[Scan]
initial_time=2016-01-27T22:01:25
final_time=2016-01-27T22:01:45
ip_count=19
run=1025
dataset=4
scan=303
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-8.15773E-1
ql1_imon=6.55854E-10
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=3.12197E-10
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=5.92661E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=5.72467E-10
mult1=-9.58386E-9
mult2=-2.88429E-9
rf_tmon=-4.33218E-3
rf_agc=3.33216E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=4.09889E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67506E0
bslens_imon=2.58573E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19742E1
lens5a_imon=1.98333E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05054E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=2.7607E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.02185E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05118E1
cs_ea1_imon=2.56414E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36725E0
lens1_imon=2.58927E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64506E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03832E1
cs_ea2_imon=1.54338E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84136E1
cs_ef1a_imon=2.90089E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=4.30202E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=2.86881E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15105E1
os_ea1_imon=1.90192E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63461E1
os_ef1bup_imon=3.08541E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22555E0
cs_ionrep_imon=1.1905E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93455E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01689E1
cs_anode1_imon=2.91459E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20461E0
olens4_imon=7.92158E-10
tplens_vset=1.4E-1
tplens_vmon=1.63317E0
tplens_imon=-2.70572E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26038E1
iondef3_imon=1.51719E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26651E1
iondef2_imon=1.57063E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98332E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=4.16601E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2869E0
ionrepsh_imon=1.74866E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33675E1
lens5b_imon=2.21799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.30979E-1
os_ea2_imon=-7.80247E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00421E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.18705E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62399E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.27747E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10895E1
os_restr2_imon=2.87566E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30141E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.24533E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74865E1
iondef1_imon=1.08503E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.08701E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=2.01485E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82761E-1
olens1_imon=3.26443E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-1.7077E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.10735E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86813E1
mask2_imon=-5.29203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92669E3
multa_neg_imon=7.60107E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.54279E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.15511E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.54585E0
defgridb_imon=6.08975E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33911E1
os_fil1_imon=4.63206E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.5693E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62249E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30679E1
cs_fil1_imon=9.95885E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63273E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62594E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.14232E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29879E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.38318E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.16141E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07014E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21564E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.98645E-1
res40_imon=-2.50778E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.15892E-1	-7.97939E-1	-9.13131E0	-9.14207E0	5.05447E-3	9.34839E-2	2.72444E1	-3.26506E1	-3.26512E1	2.67984E1	1.20122E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00563E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.16178E-1	-7.98225E-1	-9.13107E0	-9.14164E0	5.03063E-3	9.33409E-2	2.73299E1	-3.26756E1	-3.2613E1	2.67956E1	1.20209E-7	2.52384E-3	2.52384E-3	6.35059E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.16011E-1	-7.98297E-1	-9.13086E0	-9.14176E0	4.91142E-3	9.33647E-2	2.73297E1	-3.26296E1	-3.265E1	2.68208E1	1.20055E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.9943E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16393E-1	-7.98106E-1	-9.13126E0	-9.14168E0	4.8399E-3	9.32932E-2	2.72868E1	-3.2685E1	-3.26107E1	2.67926E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.98481E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16321E-1	-7.98106E-1	-9.13129E0	-9.14187E0	4.93526E-3	9.32693E-2	2.72939E1	-3.26624E1	-3.25936E1	2.68194E1	1.20311E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16035E-1	-7.98488E-1	-9.13107E0	-9.14218E0	4.64916E-3	9.3317E-2	2.73161E1	-3.26682E1	-3.26346E1	2.68058E1	1.19782E-7	2.51783E-3	2.51783E-3	6.3126E-3	3.00247E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.16059E-1	-7.98035E-1	-9.13169E0	-9.1418E0	5.05447E-3	9.36747E-2	2.72961E1	-3.26404E1	-3.265E1	2.68004E1	1.20174E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.02659E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.15916E-1	-7.97915E-1	-9.13134E0	-9.14228E0	4.74453E-3	9.34124E-2	2.72561E1	-3.26508E1	-3.2613E1	2.6825E1	1.20226E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.02659E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.15797E-1	-7.98392E-1	-9.13117E0	-9.14202E0	4.673E-3	9.33409E-2	2.73484E1	-3.26783E1	-3.26296E1	2.68238E1	1.20174E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.1594E-1	-7.98535E-1	-9.13107E0	-9.14187E0	5.05447E-3	9.30786E-2	2.73092E1	-3.26655E1	-3.26071E1	2.68088E1	1.20055E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.9943E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09348E0	-8.1594E-1	-7.98392E-1	-9.13146E0	-9.14173E0	4.86374E-3	9.31978E-2	2.72971E1	-3.26542E1	-3.26425E1	2.67992E1	1.20069E-7	2.52647E-3	2.52647E-3	6.31288E-3	2.9874E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09348E0	-8.16226E-1	-7.98106E-1	-9.1315E0	-9.14192E0	4.55379E-3	9.36031E-2	2.72903E1	-3.26773E1	-3.26201E1	2.67896E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.98481E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.15725E-1	-7.98154E-1	-9.13136E0	-9.14183E0	4.76837E-3	9.377E-2	2.73195E1	-3.26777E1	-3.26819E1	2.67776E1	1.20017E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00563E-1
1.7E1	1.0E0	1.0E0	6.87E2	4.7E2	-2.09426E0	-8.15868E-1	-7.98631E-1	-9.13153E0	-9.14187E0	4.76837E-3	9.35555E-2	2.72296E1	-3.26608E1	-3.26095E1	2.68328E1	1.20122E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.02396E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16035E-1	-7.98655E-1	-9.13136E0	-9.14173E0	4.8399E-3	9.33409E-2	2.73968E1	-3.26379E1	-3.26322E1	2.6802E1	1.20444E-7	2.51603E-3	2.51603E-3	6.32328E-3	3.00852E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16107E-1	-7.98225E-1	-9.13131E0	-9.14173E0	5.00679E-3	9.33409E-2	2.72312E1	-3.26561E1	-3.26464E1	2.67897E1	1.19937E-7	2.51725E-3	2.51725E-3	6.29603E-3	3.01065E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16345E-1	-7.98535E-1	-9.13141E0	-9.14192E0	5.17368E-3	9.36985E-2	2.74083E1	-3.2672E1	-3.26012E1	2.68292E1	1.19913E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16178E-1	-7.98416E-1	-9.13134E0	-9.14207E0	5.03063E-3	9.35555E-2	2.71711E1	-3.26645E1	-3.26603E1	2.67842E1	1.20004E-7	2.5131E-3	2.5131E-3	6.34518E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.15964E-1	-7.98655E-1	-9.13117E0	-9.14164E0	4.86374E-3	9.34362E-2	2.72921E1	-3.26396E1	-3.2652E1	2.68076E1	1.20017E-7	2.5199E-3	2.5199E-3	6.28552E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.15773E-1	-7.98488E-1	-9.13146E0	-9.1418E0	4.98295E-3	9.34839E-2	2.74865E1	-3.26651E1	-3.26038E1	2.67992E1	1.2026E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.9943E-1