[Scan]
initial_time=2016-01-27T22:05:52
final_time=2016-01-27T22:06:12
ip_count=19
run=1025
dataset=4
scan=313
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08782E-4
ql1_vset=
ql1_vmon=-8.15797E-1
ql1_imon=6.44219E-10
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=3.27897E-10
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=5.37777E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=5.47707E-10
mult1=-9.9812E-9
mult2=-2.80644E-9
rf_tmon=-5.20337E-3
rf_agc=3.26907E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=3.87633E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65238E0
bslens_imon=2.62504E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19492E1
lens5a_imon=2.01138E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05274E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53771E1
cs_ef1b_imon=2.76671E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02142E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05069E1
cs_ea1_imon=2.5867E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36271E0
lens1_imon=2.77104E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64817E1
os_ef1alow_imon=2.99399E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03679E1
cs_ea2_imon=1.52124E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84307E1
cs_ef1a_imon=2.89911E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=3.9624E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11233E1
os_restr1_imon=2.87479E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14998E1
os_ea1_imon=1.87199E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63566E1
os_ef1bup_imon=3.09547E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23761E0
cs_ionrep_imon=1.19656E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93371E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01896E1
cs_anode1_imon=2.91545E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=7.31134E-10
tplens_vset=1.4E-1
tplens_vmon=1.68199E0
tplens_imon=-1.45492E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2611E1
iondef3_imon=1.48821E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26446E1
iondef2_imon=1.5852E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98217E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=3.41368E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28976E0
ionrepsh_imon=1.74615E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33825E1
lens5b_imon=2.19215E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74634E1
cs_ef2b_imon=3.12813E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.35887E-1
os_ea2_imon=-6.04351E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00445E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71142E1
cs_ef2a_imon=3.19138E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62102E0
os_ef2alow_imon=-2.51898E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.54369E-1
os_ef2bup_imon=-5.27138E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10816E1
os_restr2_imon=2.86923E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.31145E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01838E1
cs_anode2_imon=2.23708E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72372E1
iondef1_imon=1.08185E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67649E1
iondef4_imon=1.07878E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.98748E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=2.82657E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11972E0
cs_ionaccel_imon=-1.66754E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02178E2
cs_ionfocb_imon=1.47428E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56307E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=1.98572E-1
window_imon=-1.03505E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.86941E1
mask2_imon=-5.58936E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.57168E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.66439E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.29359E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.4416E0
defgridb_imon=6.06996E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33915E1
os_fil1_imon=5.97261E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.59439E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62199E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30666E1
cs_fil1_imon=9.97596E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63409E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62462E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.26488E-2
os_fil2_imon=-2.39696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.71315E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.40713E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30151E-1
cs_fil2_imon=-2.37379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11305E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21603E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32328E-3
inlet_lpb_pmon=3.01356E-1
chamber_ion_pmon=1.19991E-7
chamber_cvt_pmon=2.51077E-3
foreline_cvt_pmon=2.51077E-3
chamber_tmon=1.40002E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.91642E-1
res40_imon=-2.39039E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=270
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.15964E-1	-7.98059E-1	-9.13143E0	-9.14176E0	4.72069E-3	9.38416E-2	2.73647E1	-3.26608E1	-3.26496E1	2.67986E1	1.20344E-7	2.51814E-3	2.51814E-3	6.2863E-3	2.99845E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.15701E-1	-7.98488E-1	-9.13141E0	-9.14187E0	4.74453E-3	9.36747E-2	2.72769E1	-3.26505E1	-3.26309E1	2.68178E1	1.20106E-7	2.5131E-3	2.5131E-3	6.30202E-3	3.02769E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.15606E-1	-7.98368E-1	-9.13143E0	-9.14173E0	4.88758E-3	9.36031E-2	2.73111E1	-3.26573E1	-3.2647E1	2.681E1	1.19978E-7	2.5225E-3	2.5225E-3	6.32418E-3	3.00676E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.15892E-1	-7.98321E-1	-9.13126E0	-9.14168E0	4.8399E-3	9.36508E-2	2.72856E1	-3.26885E1	-3.26372E1	2.67827E1	1.20122E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00563E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.16154E-1	-7.97939E-1	-9.13148E0	-9.14152E0	4.69685E-3	9.36031E-2	2.73169E1	-3.26555E1	-3.26089E1	2.68052E1	1.20142E-7	2.52025E-3	2.52025E-3	6.28103E-3	3.00852E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16131E-1	-7.97987E-1	-9.13157E0	-9.14185E0	4.45843E-3	9.37223E-2	2.72324E1	-3.26549E1	-3.26044E1	2.68064E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16035E-1	-7.98202E-1	-9.13155E0	-9.14211E0	4.43459E-3	9.34839E-2	2.72703E1	-3.26673E1	-3.26307E1	2.67956E1	1.20174E-7	2.52428E-3	2.52428E-3	6.34037E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.15892E-1	-7.98035E-1	-9.13155E0	-9.14202E0	4.60148E-3	9.37939E-2	2.72653E1	-3.26407E1	-3.2607E1	2.68118E1	1.20174E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.15868E-1	-7.98154E-1	-9.13157E0	-9.14183E0	4.64916E-3	9.4223E-2	2.73009E1	-3.265E1	-3.26224E1	2.67734E1	1.20017E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.15725E-1	-7.9813E-1	-9.13129E0	-9.14202E0	4.69685E-3	9.38416E-2	2.72618E1	-3.26573E1	-3.26302E1	2.67938E1	1.19925E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.00942E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.1594E-1	-7.9813E-1	-9.13136E0	-9.14207E0	4.52995E-3	9.36985E-2	2.73594E1	-3.26732E1	-3.25953E1	2.68028E1	1.20106E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.15678E-1	-7.97892E-1	-9.13148E0	-9.1419E0	4.74453E-3	9.33886E-2	2.73087E1	-3.26603E1	-3.26248E1	2.68192E1	1.20122E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.02133E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.15725E-1	-7.97558E-1	-9.13143E0	-9.14197E0	4.57764E-3	9.37223E-2	2.72788E1	-3.26303E1	-3.26309E1	2.67895E1	1.20106E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.02253E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.15797E-1	-7.97725E-1	-9.13143E0	-9.14211E0	4.74453E-3	9.35316E-2	2.72614E1	-3.26402E1	-3.26189E1	2.67885E1	1.19872E-7	2.51248E-3	2.51248E-3	6.29624E-3	3.00144E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.15916E-1	-7.97844E-1	-9.13146E0	-9.14173E0	4.69685E-3	9.377E-2	2.73346E1	-3.26744E1	-3.26178E1	2.68004E1	1.20466E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.99175E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.15654E-1	-7.98011E-1	-9.1316E0	-9.14159E0	4.57764E-3	9.377E-2	2.72945E1	-3.2662E1	-3.26461E1	2.68094E1	1.20055E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.99941E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.15845E-1	-7.98178E-1	-9.1316E0	-9.14176E0	4.74453E-3	9.36508E-2	2.7276E1	-3.26546E1	-3.26695E1	2.67545E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00966E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.15916E-1	-7.98106E-1	-9.13155E0	-9.14192E0	4.88758E-3	9.36031E-2	2.73142E1	-3.26695E1	-3.26293E1	2.68166E1	1.20577E-7	2.51223E-3	2.51223E-3	6.28737E-3	3.00532E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.15868E-1	-7.98488E-1	-9.1315E0	-9.14207E0	4.69685E-3	9.35793E-2	2.72854E1	-3.26637E1	-3.26799E1	2.68105E1	1.20132E-7	2.51675E-3	2.51675E-3	6.3609E-3	3.03596E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.15797E-1	-7.98416E-1	-9.13124E0	-9.14197E0	5.17368E-3	9.38416E-2	2.72372E1	-3.26446E1	-3.2611E1	2.67649E1	1.19991E-7	2.51077E-3	2.51077E-3	6.32328E-3	3.01356E-1