[Scan]
initial_time=2016-01-27T22:02:45
final_time=2016-01-27T22:03:05
ip_count=19
run=1025
dataset=4
scan=306
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.16083E-1
ql1_imon=6.23882E-10
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=3.15905E-10
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=5.64218E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=5.35762E-10
mult1=-1.01868E-8
mult2=-2.63854E-9
rf_tmon=-3.5299E-3
rf_agc=3.45343E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=3.99375E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65796E0
bslens_imon=2.59635E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19895E1
lens5a_imon=1.98368E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=2.75745E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04589E2
lens23_imon=1.02167E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=2.5875E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38436E0
lens1_imon=2.49725E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.99063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.53949E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=2.89476E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=4.16327E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=2.86557E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15494E1
os_ea1_imon=1.88316E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.09983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24856E0
cs_ionrep_imon=1.1813E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93477E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02031E1
cs_anode1_imon=2.90485E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20453E0
olens4_imon=7.4122E-10
tplens_vset=1.4E-1
tplens_vmon=1.63199E0
tplens_imon=-2.59954E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26205E1
iondef3_imon=1.51011E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26407E1
iondef2_imon=1.58514E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98463E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=3.84557E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28631E0
ionrepsh_imon=1.73521E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33911E1
lens5b_imon=2.18118E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.2449E-1
os_ea2_imon=-5.60803E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00492E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.20543E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6354E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45166E-1
os_ef2bup_imon=-5.31527E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10661E1
os_restr2_imon=2.86737E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.30388E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.2392E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73235E1
iondef1_imon=1.09529E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.08918E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.07925E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=3.18646E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-1.72212E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47374E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.98722E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39282E-4
mask2_vset=0.0E0
mask2_vmon=-1.86801E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.53029E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.44369E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.08078E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.66692E0
defgridb_imon=6.22778E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33936E1
os_fil1_imon=4.98645E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.46718E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62193E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3064E1
cs_fil1_imon=9.97735E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64084E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62339E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20564E-2
os_fil2_imon=-2.39567E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.71925E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.41988E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.06531E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.35886E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21448E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99613E-1
chamber_ion_pmon=1.19925E-7
chamber_cvt_pmon=2.51804E-3
foreline_cvt_pmon=2.51804E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.45186E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.1656E-1	-7.98512E-1	-9.13138E0	-9.14178E0	4.72069E-3	9.35555E-2	2.73556E1	-3.26621E1	-3.26362E1	2.67878E1	1.2026E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.01995E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16083E-1	-7.98726E-1	-9.13134E0	-9.14192E0	5.34058E-3	9.35316E-2	2.73015E1	-3.26759E1	-3.26512E1	2.68163E1	1.20017E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.02133E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.16226E-1	-7.98607E-1	-9.13134E0	-9.14173E0	5.126E-3	9.36747E-2	2.73375E1	-3.26842E1	-3.25936E1	2.67897E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.03449E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.15916E-1	-7.9844E-1	-9.13122E0	-9.14192E0	5.126E-3	9.37939E-2	2.72472E1	-3.26909E1	-3.26585E1	2.68076E1	1.2021E-7	2.52364E-3	2.52364E-3	6.29721E-3	3.01121E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.16154E-1	-7.98082E-1	-9.13117E0	-9.14195E0	5.14984E-3	9.39846E-2	2.72594E1	-3.26771E1	-3.262E1	2.68286E1	1.1984E-7	2.51758E-3	2.51758E-3	6.31321E-3	3.00363E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09325E0	-8.15558E-1	-7.98368E-1	-9.13115E0	-9.14185E0	4.88758E-3	9.39608E-2	2.72685E1	-3.2649E1	-3.25947E1	2.68244E1	1.2033E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16154E-1	-7.98154E-1	-9.13115E0	-9.14214E0	4.95911E-3	9.38177E-2	2.73085E1	-3.26465E1	-3.26493E1	2.68177E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.9892E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16107E-1	-7.98011E-1	-9.13141E0	-9.1419E0	5.126E-3	9.36985E-2	2.72451E1	-3.2648E1	-3.26138E1	2.67962E1	1.20226E-7	2.51783E-3	2.51783E-3	6.3074E-3	3.0E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16035E-1	-7.98535E-1	-9.13112E0	-9.14223E0	4.74453E-3	9.37939E-2	2.73853E1	-3.26484E1	-3.25971E1	2.68226E1	1.2035E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.0041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.16011E-1	-7.98321E-1	-9.13134E0	-9.14197E0	5.05447E-3	9.37462E-2	2.73448E1	-3.26651E1	-3.26248E1	2.67938E1	1.19697E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.01223E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.16298E-1	-7.98345E-1	-9.13136E0	-9.14183E0	4.86374E-3	9.37462E-2	2.73105E1	-3.26741E1	-3.26026E1	2.67896E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.15845E-1	-7.98345E-1	-9.13134E0	-9.14187E0	4.72069E-3	9.36985E-2	2.72995E1	-3.26618E1	-3.26467E1	2.67864E1	1.20383E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16083E-1	-7.98345E-1	-9.13162E0	-9.14202E0	5.14984E-3	9.377E-2	2.73328E1	-3.26242E1	-3.26472E1	2.67968E1	1.20161E-7	2.51549E-3	2.51549E-3	6.31761E-3	2.99663E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.16274E-1	-7.98345E-1	-9.13131E0	-9.1419E0	4.72069E-3	9.38177E-2	2.72529E1	-3.26826E1	-3.26152E1	2.67882E1	1.20209E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.9892E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.15964E-1	-7.98035E-1	-9.13169E0	-9.14185E0	4.93526E-3	9.35793E-2	2.73411E1	-3.26765E1	-3.26116E1	2.68118E1	1.1984E-7	2.5199E-3	2.5199E-3	6.31321E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.15988E-1	-7.97868E-1	-9.13162E0	-9.14197E0	4.93526E-3	9.39846E-2	2.73057E1	-3.26536E1	-3.2644E1	2.6792E1	1.20383E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9874E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.15964E-1	-7.98273E-1	-9.13134E0	-9.14183E0	4.91142E-3	9.35793E-2	2.73021E1	-3.26608E1	-3.26313E1	2.67769E1	1.19913E-7	2.52209E-3	2.52209E-3	6.34588E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.16393E-1	-7.98225E-1	-9.13141E0	-9.14192E0	4.60148E-3	9.35078E-2	2.73103E1	-3.26561E1	-3.26179E1	2.68146E1	1.20158E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.16154E-1	-7.98225E-1	-9.1316E0	-9.14211E0	4.95911E-3	9.377E-2	2.73039E1	-3.26958E1	-3.26352E1	2.67988E1	1.19991E-7	2.51498E-3	2.51498E-3	6.32328E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.16083E-1	-7.98535E-1	-9.13141E0	-9.14207E0	4.86374E-3	9.38416E-2	2.73235E1	-3.26407E1	-3.26205E1	2.6798E1	1.19925E-7	2.51804E-3	2.51804E-3	6.3074E-3	2.99613E-1