[Scan]
initial_time=2016-01-27T22:10:03
final_time=2016-01-27T22:10:22
ip_count=19
run=1025
dataset=5
scan=322
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.74349E-6
ql1_vset=
ql1_vmon=-8.79983E1
ql1_imon=-1.82834E-9
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=4.71497E-10
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-5.58794E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.1793E-9
mult1=-1.41352E-8
mult2=-2.73857E-9
rf_tmon=-5.26947E-3
rf_agc=3.23783E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=4.90522E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64262E0
bslens_imon=2.59989E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19954E1
lens5a_imon=1.99642E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04909E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53604E1
cs_ef1b_imon=2.76826E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02252E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05153E1
cs_ea1_imon=2.57689E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97343E0
lens1_imon=1.51683E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.99027E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0418E1
cs_ea2_imon=1.53453E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=2.9081E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=4.80175E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11129E1
os_restr1_imon=2.88143E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15087E1
os_ea1_imon=1.88493E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25092E0
cs_ionrep_imon=1.18979E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93519E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01575E1
cs_anode1_imon=2.89765E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=8.50451E-10
tplens_vset=1.4E-1
tplens_vmon=1.66149E0
tplens_imon=-4.05069E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.58585E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98495E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=4.51982E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30165E0
ionrepsh_imon=1.74831E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33864E1
lens5b_imon=2.17162E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.13659E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.45726E-1
os_ea2_imon=-6.70525E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00665E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71053E1
cs_ef2a_imon=3.19389E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64321E0
os_ef2alow_imon=-2.4393E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.49972E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=2.86521E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.3184E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.24821E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72078E1
iondef1_imon=1.10555E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6804E1
iondef4_imon=1.10071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.0983E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=3.93212E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12534E0
cs_ionaccel_imon=-1.91673E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47352E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=2.37164E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.86758E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.49489E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.42599E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.26129E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.61377E0
defgridb_imon=6.30565E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33908E1
os_fil1_imon=4.86632E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.20289E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62254E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30593E1
cs_fil1_imon=9.96558E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64654E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62263E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.23096E-2
os_fil2_imon=-2.47976E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.31991E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.39963E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.28154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.36447E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21504E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.45787E-1
res40_imon=-2.40327E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=218
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.408E3	0.0E0	1.47E2	4.1E1	-7.12368E-2	-8.79975E1	-4.76837E-5	-8.80011E1	3.09944E-4	4.72069E-3	9.35793E-2	2.73177E1	-3.26549E1	-3.26603E1	2.68058E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0071E-1
2.0E0	9.4838E4	1.02E2	3.16E2	1.6E2	-7.19325E-2	-8.79972E1	-2.14577E-4	-8.80009E1	2.14577E-4	4.45843E-3	9.36031E-2	2.72727E1	-3.26514E1	-3.26213E1	2.6798E1	1.20158E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00453E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.79971E1	-4.29153E-4	-8.80009E1	2.38419E-4	4.33922E-3	9.34839E-2	2.72793E1	-3.26603E1	-3.25972E1	2.68117E1	1.2033E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00824E-1
4.0E0	2.0251E4	8.0E0	6.55E2	3.98E2	-7.16233E-2	-8.79974E1	-1.19209E-4	-8.80008E1	1.90735E-4	4.36306E-3	9.35078E-2	2.73346E1	-3.26478E1	-3.26307E1	2.68094E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.79969E1	-2.14577E-4	-8.80008E1	3.09944E-4	4.50611E-3	9.34601E-2	2.72662E1	-3.2688E1	-3.26301E1	2.6795E1	1.20174E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00563E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.79972E1	-2.38419E-5	-8.80007E1	2.14577E-4	4.74453E-3	9.36031E-2	2.72721E1	-3.26602E1	-3.25912E1	2.67903E1	1.20004E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.79972E1	-1.19209E-4	-8.80008E1	7.15256E-5	4.88758E-3	9.3627E-2	2.72714E1	-3.26466E1	-3.26073E1	2.68113E1	1.20177E-7	2.51265E-3	2.51265E-3	6.3074E-3	3.00494E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.79973E1	-3.8147E-4	-8.80007E1	2.14577E-4	4.8399E-3	9.36747E-2	2.72603E1	-3.26602E1	-3.26419E1	2.6798E1	1.2006E-7	2.51527E-3	2.51527E-3	6.33648E-3	3.0147E-1
1.2E1	4.4E1	2.0E0	4.85E2	3.23E2	-7.22418E-2	-8.79973E1	-4.29153E-4	-8.80009E1	2.86102E-4	4.74453E-3	9.34124E-2	2.73297E1	-3.26609E1	-3.25918E1	2.67974E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00197E-1
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.79976E1	-4.76837E-4	-8.80007E1	3.8147E-4	4.57764E-3	9.34839E-2	2.73057E1	-3.2638E1	-3.26277E1	2.6792E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00563E-1
1.4E1	3.109E3	1.0E0	5.66E2	3.82E2	-7.32464E-2	-8.79977E1	-6.91414E-4	-8.80007E1	3.57628E-4	4.57764E-3	9.31501E-2	2.72614E1	-3.26716E1	-3.2631E1	2.68076E1	1.20113E-7	2.51345E-3	2.51345E-3	6.31251E-3	3.01365E-1
1.5E1	3.5E1	0.0E0	6.06E2	4.11E2	-7.40967E-2	-8.79978E1	-9.29832E-4	-8.80007E1	7.15256E-5	4.8399E-3	9.36747E-2	2.73351E1	-3.2644E1	-3.26356E1	2.6804E1	1.19895E-7	2.5118E-3	2.5118E-3	6.33065E-3	3.00639E-1
1.6E1	2.82E2	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.79977E1	-6.91414E-4	-8.80008E1	3.57628E-4	4.62532E-3	9.37223E-2	2.72473E1	-3.2639E1	-3.25747E1	2.68094E1	1.20069E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.99E-1
1.7E1	2.75E2	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.79976E1	-4.29153E-4	-8.80008E1	1.90735E-4	4.69685E-3	9.37939E-2	2.737E1	-3.2653E1	-3.2653E1	2.67956E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.9943E-1
1.8E1	1.175E3	1.0E0	7.27E2	5.0E2	-7.22418E-2	-8.79977E1	-5.72205E-4	-8.8001E1	5.48363E-4	5.07832E-3	9.37939E-2	2.73027E1	-3.26651E1	-3.26392E1	2.68118E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9952E-1
1.9E1	1.036E3	0.0E0	7.68E2	5.29E2	-7.14689E-2	-8.79977E1	-6.19888E-4	-8.80011E1	5.00679E-4	4.88758E-3	9.377E-2	2.73033E1	-3.26567E1	-3.25984E1	2.68172E1	1.20226E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.01609E-1
2.0E1	2.2697E4	1.8E1	8.08E2	5.58E2	-7.17007E-2	-8.7998E1	-1.66893E-4	-8.80008E1	1.66893E-4	4.69685E-3	9.36747E-2	2.72066E1	-3.26726E1	-3.26384E1	2.67636E1	1.20017E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01609E-1
2.1E1	5.0E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.79981E1	-3.57628E-4	-8.80008E1	3.09944E-4	4.98295E-3	9.35555E-2	2.73285E1	-3.26494E1	-3.26645E1	2.681E1	1.20158E-7	2.51203E-3	2.51203E-3	6.29665E-3	2.99686E-1
2.2E1	1.594E3	1.0E0	8.89E2	6.17E2	-7.26282E-2	-8.79984E1	-6.19888E-4	-8.80011E1	2.38419E-4	4.55379E-3	9.33409E-2	2.72614E1	-3.26402E1	-3.26113E1	2.68118E1	1.20174E-7	2.51771E-3	2.51771E-3	6.3514E-3	2.9874E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.79983E1	-4.05312E-4	-8.80013E1	4.05312E-4	4.45843E-3	9.3627E-2	2.72078E1	-3.26567E1	-3.26266E1	2.6804E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00197E-1