[Scan]
initial_time=2016-01-27T22:04:06
final_time=2016-01-27T22:04:25
ip_count=19
run=1025
dataset=4
scan=309
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08819E-4
ql1_vset=
ql1_vmon=-8.15845E-1
ql1_imon=6.46412E-10
ql2_vset=
ql2_vmon=-7.97844E-1
ql2_imon=3.1811E-10
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=5.89848E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=5.49304E-10
mult1=-9.60575E-9
mult2=-2.77225E-9
rf_tmon=-5.29994E-3
rf_agc=3.22119E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=3.8079E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65855E0
bslens_imon=2.48309E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20054E1
lens5a_imon=1.99005E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53603E1
cs_ef1b_imon=2.75837E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02316E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0477E1
cs_ea1_imon=2.56945E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37315E0
lens1_imon=2.63174E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64637E1
os_ef1alow_imon=2.99607E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0356E1
cs_ea2_imon=1.53772E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84348E1
cs_ef1a_imon=2.89946E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=4.03237E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=2.88348E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15654E1
os_ea1_imon=1.89555E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6378E1
os_ef1bup_imon=3.09338E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19311E0
cs_ionrep_imon=1.19899E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01786E1
cs_anode1_imon=2.90919E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=7.57718E-10
tplens_vset=1.4E-1
tplens_vmon=1.64497E0
tplens_imon=-2.03323E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26095E1
iondef3_imon=1.50515E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26832E1
iondef2_imon=1.56355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98519E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=3.89028E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.35533E0
ionrepsh_imon=1.7515E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.18507E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.13543E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.36878E-1
os_ea2_imon=-3.76754E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00704E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.19138E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62102E0
os_ef2alow_imon=-2.53635E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3931E-1
os_ef2bup_imon=-5.20882E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10915E1
os_restr2_imon=2.8661E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.30141E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01769E1
cs_anode2_imon=2.2475E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73128E1
iondef1_imon=1.08184E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.09024E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.99451E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=2.98214E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11508E0
cs_ionaccel_imon=-1.74052E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02041E2
cs_ionfocb_imon=1.47251E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56168E1
einzel_imon=7.69827E-6
window_vset=0.0E0
window_vmon=2.54176E-1
window_imon=-1.0559E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39143E-4
mask2_vset=0.0E0
mask2_vmon=-1.86807E1
mask2_imon=-6.49292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.76389E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.52863E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.37101E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.58128E0
defgridb_imon=6.22424E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33929E1
os_fil1_imon=4.95899E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.57123E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.621E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30702E1
cs_fil1_imon=9.96808E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63762E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62577E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18031E-2
os_fil2_imon=-2.36221E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.27701E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.79068E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31525E-1
cs_fil2_imon=-2.36221E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50869E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21696E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.17706E-1
res40_imon=-2.46337E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16107E-1	-7.97987E-1	-9.13119E0	-9.14156E0	5.05447E-3	9.39369E-2	2.72204E1	-3.26651E1	-3.26074E1	2.67957E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.01223E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.15988E-1	-7.98082E-1	-9.13146E0	-9.14185E0	4.98295E-3	9.3627E-2	2.72709E1	-3.2672E1	-3.2616E1	2.68163E1	1.19861E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16059E-1	-7.98774E-1	-9.13141E0	-9.14187E0	4.57764E-3	9.35793E-2	2.73309E1	-3.26891E1	-3.26272E1	2.67788E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.0148E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.16011E-1	-7.98345E-1	-9.13153E0	-9.14195E0	4.57764E-3	9.35078E-2	2.7298E1	-3.26543E1	-3.26449E1	2.68172E1	1.20017E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00302E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.15892E-1	-7.98249E-1	-9.13153E0	-9.14195E0	4.60148E-3	9.3627E-2	2.72847E1	-3.26861E1	-3.25918E1	2.67949E1	1.20209E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.1563E-1	-7.98464E-1	-9.13169E0	-9.14187E0	4.72069E-3	9.33647E-2	2.73345E1	-3.26573E1	-3.26681E1	2.67884E1	1.20226E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.03185E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16202E-1	-7.98202E-1	-9.13157E0	-9.14204E0	4.79221E-3	9.34839E-2	2.72919E1	-3.26591E1	-3.2632E1	2.67982E1	1.20414E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.01995E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.16059E-1	-7.9782E-1	-9.13117E0	-9.1418E0	4.52995E-3	9.37939E-2	2.72895E1	-3.26807E1	-3.26164E1	2.67989E1	1.20084E-7	2.51915E-3	2.51915E-3	6.29624E-3	3.0201E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.15868E-1	-7.98011E-1	-9.13138E0	-9.14195E0	4.62532E-3	9.36747E-2	2.73159E1	-3.26657E1	-3.25942E1	2.68038E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.15988E-1	-7.98345E-1	-9.13146E0	-9.14218E0	4.24385E-3	9.36747E-2	2.73435E1	-3.26903E1	-3.2638E1	2.68004E1	1.20017E-7	2.51334E-3	2.51334E-3	6.34588E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.15892E-1	-7.97963E-1	-9.1315E0	-9.14192E0	4.50611E-3	9.3627E-2	2.72582E1	-3.26404E1	-3.26308E1	2.68047E1	1.20122E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.15701E-1	-7.97796E-1	-9.13141E0	-9.14207E0	5.24521E-3	9.35555E-2	2.72214E1	-3.26801E1	-3.26215E1	2.68036E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.1563E-1	-7.98059E-1	-9.13129E0	-9.14168E0	4.81606E-3	9.37223E-2	2.73331E1	-3.26693E1	-3.25987E1	2.68094E1	1.20078E-7	2.5199E-3	2.5199E-3	6.3282E-3	2.99506E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.15368E-1	-7.9813E-1	-9.13146E0	-9.14199E0	4.95911E-3	9.35078E-2	2.73105E1	-3.26633E1	-3.26338E1	2.67801E1	1.19883E-7	2.51838E-3	2.51838E-3	6.30171E-3	3.00251E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.15845E-1	-7.98106E-1	-9.13136E0	-9.14216E0	5.03063E-3	9.36508E-2	2.73592E1	-3.27023E1	-3.26446E1	2.68036E1	1.19819E-7	2.51693E-3	2.51693E-3	6.34661E-3	2.99879E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.16154E-1	-7.97892E-1	-9.13134E0	-9.1419E0	4.673E-3	9.377E-2	2.72284E1	-3.26779E1	-3.26508E1	2.6798E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.0148E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.15749E-1	-7.97915E-1	-9.13157E0	-9.14199E0	4.74453E-3	9.36747E-2	2.72968E1	-3.26602E1	-3.26242E1	2.68232E1	1.20122E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.15725E-1	-7.97892E-1	-9.13148E0	-9.14187E0	4.93526E-3	9.34362E-2	2.73057E1	-3.26543E1	-3.26158E1	2.67884E1	1.19697E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.02253E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.15701E-1	-7.97772E-1	-9.13153E0	-9.14211E0	5.07832E-3	9.41038E-2	2.72546E1	-3.26272E1	-3.26597E1	2.67816E1	1.20069E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.15845E-1	-7.97844E-1	-9.13122E0	-9.14187E0	5.03063E-3	9.39369E-2	2.73128E1	-3.26832E1	-3.26095E1	2.68088E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.99941E-1