[Scan]
initial_time=2016-01-27T22:04:32
final_time=2016-01-27T22:04:52
ip_count=19
run=1025
dataset=4
scan=310
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08751E-4
ql1_vset=
ql1_vmon=-8.15892E-1
ql1_imon=6.24454E-10
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=3.07083E-10
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=6.09112E-10
ql4_vset=
ql4_vmon=-9.14171E0
ql4_imon=5.49388E-10
mult1=-9.78308E-9
mult2=-2.78597E-9
rf_tmon=-5.5418E-3
rf_agc=3.2908E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=3.7663E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6223E0
bslens_imon=2.43626E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19981E1
lens5a_imon=1.99414E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.04992E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53599E1
cs_ef1b_imon=2.77106E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02207E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05038E1
cs_ea1_imon=2.58188E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38129E0
lens1_imon=2.53359E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64752E1
os_ef1alow_imon=2.99861E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03852E1
cs_ea2_imon=1.52544E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84793E1
cs_ef1a_imon=2.89906E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=4.01616E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11217E1
os_restr1_imon=2.86912E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=1.88557E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63704E1
os_ef1bup_imon=3.09031E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26395E0
cs_ionrep_imon=1.21135E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93386E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02015E1
cs_anode1_imon=2.90617E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=7.73275E-10
tplens_vset=1.4E-1
tplens_vmon=1.63707E0
tplens_imon=-2.77855E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26561E1
iondef3_imon=1.5157E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26602E1
iondef2_imon=1.58309E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.98409E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=3.54803E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25272E0
ionrepsh_imon=1.72272E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33602E1
lens5b_imon=2.19816E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74757E1
cs_ef2b_imon=3.13035E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.30718E-1
os_ea2_imon=-6.55959E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00585E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71233E1
cs_ef2a_imon=3.1966E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62593E0
os_ef2alow_imon=-2.4583E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.15919E-1
os_ef2bup_imon=-5.29891E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10755E1
os_restr2_imon=2.87698E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.31688E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0174E1
cs_anode2_imon=2.2385E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72343E1
iondef1_imon=1.09679E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68106E1
iondef4_imon=1.07942E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.01603E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=2.75111E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12827E0
cs_ionaccel_imon=-1.64241E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47365E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.72527E-6
window_vset=0.0E0
window_vmon=2.26953E-1
window_imon=-1.00243E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.86924E1
mask2_imon=-5.87005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.32541E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.49058E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.2992E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.51098E0
defgridb_imon=6.0975E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33882E1
os_fil1_imon=4.648E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.23662E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62288E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30684E1
cs_fil1_imon=9.95515E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63969E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62611E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.21514E-2
os_fil2_imon=-2.35062E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.80473E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.33122E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30459E-1
cs_fil2_imon=-2.25082E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.6176E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21585E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01862E-1
chamber_ion_pmon=1.19841E-7
chamber_cvt_pmon=2.51709E-3
foreline_cvt_pmon=2.51709E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.08662E-1
res40_imon=-2.5818E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=216
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.15535E-1	-7.98559E-1	-9.13165E0	-9.14214E0	4.57764E-3	9.408E-2	2.72992E1	-3.26738E1	-3.26325E1	2.68016E1	1.20171E-7	2.51411E-3	2.51411E-3	6.3074E-3	3.00916E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.15988E-1	-7.98321E-1	-9.13177E0	-9.14233E0	4.79221E-3	9.36508E-2	2.72864E1	-3.2646E1	-3.26204E1	2.6804E1	1.20004E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.15701E-1	-7.98464E-1	-9.13141E0	-9.14197E0	4.50611E-3	9.37462E-2	2.7286E1	-3.26753E1	-3.25768E1	2.67995E1	1.2035E-7	2.52027E-3	2.52027E-3	6.31858E-3	2.99083E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16154E-1	-7.98702E-1	-9.1315E0	-9.14178E0	4.60148E-3	9.35078E-2	2.72937E1	-3.26554E1	-3.26344E1	2.67926E1	1.20243E-7	2.51603E-3	2.51603E-3	6.31269E-3	2.99093E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.15725E-1	-7.98392E-1	-9.1316E0	-9.14204E0	4.673E-3	9.39131E-2	2.73381E1	-3.26524E1	-3.2644E1	2.67836E1	1.19757E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.15749E-1	-7.98368E-1	-9.13165E0	-9.14187E0	4.52995E-3	9.36508E-2	2.73243E1	-3.26621E1	-3.26134E1	2.68136E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.15916E-1	-7.98631E-1	-9.13162E0	-9.14185E0	4.8399E-3	9.37223E-2	2.73136E1	-3.26613E1	-3.26499E1	2.67955E1	1.20183E-7	2.52061E-3	2.52061E-3	6.32626E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.15654E-1	-7.98273E-1	-9.13146E0	-9.14197E0	4.8399E-3	9.377E-2	2.72708E1	-3.26454E1	-3.26216E1	2.68088E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.15678E-1	-7.98249E-1	-9.13157E0	-9.14218E0	4.79221E-3	9.377E-2	2.73351E1	-3.26735E1	-3.25906E1	2.68076E1	1.19978E-7	2.5225E-3	2.5225E-3	6.29624E-3	2.99879E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.15511E-1	-7.98535E-1	-9.13138E0	-9.1419E0	4.60148E-3	9.37223E-2	2.72696E1	-3.26494E1	-3.26392E1	2.68094E1	1.20191E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.99348E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.15487E-1	-7.98345E-1	-9.13134E0	-9.14202E0	4.62532E-3	9.35316E-2	2.72564E1	-3.26783E1	-3.25942E1	2.6804E1	1.19757E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09394E0	-8.15725E-1	-7.98273E-1	-9.13119E0	-9.14209E0	4.76837E-3	9.3627E-2	2.73808E1	-3.26723E1	-3.26326E1	2.67932E1	1.19851E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.00966E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.15773E-1	-7.98202E-1	-9.13119E0	-9.14192E0	4.76837E-3	9.37223E-2	2.72968E1	-3.26933E1	-3.26661E1	2.67816E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.02396E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.1594E-1	-7.97987E-1	-9.13091E0	-9.14209E0	5.05447E-3	9.38654E-2	2.73045E1	-3.26296E1	-3.26014E1	2.67935E1	1.19861E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.15511E-1	-7.97844E-1	-9.13119E0	-9.14149E0	4.93526E-3	9.377E-2	2.73682E1	-3.26506E1	-3.26422E1	2.68016E1	1.20017E-7	2.5199E-3	2.5199E-3	6.34037E-3	2.98481E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.15821E-1	-7.97558E-1	-9.13117E0	-9.14173E0	5.19753E-3	9.34601E-2	2.72862E1	-3.26762E1	-3.26661E1	2.68106E1	1.20122E-7	2.52318E-3	2.52318E-3	6.28552E-3	2.96929E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.15678E-1	-7.98059E-1	-9.13119E0	-9.14166E0	4.74453E-3	9.35316E-2	2.72883E1	-3.26879E1	-3.2593E1	2.67872E1	1.19851E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.15964E-1	-7.98488E-1	-9.13129E0	-9.14178E0	4.95911E-3	9.38177E-2	2.72907E1	-3.26464E1	-3.25954E1	2.6825E1	1.19902E-7	2.51203E-3	2.51203E-3	6.32356E-3	2.99686E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.16226E-1	-7.98035E-1	-9.13126E0	-9.14161E0	4.52995E-3	9.37939E-2	2.73116E1	-3.2698E1	-3.26231E1	2.68111E1	1.20084E-7	2.51693E-3	2.51693E-3	6.34099E-3	3.01209E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.15892E-1	-7.9813E-1	-9.13129E0	-9.14171E0	4.79221E-3	9.377E-2	2.72343E1	-3.26602E1	-3.26561E1	2.68106E1	1.19841E-7	2.51709E-3	2.51709E-3	6.3074E-3	3.01862E-1