[Scan]
initial_time=2016-01-27T22:01:52
final_time=2016-01-27T22:02:12
ip_count=19
run=1025
dataset=4
scan=304
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08809E-4
ql1_vset=
ql1_vmon=-8.16274E-1
ql1_imon=6.53589E-10
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=2.80416E-10
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=6.07479E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=5.75542E-10
mult1=-1.02581E-8
mult2=-2.97212E-9
rf_tmon=-3.22666E-3
rf_agc=3.44091E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=3.64244E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65532E0
bslens_imon=2.49449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19977E1
lens5a_imon=1.99497E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=2.76178E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04586E2
lens23_imon=1.0224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04724E1
cs_ea1_imon=2.57933E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36775E0
lens1_imon=2.76126E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64891E1
os_ef1alow_imon=2.99567E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03576E1
cs_ea2_imon=1.52885E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=2.89693E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=3.85475E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=2.88251E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15179E1
os_ea1_imon=1.87817E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63509E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26111E0
cs_ionrep_imon=1.17881E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=2.89981E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=7.24959E-10
tplens_vset=1.4E-1
tplens_vmon=1.62821E0
tplens_imon=-1.98407E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.49496E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26765E1
iondef2_imon=1.58472E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98331E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=3.90756E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.37467E0
ionrepsh_imon=1.75848E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33778E1
lens5b_imon=2.18351E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.46316E-1
os_ea2_imon=-4.50754E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00515E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.20254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62338E0
os_ef2alow_imon=-2.42489E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.61384E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10697E1
os_restr2_imon=2.87494E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.30938E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.25001E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73448E1
iondef1_imon=1.09661E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67984E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=1.98281E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=2.61962E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10792E0
cs_ionaccel_imon=-1.87348E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56357E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=2.21547E-1
window_imon=-1.02295E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86813E1
mask2_imon=-5.32807E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92608E3
multa_neg_imon=7.3035E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.61135E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.07639E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.6329E0
defgridb_imon=6.2869E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3388E1
os_fil1_imon=4.53596E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.51524E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6217E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30707E1
cs_fil1_imon=9.97224E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63609E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62445E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09261E-2
os_fil2_imon=-2.30557E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.77932E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.5143E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3945E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21573E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40082E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.15754E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16321E-1	-7.98416E-1	-9.13131E0	-9.14197E0	4.72069E-3	9.35555E-2	2.7334E1	-3.26809E1	-3.26166E1	2.68018E1					
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16274E-1	-7.98082E-1	-9.13112E0	-9.14204E0	5.00679E-3	9.34601E-2	2.72985E1	-3.26849E1	-3.26128E1	2.68052E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.16441E-1	-7.98082E-1	-9.13122E0	-9.14183E0	5.00679E-3	9.34601E-2	2.72939E1	-3.26679E1	-3.26325E1	2.68124E1	1.20174E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00824E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.15964E-1	-7.98559E-1	-9.13117E0	-9.14209E0	4.76837E-3	9.34124E-2	2.7269E1	-3.26434E1	-3.26428E1	2.68111E1	1.20209E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16345E-1	-7.98297E-1	-9.13126E0	-9.14209E0	4.88758E-3	9.37462E-2	2.73375E1	-3.26679E1	-3.26272E1	2.68004E1	1.19809E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16178E-1	-7.97796E-1	-9.13105E0	-9.14195E0	4.95911E-3	9.38416E-2	2.72647E1	-3.26376E1	-3.2634E1	2.67976E1	1.19965E-7	2.51116E-3	2.51116E-3	6.29098E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16226E-1	-7.98321E-1	-9.13143E0	-9.14216E0	4.76837E-3	9.37462E-2	2.72727E1	-3.26386E1	-3.26278E1	2.67902E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.15749E-1	-7.98178E-1	-9.1315E0	-9.14187E0	4.86374E-3	9.377E-2	2.73157E1	-3.26697E1	-3.26024E1	2.67926E1	1.20122E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09333E0	-8.16441E-1	-7.98082E-1	-9.13155E0	-9.14226E0	4.93526E-3	9.36985E-2	2.73257E1	-3.26561E1	-3.2613E1	2.68154E1	1.20158E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.16011E-1	-7.98321E-1	-9.13138E0	-9.14204E0	4.76837E-3	9.35316E-2	2.73285E1	-3.26741E1	-3.26488E1	2.68094E1	1.20174E-7	2.51443E-3	2.51443E-3	6.27461E-3	3.00563E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.16131E-1	-7.98559E-1	-9.13131E0	-9.1419E0	5.03063E-3	9.34839E-2	2.73088E1	-3.26793E1	-3.26548E1	2.67944E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.98481E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.1625E-1	-7.98416E-1	-9.13119E0	-9.14185E0	4.48227E-3	9.39608E-2	2.72647E1	-3.26702E1	-3.26146E1	2.67903E1	1.19861E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-8.16035E-1	-7.98178E-1	-9.13131E0	-9.14207E0	4.69685E-3	9.38892E-2	2.73427E1	-3.27063E1	-3.26044E1	2.68294E1	1.19946E-7	2.5178E-3	2.5178E-3	6.32632E-3	3.01759E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.15845E-1	-7.98464E-1	-9.13117E0	-9.14226E0	4.41074E-3	9.36747E-2	2.7237E1	-3.26471E1	-3.2626E1	2.67839E1	1.1988E-7	2.51783E-3	2.51783E-3	6.3126E-3	3.02728E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.15845E-1	-7.97796E-1	-9.13105E0	-9.14228E0	4.3869E-3	9.408E-2	2.73213E1	-3.26666E1	-3.25941E1	2.6825E1	1.19851E-7	2.52384E-3	2.52384E-3	6.29262E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.15988E-1	-7.98345E-1	-9.13086E0	-9.14207E0	4.64916E-3	9.38892E-2	2.72883E1	-3.26735E1	-3.26404E1	2.67986E1	1.20092E-7	2.51709E-3	2.51709E-3	6.32328E-3	3.00852E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.15821E-1	-7.98273E-1	-9.13105E0	-9.14242E0	4.57764E-3	9.38416E-2	2.7301E1	-3.26944E1	-3.26437E1	2.68285E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.16083E-1	-7.98082E-1	-9.13107E0	-9.14199E0	4.57764E-3	9.39369E-2	2.72883E1	-3.26777E1	-3.26074E1	2.68058E1	1.20114E-7	2.5143E-3	2.5143E-3	6.32644E-3	3.00766E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.15773E-1	-7.98392E-1	-9.13138E0	-9.14211E0	4.62532E-3	9.36747E-2	2.73122E1	-3.2672E1	-3.26124E1	2.67505E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.16274E-1	-7.98035E-1	-9.1311E0	-9.14214E0	4.48227E-3	9.37462E-2	2.73448E1	-3.26765E1	-3.26056E1	2.67984E1	1.20055E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.02253E-1