[Scan]
initial_time=2016-01-27T22:08:33
final_time=2016-01-27T22:08:52
ip_count=19
run=1025
dataset=4
scan=319
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.0879E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=6.37138E-10
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=3.12054E-10
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=5.94318E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=5.46229E-10
mult1=-9.7697E-9
mult2=-2.61617E-9
rf_tmon=-5.01134E-3
rf_agc=3.2606E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=3.76475E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66629E0
bslens_imon=2.70268E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19964E1
lens5a_imon=1.99105E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12449E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53593E1
cs_ef1b_imon=2.76436E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02198E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05029E1
cs_ea1_imon=2.58032E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37662E0
lens1_imon=2.74323E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6444E1
os_ef1alow_imon=2.98388E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04069E1
cs_ea2_imon=1.53317E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84251E1
cs_ef1a_imon=2.89786E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=4.12166E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11214E1
os_restr1_imon=2.89202E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15164E1
os_ea1_imon=1.90669E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63661E1
os_ef1bup_imon=3.09403E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24399E0
cs_ionrep_imon=1.19169E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93392E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01822E1
cs_anode1_imon=2.89319E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=8.02076E-10
tplens_vset=1.4E-1
tplens_vmon=1.64414E0
tplens_imon=-1.97055E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26376E1
iondef3_imon=1.50478E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26762E1
iondef2_imon=1.59198E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.98374E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.77798E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28116E0
ionrepsh_imon=1.74893E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33706E1
lens5b_imon=2.18004E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74618E1
cs_ef2b_imon=3.12011E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.11844E-1
os_ea2_imon=-4.80946E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00635E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7105E1
cs_ef2a_imon=3.20302E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60661E0
os_ef2alow_imon=-2.43599E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.37526E-1
os_ef2bup_imon=-5.2034E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10747E1
os_restr2_imon=2.86439E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.30902E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01783E1
cs_anode2_imon=2.25135E-5
iondef1_vset=2.763E1
iondef1_vmon=2.731E1
iondef1_imon=1.10085E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68004E1
iondef4_imon=1.09107E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=2.00502E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=2.68877E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13922E0
cs_ionaccel_imon=-1.71202E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47261E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56256E1
einzel_imon=7.69952E-6
window_vset=0.0E0
window_vmon=2.28899E-1
window_imon=-1.08926E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39162E-4
mask2_vset=0.0E0
mask2_vmon=-1.86818E1
mask2_imon=-6.14401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=8.00331E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.14586E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.30981E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.4532E0
defgridb_imon=6.12153E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33918E1
os_fil1_imon=5.0285E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.33792E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6236E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30655E1
cs_fil1_imon=9.96769E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63981E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62449E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20063E-2
os_fil2_imon=-2.61335E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.24834E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.14115E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3091E-1
cs_fil2_imon=-2.47712E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11027E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21522E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.50882E-3
foreline_cvt_pmon=2.50882E-3
chamber_tmon=1.40077E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.13327E-1
res40_imon=-2.4282E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.15964E-1	-7.98082E-1	-9.13138E0	-9.14199E0	4.76837E-3	9.36985E-2	2.7324E1	-3.26567E1	-3.26242E1	2.6804E1	1.19862E-7	2.5195E-3	2.5195E-3	6.31344E-3	3.006E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16154E-1	-7.97868E-1	-9.13112E0	-9.1419E0	4.8399E-3	9.3627E-2	2.72991E1	-3.26621E1	-3.26212E1	2.6816E1	1.1983E-7	2.51593E-3	2.51593E-3	6.31283E-3	2.99732E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16011E-1	-7.98082E-1	-9.13115E0	-9.1423E0	4.95911E-3	9.37462E-2	2.73015E1	-3.265E1	-3.26326E1	2.68088E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16059E-1	-7.98154E-1	-9.13157E0	-9.14207E0	4.81606E-3	9.39369E-2	2.72638E1	-3.26667E1	-3.26337E1	2.68123E1	1.20069E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00563E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16298E-1	-7.98345E-1	-9.13119E0	-9.14209E0	4.91142E-3	9.3627E-2	2.73291E1	-3.26579E1	-3.25665E1	2.67854E1	1.2026E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16345E-1	-7.98225E-1	-9.13112E0	-9.14221E0	5.126E-3	9.39131E-2	2.71971E1	-3.26791E1	-3.2603E1	2.67908E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16083E-1	-7.98011E-1	-9.13124E0	-9.14214E0	4.86374E-3	9.377E-2	2.72949E1	-3.26506E1	-3.26278E1	2.6792E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.1563E-1	-7.98178E-1	-9.13153E0	-9.14173E0	4.8399E-3	9.377E-2	2.72721E1	-3.26679E1	-3.2613E1	2.68157E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.15701E-1	-7.98154E-1	-9.13131E0	-9.1418E0	4.95911E-3	9.37462E-2	2.73225E1	-3.26532E1	-3.26393E1	2.67804E1	1.198E-7	2.52169E-3	2.52169E-3	6.28592E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.15654E-1	-7.98178E-1	-9.13117E0	-9.14161E0	5.05447E-3	9.377E-2	2.72937E1	-3.26506E1	-3.26639E1	2.68213E1	1.20243E-7	2.52025E-3	2.52025E-3	6.31798E-3	3.00852E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.15558E-1	-7.98416E-1	-9.13148E0	-9.14187E0	4.86374E-3	9.36508E-2	2.72841E1	-3.26392E1	-3.26404E1	2.67998E1	1.19809E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.15606E-1	-7.98082E-1	-9.13148E0	-9.14195E0	5.126E-3	9.36031E-2	2.73291E1	-3.26711E1	-3.25821E1	2.67978E1	1.19705E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00824E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16011E-1	-7.9813E-1	-9.13155E0	-9.14195E0	5.17368E-3	9.35316E-2	2.72949E1	-3.26308E1	-3.26266E1	2.67818E1	1.19809E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.15415E-1	-7.98631E-1	-9.13155E0	-9.1414E0	4.98295E-3	9.34601E-2	2.73562E1	-3.2641E1	-3.2632E1	2.67776E1	1.19965E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.1563E-1	-7.98702E-1	-9.13177E0	-9.14176E0	5.05447E-3	9.36747E-2	2.73646E1	-3.26657E1	-3.26464E1	2.68358E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.02922E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.15678E-1	-7.98416E-1	-9.13153E0	-9.14171E0	4.95911E-3	9.41753E-2	2.72919E1	-3.26579E1	-3.26386E1	2.6822E1	1.20226E-7	2.52647E-3	2.52647E-3	6.32386E-3	3.01609E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.1563E-1	-7.98416E-1	-9.13148E0	-9.14168E0	5.26905E-3	9.38892E-2	2.72889E1	-3.26417E1	-3.26243E1	2.68178E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.97963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.15725E-1	-7.98583E-1	-9.13131E0	-9.1419E0	5.03063E-3	9.40323E-2	2.73424E1	-3.26738E1	-3.26003E1	2.6807E1	1.19991E-7	2.51709E-3	2.51709E-3	6.2863E-3	2.98092E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.1594E-1	-7.9844E-1	-9.13119E0	-9.1418E0	5.62668E-3	9.38177E-2	2.72609E1	-3.26891E1	-3.26183E1	2.67992E1	1.19978E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.00144E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16059E-1	-7.9844E-1	-9.13141E0	-9.14173E0	4.98295E-3	9.36747E-2	2.731E1	-3.26762E1	-3.26376E1	2.68004E1	1.19902E-7	2.50882E-3	2.50882E-3	6.31278E-3	3.0071E-1