[Scan]
initial_time=2016-01-27T22:07:39
final_time=2016-01-27T22:07:59
ip_count=19
run=1025
dataset=4
scan=317
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08775E-4
ql1_vset=
ql1_vmon=-8.15392E-1
ql1_imon=6.53303E-10
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=3.23021E-10
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=5.5306E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=5.48649E-10
mult1=-1.06106E-8
mult2=-2.71542E-9
rf_tmon=-4.19093E-3
rf_agc=3.4017E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=3.98374E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66739E0
bslens_imon=2.51494E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.97979E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05061E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=2.75637E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04888E1
cs_ea1_imon=2.59104E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38023E0
lens1_imon=2.65652E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64452E1
os_ef1alow_imon=2.99676E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03855E1
cs_ea2_imon=1.55435E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=2.90522E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=4.09186E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=2.88467E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15099E1
os_ea1_imon=1.8998E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22791E0
cs_ionrep_imon=1.17847E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93381E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01689E1
cs_anode1_imon=2.89909E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=8.11386E-10
tplens_vset=1.4E-1
tplens_vmon=1.6609E0
tplens_imon=-2.42257E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26596E1
iondef3_imon=1.51365E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26756E1
iondef2_imon=1.58904E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98328E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=3.81577E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23617E0
ionrepsh_imon=1.73132E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3387E1
lens5b_imon=2.17304E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.29209E-1
os_ea2_imon=-5.50185E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00534E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71005E1
cs_ef2a_imon=3.18741E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61317E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.35556E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=2.87927E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.31132E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01647E1
cs_anode2_imon=2.24569E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72786E1
iondef1_imon=1.09706E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67962E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=2.00816E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=2.7349E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-1.71491E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47345E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.64459E-6
window_vset=0.0E0
window_vmon=2.38966E-1
window_imon=-9.61679E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.8668E1
mask2_imon=-5.50827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.31438E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.58172E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.24713E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.35982E0
defgridb_imon=6.09328E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33932E1
os_fil1_imon=4.74018E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.71345E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62273E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30672E1
cs_fil1_imon=9.95939E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63741E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62356E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.3196E-2
os_fil2_imon=-2.28154E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.31991E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.35281E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.43772E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1182E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21535E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.27767E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.15964E-1	-7.98154E-1	-9.13138E0	-9.14168E0	4.57764E-3	9.34124E-2	2.72271E1	-3.26733E1	-3.26004E1	2.68116E1	1.19851E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.0071E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.15821E-1	-7.97653E-1	-9.13138E0	-9.14183E0	4.95911E-3	9.37462E-2	2.74295E1	-3.26543E1	-3.26422E1	2.67944E1	1.20276E-7	2.52405E-3	2.52405E-3	6.3282E-3	3.02728E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09325E0	-8.15868E-1	-7.98035E-1	-9.13143E0	-9.1419E0	4.79221E-3	9.38892E-2	2.72886E1	-3.26531E1	-3.26502E1	2.68016E1	1.20435E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.03185E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.15606E-1	-7.98011E-1	-9.1311E0	-9.14185E0	5.17368E-3	9.38416E-2	2.73147E1	-3.26554E1	-3.26026E1	2.68208E1	1.198E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.16202E-1	-7.98035E-1	-9.13138E0	-9.14197E0	4.91142E-3	9.34601E-2	2.71851E1	-3.2664E1	-3.26352E1	2.6816E1	1.20122E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.15916E-1	-7.98488E-1	-9.1311E0	-9.14202E0	4.8399E-3	9.34839E-2	2.73488E1	-3.26649E1	-3.26124E1	2.68058E1	1.19766E-7	2.51915E-3	2.51915E-3	6.29624E-3	2.99083E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.1594E-1	-7.98488E-1	-9.13119E0	-9.14185E0	4.91142E-3	9.35078E-2	2.72654E1	-3.26735E1	-3.2644E1	2.67992E1	1.20311E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-8.15892E-1	-7.98202E-1	-9.13153E0	-9.14199E0	5.31673E-3	9.35555E-2	2.72678E1	-3.26765E1	-3.26242E1	2.6813E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.15916E-1	-7.98082E-1	-9.13148E0	-9.1419E0	4.93526E-3	9.32932E-2	2.72833E1	-3.26673E1	-3.26531E1	2.68065E1	1.20226E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16274E-1	-7.98202E-1	-9.13138E0	-9.14218E0	5.126E-3	9.36508E-2	2.72618E1	-3.26518E1	-3.25743E1	2.68016E1	1.20106E-7	2.52061E-3	2.52061E-3	6.29128E-3	3.02769E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.16369E-1	-7.97963E-1	-9.13148E0	-9.1418E0	5.10216E-3	9.36508E-2	2.72642E1	-3.26302E1	-3.26344E1	2.68112E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.97963E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16178E-1	-7.97868E-1	-9.13122E0	-9.14187E0	4.86374E-3	9.36031E-2	2.73375E1	-3.26591E1	-3.26296E1	2.67836E1	1.20069E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.15892E-1	-7.98249E-1	-9.13095E0	-9.1419E0	5.26905E-3	9.37223E-2	2.73263E1	-3.26419E1	-3.26549E1	2.67968E1	1.19705E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.98481E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.15821E-1	-7.98583E-1	-9.1316E0	-9.14216E0	4.93526E-3	9.37939E-2	2.72774E1	-3.26626E1	-3.26284E1	2.68157E1	1.20311E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00453E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.15988E-1	-7.98249E-1	-9.13174E0	-9.14223E0	4.76837E-3	9.35555E-2	2.73616E1	-3.26621E1	-3.25852E1	2.68034E1	1.19902E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.15749E-1	-7.9813E-1	-9.13157E0	-9.14199E0	5.10216E-3	9.3627E-2	2.73111E1	-3.26416E1	-3.26615E1	2.6822E1	1.20069E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.03712E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.16178E-1	-7.97844E-1	-9.13131E0	-9.14187E0	5.17368E-3	9.38416E-2	2.73092E1	-3.26648E1	-3.26069E1	2.67535E1	1.20017E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.15535E-1	-7.98035E-1	-9.13126E0	-9.14202E0	5.14984E-3	9.37939E-2	2.73143E1	-3.26499E1	-3.26168E1	2.67914E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.98156E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.16107E-1	-7.98011E-1	-9.13134E0	-9.14199E0	4.64916E-3	9.34601E-2	2.72968E1	-3.26779E1	-3.25942E1	2.67746E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.97445E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.15392E-1	-7.98082E-1	-9.13131E0	-9.14202E0	5.03063E-3	9.38416E-2	2.72786E1	-3.26756E1	-3.26596E1	2.67962E1	1.20209E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.99686E-1