[Scan]
initial_time=2016-01-27T22:10:30
final_time=2016-01-27T22:10:49
ip_count=19
run=1025
dataset=5
scan=323
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.78962E-6
ql1_vset=
ql1_vmon=-8.79984E1
ql1_imon=-1.37906E-9
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=4.67348E-10
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-4.49036E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.07833E-9
mult1=-1.77715E-8
mult2=-2.72061E-9
rf_tmon=-5.04115E-3
rf_agc=3.28349E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=4.82035E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66905E0
bslens_imon=2.42787E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19733E1
lens5a_imon=1.97844E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.0503E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53385E1
cs_ef1b_imon=2.7606E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02203E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0502E1
cs_ea1_imon=2.56011E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00475E0
lens1_imon=1.39614E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64592E1
os_ef1alow_imon=2.98818E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03515E1
cs_ea2_imon=1.53616E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84371E1
cs_ef1a_imon=2.90676E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=4.59003E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11362E1
os_restr1_imon=2.87419E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14988E1
os_ea1_imon=1.88422E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.08231E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24431E0
cs_ionrep_imon=1.19043E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93482E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01928E1
cs_anode1_imon=2.90954E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=8.17716E-10
tplens_vset=1.4E-1
tplens_vmon=1.65895E0
tplens_imon=-3.32512E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2638E1
iondef3_imon=1.49839E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26458E1
iondef2_imon=1.57314E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98322E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=4.39513E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.38577E0
ionrepsh_imon=1.75224E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33704E1
lens5b_imon=2.19258E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74733E1
cs_ef2b_imon=3.13116E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.54752E-1
os_ea2_imon=-5.73899E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.0044E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71006E1
cs_ef2a_imon=3.1963E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62814E0
os_ef2alow_imon=-2.46387E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.44026E-1
os_ef2bup_imon=-5.25996E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10878E1
os_restr2_imon=2.87101E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.30512E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01861E1
cs_anode2_imon=2.25103E-5
iondef1_vset=2.763E1
iondef1_vmon=2.737E1
iondef1_imon=1.10867E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.08056E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.06563E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=4.07231E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10499E0
cs_ionaccel_imon=-1.69733E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56246E1
einzel_imon=7.61635E-6
window_vset=0.0E0
window_vmon=1.98158E-1
window_imon=-9.86392E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39112E-4
mask2_vset=0.0E0
mask2_vmon=-1.86622E1
mask2_imon=-6.24965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.60992E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93745E3
defgrida_imon=6.73781E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.03371E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.57095E0
defgridb_imon=6.30176E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33884E1
os_fil1_imon=4.77034E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.27914E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62225E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3067E1
cs_fil1_imon=9.97011E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63623E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6243E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.13852E-2
os_fil2_imon=-2.2927E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.04533E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.22537E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31293E-1
cs_fil2_imon=-2.47143E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20241E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21609E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40059E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.18782E-1
res40_imon=-2.41621E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.414E3	1.0E0	1.47E2	4.1E1	-7.18554E-2	-8.79982E1	-6.4373E-4	-8.80007E1	4.29153E-4	4.91142E-3	9.37223E-2	2.72251E1	-3.26825E1	-3.25896E1	2.67968E1	1.20358E-7	2.52384E-3	2.52384E-3	6.30149E-3	3.01043E-1
2.0E0	9.5573E4	6.9E1	3.16E2	1.6E2	-7.27053E-2	-8.79979E1	-5.24521E-4	-8.80008E1	5.96046E-4	4.72069E-3	9.36985E-2	2.71906E1	-3.26534E1	-3.26629E1	2.68119E1	1.20016E-7	2.51752E-3	2.51752E-3	6.28703E-3	3.00635E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.79976E1	-2.14577E-4	-8.80008E1	5.48363E-4	4.69685E-3	9.37939E-2	2.73788E1	-3.2662E1	-3.26284E1	2.67978E1	1.20208E-7	2.51271E-3	2.51271E-3	6.33592E-3	2.99981E-1
4.0E0	2.029E4	1.1E1	6.55E2	3.98E2	-7.30146E-2	-8.79977E1	-4.76837E-5	-8.80009E1	2.14577E-4	4.36306E-3	9.36747E-2	2.71833E1	-3.26323E1	-3.26163E1	2.67984E1	1.20023E-7	2.52309E-3	2.52309E-3	6.31007E-3	3.00527E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.79978E1	-3.8147E-4	-8.80008E1	3.33786E-4	4.48227E-3	9.36031E-2	2.74457E1	-3.26687E1	-3.26639E1	2.68166E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.79979E1	-3.57628E-4	-8.80007E1	4.05312E-4	4.76837E-3	9.37223E-2	2.72745E1	-3.26729E1	-3.2602E1	2.68034E1	1.19913E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.79982E1	-1.66893E-4	-8.80006E1	4.52995E-4	4.72069E-3	9.3627E-2	2.71771E1	-3.2653E1	-3.26458E1	2.6816E1	1.20311E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.7998E1	-1.66893E-4	-8.80006E1	4.76837E-4	4.60148E-3	9.37223E-2	2.73646E1	-3.265E1	-3.26056E1	2.68136E1	1.20017E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.00824E-1
1.2E1	3.9E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.7998E1	-5.96046E-4	-8.8001E1	5.72205E-4	4.62532E-3	9.34362E-2	2.72638E1	-3.26708E1	-3.26543E1	2.68052E1	1.20278E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.00302E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.7998E1	-4.29153E-4	-8.8001E1	3.8147E-4	5.19753E-3	9.36747E-2	2.72708E1	-3.26419E1	-3.25936E1	2.6783E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9874E-1
1.4E1	3.104E3	1.0E0	5.66E2	3.82E2	-7.19325E-2	-8.79983E1	-1.90735E-4	-8.8001E1	6.91414E-4	4.74453E-3	9.37462E-2	2.7355E1	-3.26741E1	-3.25852E1	2.67836E1	1.19705E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.98481E-1
1.5E1	4.3E1	0.0E0	6.06E2	4.11E2	-7.17779E-2	-8.79982E1	-4.76837E-4	-8.8001E1	2.86102E-4	4.86374E-3	9.36747E-2	2.71381E1	-3.26464E1	-3.26705E1	2.6816E1	1.2035E-7	2.52027E-3	2.52027E-3	6.32978E-3	2.99348E-1
1.6E1	2.68E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.79983E1	-2.86102E-4	-8.8001E1	5.24521E-4	5.05447E-3	9.36508E-2	2.7311E1	-3.27239E1	-3.25682E1	2.67885E1	1.20158E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0071E-1
1.7E1	2.97E2	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.79985E1	-2.86102E-4	-8.80009E1	5.24521E-4	4.88758E-3	9.37939E-2	2.74132E1	-3.26843E1	-3.2635E1	2.68188E1	1.20383E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00302E-1
1.8E1	1.201E3	0.0E0	7.27E2	5.0E2	-7.18554E-2	-8.79985E1	-1.43051E-4	-8.80007E1	3.09944E-4	4.95911E-3	9.38892E-2	2.73111E1	-3.26633E1	-3.26278E1	2.6807E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01347E-1
1.9E1	9.65E2	0.0E0	7.68E2	5.29E2	-7.201E-2	-8.79987E1	-4.05312E-4	-8.80006E1	3.57628E-4	4.86374E-3	9.37462E-2	2.73845E1	-3.26716E1	-3.26419E1	2.68171E1	1.20311E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.0071E-1
2.0E1	2.2795E4	9.0E0	8.08E2	5.58E2	-7.201E-2	-8.79984E1	-3.8147E-4	-8.80008E1	4.52995E-4	4.48227E-3	9.3627E-2	2.72269E1	-3.26637E1	-3.26265E1	2.67889E1	1.20177E-7	2.51762E-3	2.51762E-3	6.28874E-3	3.00345E-1
2.1E1	3.6E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.79986E1	-7.15256E-4	-8.80007E1	4.29153E-4	4.673E-3	9.377E-2	2.71197E1	-3.26863E1	-3.26291E1	2.6792E1	1.20104E-7	2.52333E-3	2.52333E-3	6.32028E-3	3.00279E-1
2.2E1	1.612E3	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.79984E1	-5.96046E-4	-8.80008E1	4.05312E-4	4.8399E-3	9.37223E-2	2.7078E1	-3.26579E1	-3.26086E1	2.68142E1	1.20273E-7	2.52088E-3	2.52088E-3	6.29262E-3	3.02317E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.79984E1	-2.6226E-4	-8.80007E1	2.6226E-4	4.76837E-3	9.36031E-2	2.737E1	-3.26458E1	-3.2638E1	2.67992E1	1.20174E-7	2.51662E-3	2.51662E-3	6.34588E-3	2.9978E-1