-9.13126E0	-9.14202E0	4.48227E-3	9.38892E-2	2.72926E1	-3.26578E1	-3.26322E1	2.67978E1	1.20276E-7	2.51679E-3	2.51679E-3	6.3074E-3	2.99506E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16059E-1	-7.98416E-1	-9.13103E0	-9.14183E0	4.62532E-3	9.38416E-2	2.73057E1	-3.27083E1	-3.26687E1	2.68053E1	1.20005E-7	2.51642E-3	2.51642E-3	6.35399E-3	3.01193E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-8.16154E-1	-7.98273E-1	-9.13117E0	-9.14168E0	4.52995E-3	9.40084E-2	2.72768E1	-3.26467E1	-3.26384E1	2.68244E1	1.20055E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.03027E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16011E-1	-7.98416E-1	-9.13103E0	-9.14183E0	4.8399E-3	9.36985E-2	2.72671E1	-3.26591E1	-3.25923E1	2.67794E1	1.19809E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.16417E-1	-7.9844E-1	-9.131E0	-9.14183E0	4.81606E-3	9.377E-2	2.73405E1	-3.26687E1	-3.26296E1	2.67951E1	1.20174E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16083E-1	-7.98583E-1	-9.13138E0	-9.14187E0	4.36306E-3	9.35078E-2	2.73322E1	-3.26496E1	-3.26178E1	2.68319E1	1.19819E-7	2.51581E-3	2.51581E-3	6.34661E-3	2.98819E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.1625E-1	-7.98464E-1	-9.13112E0	-9.14207E0	4.79221E-3	9.34839E-2	2.73141E1	-3.26783E1	-3.26164E1	2.67884E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.9714E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16417E-1	-7.98488E-1	-9.13115E0	-9.14204E0	4.24385E-3	9.34839E-2	2.72895E1	-3.2641E1	-3.26585E1	2.68211E1	1.20174E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.95129E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16083E-1	-7.98726E-1	-9.13119E0	-9.14192E0	4.52995E-3	9.35078E-2	2.72762E1	-3.26756E1	-3.26284E1	2.68259E1	1.20363E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.97394E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16083E-1	-7.98535E-1	-9.13107E0	-9.14207E0	4.81606E-3	9.35793E-2	2.73634E1	-3.26861E1	-3.26104E1	2.67938E1	1.20644E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.97445E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.16083E-1	-7.98106E-1	-9.13119E0	-9.14197E0	4.60148E-3	9.36031E-2	2.73123E1	-3.26615E1	-3.26332E1	2.68175E1	1.20174E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16131E-1	-7.98082E-1	-9.1311E0	-9.14192E0	5.07832E-3	9.36031E-2	2.73558E1	-3.26514E1	-3.26036E1	2.68076E1	1.2026E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.01738E-1