[Scan]
initial_time=2016-01-27T22:03:12
final_time=2016-01-27T22:03:32
ip_count=19
run=1025
dataset=4
scan=307
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08822E-4
ql1_vset=
ql1_vmon=-8.15582E-1
ql1_imon=6.64926E-10
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=3.16894E-10
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=5.60594E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=5.77235E-10
mult1=-9.45141E-9
mult2=-2.74456E-9
rf_tmon=-5.40165E-3
rf_agc=3.26607E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=3.82435E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64751E0
bslens_imon=2.55578E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19851E1
lens5a_imon=1.98632E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.04967E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=2.77157E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04886E1
cs_ea1_imon=2.5851E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37917E0
lens1_imon=2.6459E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64481E1
os_ef1alow_imon=2.98217E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03883E1
cs_ea2_imon=1.53137E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84458E1
cs_ef1a_imon=2.89911E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=4.03297E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11077E1
os_restr1_imon=2.87444E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15324E1
os_ea1_imon=1.88394E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63682E1
os_ef1bup_imon=3.10068E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26952E0
cs_ionrep_imon=1.17772E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93525E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02E1
cs_anode1_imon=2.90016E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=7.50542E-10
tplens_vset=1.4E-1
tplens_vmon=1.63122E0
tplens_imon=-2.99346E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.48847E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26524E1
iondef2_imon=1.57607E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.98515E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=3.82733E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30978E0
ionrepsh_imon=1.73974E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33682E1
lens5b_imon=2.18026E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7464E1
cs_ef2b_imon=3.13126E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.2709E-1
os_ea2_imon=-4.07495E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00525E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71316E1
cs_ef2a_imon=3.19555E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61581E0
os_ef2alow_imon=-2.5155E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71166E-1
os_ef2bup_imon=-5.29571E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10903E1
os_restr2_imon=2.87062E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.30361E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01746E1
cs_anode2_imon=2.24333E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.10382E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68188E1
iondef4_imon=1.09303E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.04961E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=2.83444E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14115E0
cs_ionaccel_imon=-1.69187E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47282E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56434E1
einzel_imon=7.79557E-6
window_vset=0.0E0
window_vmon=2.4375E-1
window_imon=-9.6554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39168E-4
mask2_vset=0.0E0
mask2_vmon=-1.86634E1
mask2_imon=-6.90995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.48014E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.56088E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.09081E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.46147E0
defgridb_imon=6.29772E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33941E1
os_fil1_imon=4.7389E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.46118E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6214E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30656E1
cs_fil1_imon=9.97121E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63038E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62401E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09261E-2
os_fil2_imon=-2.44909E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.11859E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.4563E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29402E-1
cs_fil2_imon=-2.17686E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20572E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21533E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31563E-3
inlet_lpb_pmon=2.9913E-1
chamber_ion_pmon=1.2033E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.53038E-1
res40_imon=-2.42515E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.15916E-1	-7.98488E-1	-9.13134E0	-9.14211E0	5.17368E-3	9.35793E-2	2.72839E1	-3.26685E1	-3.26107E1	2.68154E1	1.20174E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00824E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.16011E-1	-7.98821E-1	-9.13134E0	-9.14197E0	4.91142E-3	9.36031E-2	2.73291E1	-3.26284E1	-3.2632E1	2.6804E1	1.20106E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16035E-1	-7.98249E-1	-9.13146E0	-9.14183E0	4.76837E-3	9.35316E-2	2.73069E1	-3.26413E1	-3.26467E1	2.68151E1	1.20174E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01609E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16107E-1	-7.97939E-1	-9.13138E0	-9.14192E0	4.45843E-3	9.33647E-2	2.73303E1	-3.26771E1	-3.26188E1	2.68004E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.15558E-1	-7.98488E-1	-9.13131E0	-9.14204E0	4.69685E-3	9.35793E-2	2.72733E1	-3.26735E1	-3.2629E1	2.68076E1	1.20017E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.15725E-1	-7.98178E-1	-9.13141E0	-9.14183E0	5.17368E-3	9.35078E-2	2.72684E1	-3.26621E1	-3.26098E1	2.67938E1	1.20174E-7	2.51443E-3	2.51443E-3	6.28552E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16131E-1	-7.98225E-1	-9.13188E0	-9.14178E0	4.88758E-3	9.377E-2	2.73039E1	-3.2632E1	-3.2626E1	2.67998E1	1.20122E-7	2.51007E-3	2.51007E-3	6.29645E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.16107E-1	-7.98559E-1	-9.13181E0	-9.14199E0	4.62532E-3	9.37223E-2	2.73213E1	-3.26873E1	-3.26164E1	2.68138E1	1.19861E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16107E-1	-7.98225E-1	-9.13177E0	-9.14204E0	4.74453E-3	9.33886E-2	2.72781E1	-3.26464E1	-3.26488E1	2.67935E1	1.20278E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.15749E-1	-7.98416E-1	-9.13153E0	-9.14192E0	4.91142E-3	9.34124E-2	2.73246E1	-3.26425E1	-3.26077E1	2.67805E1	1.19757E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.15892E-1	-7.98059E-1	-9.13124E0	-9.14159E0	4.86374E-3	9.35793E-2	2.72979E1	-3.26518E1	-3.26458E1	2.68058E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.15916E-1	-7.98392E-1	-9.13129E0	-9.14161E0	5.05447E-3	9.35316E-2	2.72668E1	-3.26467E1	-3.26614E1	2.67902E1	1.19953E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.9943E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.16059E-1	-7.98392E-1	-9.13138E0	-9.14168E0	5.07832E-3	9.34124E-2	2.7332E1	-3.26682E1	-3.26401E1	2.67926E1	1.19913E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.98481E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.15964E-1	-7.98345E-1	-9.13148E0	-9.14199E0	4.72069E-3	9.35555E-2	2.73051E1	-3.26697E1	-3.26189E1	2.68232E1	1.20174E-7	2.52647E-3	2.52647E-3	6.32936E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16083E-1	-7.9813E-1	-9.13134E0	-9.14204E0	4.76837E-3	9.36508E-2	2.73243E1	-3.26771E1	-3.26248E1	2.67986E1	1.19913E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.15749E-1	-7.98082E-1	-9.13122E0	-9.14166E0	4.81606E-3	9.35555E-2	2.73102E1	-3.26573E1	-3.2618E1	2.68071E1	1.19965E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01085E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16298E-1	-7.9782E-1	-9.13119E0	-9.14137E0	4.98295E-3	9.32693E-2	2.72209E1	-3.26734E1	-3.26273E1	2.67876E1	1.19979E-7	2.51575E-3	2.51575E-3	6.323E-3	2.99753E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.1625E-1	-7.98202E-1	-9.1311E0	-9.14173E0	4.91142E-3	9.35555E-2	2.73514E1	-3.26693E1	-3.2623E1	2.67758E1	1.20403E-7	2.51804E-3	2.51804E-3	6.34099E-3	2.98819E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.16011E-1	-7.98249E-1	-9.131E0	-9.14183E0	4.95911E-3	9.38416E-2	2.72786E1	-3.26614E1	-3.26478E1	2.67902E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.98481E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.15582E-1	-7.98106E-1	-9.13131E0	-9.14168E0	5.10216E-3	9.36985E-2	2.73405E1	-3.26524E1	-3.26266E1	2.68188E1	1.2033E-7	2.51662E-3	2.51662E-3	6.31563E-3	2.9913E-1