[Scan]
initial_time=2016-01-27T22:02:19
final_time=2016-01-27T22:02:38
ip_count=19
run=1025
dataset=4
scan=305
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08756E-4
ql1_vset=
ql1_vmon=-8.16512E-1
ql1_imon=6.10042E-10
ql2_vset=
ql2_vmon=-7.97868E-1
ql2_imon=2.72775E-10
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=5.82409E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=5.37705E-10
mult1=-1.00173E-8
mult2=-2.91024E-9
rf_tmon=-4.09185E-3
rf_agc=3.42228E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=3.86441E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65088E0
bslens_imon=2.43177E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20259E1
lens5a_imon=1.98234E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.04905E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53672E1
cs_ef1b_imon=2.76988E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02285E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05092E1
cs_ea1_imon=2.57841E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37451E0
lens1_imon=2.64201E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64999E1
os_ef1alow_imon=2.99922E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03554E1
cs_ea2_imon=1.54472E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83946E1
cs_ef1a_imon=2.89962E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=4.09877E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1141E1
os_restr1_imon=2.88168E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15098E1
os_ea1_imon=1.90252E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63708E1
os_ef1bup_imon=3.09156E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23198E0
cs_ionrep_imon=1.20094E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93451E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01707E1
cs_anode1_imon=2.90801E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=7.21991E-10
tplens_vset=1.4E-1
tplens_vmon=1.63949E0
tplens_imon=-1.61204E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26152E1
iondef3_imon=1.48866E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26747E1
iondef2_imon=1.56886E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.98385E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=3.75533E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23847E0
ionrepsh_imon=1.71837E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3371E1
lens5b_imon=2.19297E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74667E1
cs_ef2b_imon=3.12934E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.19063E-1
os_ea2_imon=-5.23286E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00712E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7129E1
cs_ef2a_imon=3.19345E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.633E0
os_ef2alow_imon=-2.39775E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.24285E-1
os_ef2bup_imon=-5.24065E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10863E1
os_restr2_imon=2.87138E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.29461E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01758E1
cs_anode2_imon=2.24594E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74084E1
iondef1_imon=1.08375E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68238E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.03282E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=2.80344E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12187E0
cs_ionaccel_imon=-1.66127E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47367E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56596E1
einzel_imon=7.6077E-6
window_vset=0.0E0
window_vmon=2.59707E-1
window_imon=-7.33993E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39225E-4
mask2_vset=0.0E0
mask2_vmon=-1.86827E1
mask2_imon=-5.77538E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=6.78064E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93679E3
defgrida_imon=5.89685E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.24395E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.46376E0
defgridb_imon=6.1577E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33907E1
os_fil1_imon=4.95854E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.73783E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62311E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30619E1
cs_fil1_imon=9.96721E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63548E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62431E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05495E-2
os_fil2_imon=-2.38083E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.39058E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.45089E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29446E-1
cs_fil2_imon=-2.30451E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38425E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21544E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40046E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.76774E-1
res40_imon=-2.42828E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.16393E-1	-7.97749E-1	-9.13107E0	-9.14223E0	5.07832E-3	9.33886E-2	2.73207E1	-3.26801E1	-3.26212E1	2.68178E1					
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.16393E-1	-7.97963E-1	-9.13098E0	-9.14233E0	4.98295E-3	9.35793E-2	2.7334E1	-3.26626E1	-3.26231E1	2.67914E1	1.20383E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01085E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16441E-1	-7.98011E-1	-9.13098E0	-9.14207E0	5.45979E-3	9.3317E-2	2.72925E1	-3.26512E1	-3.26476E1	2.68034E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00824E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16655E-1	-7.98345E-1	-9.1315E0	-9.14237E0	5.03063E-3	9.35316E-2	2.72306E1	-3.26356E1	-3.26218E1	2.68034E1	1.20158E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.16369E-1	-7.98202E-1	-9.13143E0	-9.14197E0	5.126E-3	9.33886E-2	2.7355E1	-3.26693E1	-3.26392E1	2.68124E1	1.20278E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.16178E-1	-7.98297E-1	-9.13126E0	-9.14178E0	4.98295E-3	9.34124E-2	2.72533E1	-3.26585E1	-3.26368E1	2.68192E1	1.20226E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.16131E-1	-7.98178E-1	-9.13155E0	-9.14228E0	4.72069E-3	9.34362E-2	2.73388E1	-3.26799E1	-3.26312E1	2.68294E1	1.1988E-7	2.5199E-3	2.5199E-3	6.3126E-3	3.00741E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.16035E-1	-7.98297E-1	-9.13172E0	-9.14168E0	5.26905E-3	9.35555E-2	2.72296E1	-3.2682E1	-3.2613E1	2.6798E1	1.20076E-7	2.51439E-3	2.51439E-3	6.32518E-3	3.03596E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.16298E-1	-7.98416E-1	-9.13157E0	-9.14164E0	5.14984E-3	9.34124E-2	2.72795E1	-3.26522E1	-3.26203E1	2.68047E1	1.20311E-7	2.51739E-3	2.51739E-3	6.34518E-3	3.04063E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.16202E-1	-7.98011E-1	-9.1316E0	-9.14178E0	4.86374E-3	9.37939E-2	2.73494E1	-3.26641E1	-3.26329E1	2.68063E1	1.20127E-7	2.51472E-3	2.51472E-3	6.30221E-3	3.0E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.15964E-1	-7.9782E-1	-9.13181E0	-9.14161E0	5.10216E-3	9.38177E-2	2.71585E1	-3.26446E1	-3.26278E1	2.68142E1	1.19937E-7	2.52066E-3	2.52066E-3	6.30171E-3	3.01337E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.16011E-1	-7.98297E-1	-9.13157E0	-9.1423E0	4.86374E-3	9.34362E-2	2.73544E1	-3.26687E1	-3.26218E1	2.68028E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.1563E-1	-7.98202E-1	-9.1315E0	-9.14209E0	4.88758E-3	9.33886E-2	2.73303E1	-3.26374E1	-3.2629E1	2.6795E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16345E-1	-7.98154E-1	-9.13167E0	-9.14214E0	4.76837E-3	9.35555E-2	2.73544E1	-3.265E1	-3.26338E1	2.67659E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.99E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.16107E-1	-7.98106E-1	-9.13141E0	-9.14221E0	4.88758E-3	9.34839E-2	2.73198E1	-3.26915E1	-3.26307E1	2.67818E1	1.20383E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-8.15868E-1	-7.98345E-1	-9.13148E0	-9.14211E0	4.673E-3	9.37939E-2	2.72329E1	-3.26707E1	-3.26089E1	2.67878E1	1.20017E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00824E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09371E0	-8.16154E-1	-7.98512E-1	-9.13136E0	-9.14195E0	4.79221E-3	9.35793E-2	2.7326E1	-3.26834E1	-3.26109E1	2.68465E1	1.19913E-7	2.51116E-3	2.51116E-3	6.31837E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-8.16679E-1	-7.9844E-1	-9.13134E0	-9.14214E0	4.64916E-3	9.33886E-2	2.73976E1	-3.26897E1	-3.26398E1	2.68125E1	1.20042E-7	2.52025E-3	2.52025E-3	6.30212E-3	3.00852E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.15916E-1	-7.98178E-1	-9.1311E0	-9.14183E0	4.62532E-3	9.3627E-2	2.72348E1	-3.26392E1	-3.26026E1	2.68304E1	1.20084E-7	2.51359E-3	2.51359E-3	6.30182E-3	3.01742E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.16512E-1	-7.97868E-1	-9.13131E0	-9.14199E0	4.64916E-3	9.37939E-2	2.74084E1	-3.26747E1	-3.26152E1	2.68238E1	1.198E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.01738E-1