[Scan]
initial_time=2016-01-27T22:00:31
final_time=2016-01-27T22:00:51
ip_count=19
run=1025
dataset=4
scan=301
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.0882E-4
ql1_vset=
ql1_vmon=-8.15821E-1
ql1_imon=6.59811E-10
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=3.03793E-10
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=5.79619E-10
ql4_vset=
ql4_vmon=-9.14164E0
ql4_imon=5.59986E-10
mult1=-9.61998E-9
mult2=-2.77849E-9
rf_tmon=-4.30814E-3
rf_agc=3.35018E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=3.79205E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66794E0
bslens_imon=2.60264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19929E1
lens5a_imon=1.99064E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.04895E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=2.76482E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02352E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=2.57753E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36054E0
lens1_imon=2.62427E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6467E1
os_ef1alow_imon=2.98915E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03624E1
cs_ea2_imon=1.53498E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84769E1
cs_ef1a_imon=2.90671E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=3.72803E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11601E1
os_restr1_imon=2.88902E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1527E1
os_ea1_imon=1.89367E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63768E1
os_ef1bup_imon=3.09566E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24849E0
cs_ionrep_imon=1.19214E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.90919E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=6.6396E-10
tplens_vset=1.4E-1
tplens_vmon=1.64444E0
tplens_imon=-1.47938E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26182E1
iondef3_imon=1.50938E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.57355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=3.59344E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23888E0
ionrepsh_imon=1.7383E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.19648E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.12857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.06662E-1
os_ea2_imon=-5.15643E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00468E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71063E1
cs_ef2a_imon=3.19226E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63103E0
os_ef2alow_imon=-2.48164E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.41595E-1
os_ef2bup_imon=-5.12839E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1107E1
os_restr2_imon=2.86849E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.29532E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01738E1
cs_anode2_imon=2.24077E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73442E1
iondef1_imon=1.084E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.08371E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.02185E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82976E-1
olens1_imon=3.11768E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11481E0
cs_ionaccel_imon=-1.74564E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02041E2
cs_ionfocb_imon=1.47184E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56358E1
einzel_imon=7.67015E-6
window_vset=0.0E0
window_vmon=2.08966E-1
window_imon=-1.06272E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39158E-4
mask2_vset=0.0E0
mask2_vmon=-1.86822E1
mask2_imon=-6.20416E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92676E3
multa_neg_imon=6.80962E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.70147E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.60271E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.39831E0
defgridb_imon=6.10305E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33921E1
os_fil1_imon=4.75132E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.26951E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62095E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3064E1
cs_fil1_imon=9.95945E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63404E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62457E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.27317E-2
os_fil2_imon=-2.37274E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.59038E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.41505E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29842E-1
cs_fil2_imon=-2.30786E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15981E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21582E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01176E-1
chamber_ion_pmon=1.20149E-7
chamber_cvt_pmon=2.51709E-3
foreline_cvt_pmon=2.51709E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.79005E-1
res40_imon=-2.38256E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16202E-1	-7.98368E-1	-9.13122E0	-9.14183E0	4.93526E-3	9.35316E-2	2.73491E1	-3.26677E1	-3.26254E1	2.67998E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.03449E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.15654E-1	-7.98154E-1	-9.13126E0	-9.14178E0	4.62532E-3	9.35555E-2	2.733E1	-3.26388E1	-3.25988E1	2.68222E1	1.20192E-7	2.51393E-3	2.51393E-3	6.33388E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.15988E-1	-7.98059E-1	-9.13131E0	-9.14204E0	4.91142E-3	9.35078E-2	2.72817E1	-3.26536E1	-3.26663E1	2.68038E1	1.20042E-7	2.51814E-3	2.51814E-3	6.3074E-3	3.00852E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.15678E-1	-7.98011E-1	-9.13138E0	-9.14202E0	4.79221E-3	9.34601E-2	2.73201E1	-3.26651E1	-3.26164E1	2.68088E1	1.19965E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.15988E-1	-7.98202E-1	-9.13136E0	-9.1418E0	4.98295E-3	9.35078E-2	2.72927E1	-3.26744E1	-3.26213E1	2.67842E1	1.20174E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.16083E-1	-7.98082E-1	-9.13134E0	-9.14218E0	4.3869E-3	9.34601E-2	2.72787E1	-3.26494E1	-3.25978E1	2.67992E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16154E-1	-7.98249E-1	-9.131E0	-9.14183E0	4.55379E-3	9.32455E-2	2.72787E1	-3.26723E1	-3.26056E1	2.68136E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.97963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.15606E-1	-7.98273E-1	-9.13126E0	-9.14187E0	4.79221E-3	9.38654E-2	2.73213E1	-3.26536E1	-3.26428E1	2.68172E1	1.20122E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16107E-1	-7.98202E-1	-9.13112E0	-9.14187E0	4.93526E-3	9.33886E-2	2.73261E1	-3.26482E1	-3.26494E1	2.68106E1	1.20106E-7	2.52061E-3	2.52061E-3	6.28592E-3	2.9943E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-8.16011E-1	-7.98416E-1	-9.13124E0	-9.14173E0	4.8399E-3	9.32932E-2	2.73287E1	-3.26868E1	-3.26071E1	2.67782E1	1.19965E-7	2.52757E-3	2.52757E-3	6.32386E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.15964E-1	-7.98583E-1	-9.13141E0	-9.14192E0	4.60148E-3	9.34839E-2	2.72528E1	-3.2647E1	-3.26272E1	2.68059E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16178E-1	-7.98893E-1	-9.13122E0	-9.14199E0	4.81606E-3	9.35555E-2	2.73558E1	-3.26732E1	-3.26443E1	2.67902E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16226E-1	-7.98535E-1	-9.13138E0	-9.14159E0	4.76837E-3	9.36985E-2	2.72782E1	-3.2697E1	-3.26407E1	2.6797E1	1.20017E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16298E-1	-7.98845E-1	-9.13131E0	-9.14185E0	4.55379E-3	9.35793E-2	2.72762E1	-3.26756E1	-3.26585E1	2.67943E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.15821E-1	-7.98059E-1	-9.13131E0	-9.14168E0	4.673E-3	9.35316E-2	2.73147E1	-3.26536E1	-3.2596E1	2.67956E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.15892E-1	-7.98464E-1	-9.13119E0	-9.1418E0	4.98295E-3	9.34124E-2	2.73091E1	-3.26676E1	-3.2638E1	2.67984E1	1.20278E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.01085E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.16274E-1	-7.98249E-1	-9.13129E0	-9.14166E0	4.36306E-3	9.3627E-2	2.7248E1	-3.26495E1	-3.26428E1	2.67853E1	1.1987E-7	2.52466E-3	2.52466E-3	6.32784E-3	3.00392E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.15773E-1	-7.98321E-1	-9.13124E0	-9.14197E0	4.69685E-3	9.35078E-2	2.72797E1	-3.26736E1	-3.26125E1	2.67995E1	1.1987E-7	2.51956E-3	2.51956E-3	6.31251E-3	2.98454E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16178E-1	-7.98345E-1	-9.13088E0	-9.14197E0	4.86374E-3	9.35555E-2	2.73567E1	-3.26492E1	-3.26393E1	2.68108E1	1.19908E-7	2.51923E-3	2.51923E-3	6.3275E-3	3.00532E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.15821E-1	-7.98392E-1	-9.13117E0	-9.14164E0	4.72069E-3	9.38177E-2	2.73442E1	-3.26573E1	-3.26182E1	2.6798E1	1.20149E-7	2.51709E-3	2.51709E-3	6.3074E-3	3.01176E-1