[Scan]
initial_time=2016-01-27T22:10:57
final_time=2016-01-27T22:11:16
ip_count=19
run=1025
dataset=5
scan=324
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.80303E-6
ql1_vset=
ql1_vmon=-8.79989E1
ql1_imon=-1.27395E-9
ql2_vset=
ql2_vmon=-1.19209E-4
ql2_imon=4.19521E-10
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-3.85419E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.01838E-9
mult1=-1.70611E-8
mult2=-2.84037E-9
rf_tmon=-3.22666E-3
rf_agc=3.43189E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=4.51469E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65232E0
bslens_imon=2.61706E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19971E1
lens5a_imon=1.98091E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05115E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=2.76394E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02189E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0521E1
cs_ea1_imon=2.58654E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98908E0
lens1_imon=1.37335E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64584E1
os_ef1alow_imon=2.99964E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03961E1
cs_ea2_imon=1.53029E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=2.90053E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=4.37498E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=2.88359E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15318E1
os_ea1_imon=1.88394E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.0919E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27974E0
cs_ionrep_imon=1.1871E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=2.90413E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=8.41749E-10
tplens_vset=1.4E-1
tplens_vmon=1.65405E0
tplens_imon=-2.30852E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.50866E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26933E1
iondef2_imon=1.59013E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98367E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=4.49872E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27553E0
ionrepsh_imon=1.74587E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33562E1
lens5b_imon=2.18495E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.14128E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.349E-1
os_ea2_imon=-4.50754E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.19029E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61798E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.44566E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=2.86737E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.32307E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.24749E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73219E1
iondef1_imon=1.08111E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68286E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.02447E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=3.65901E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12293E0
cs_ionaccel_imon=-1.69689E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56063E1
einzel_imon=7.79956E-6
window_vset=0.0E0
window_vmon=2.11937E-1
window_imon=-9.97719E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86656E1
mask2_imon=-4.42708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.8154E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.55727E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.20256E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.42839E0
defgridb_imon=6.12829E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33899E1
os_fil1_imon=4.35576E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.36507E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6216E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3062E1
cs_fil1_imon=9.97309E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63561E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6244E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07971E-2
os_fil2_imon=-2.32359E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17866E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.33771E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.22148E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.00407E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21502E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.96887E-1
chamber_ion_pmon=1.20311E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.81516E-1
res40_imon=-2.47895E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=201
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.433E3	3.0E0	1.47E2	4.1E1	-7.27053E-2	-8.79986E1	-5.96046E-4	-8.80007E1	3.33786E-4	4.64916E-3	9.3627E-2	2.74283E1	-3.26494E1	-3.26567E1	2.68088E1	1.19913E-7	2.52209E-3	2.52209E-3	6.28552E-3	3.00563E-1
2.0E0	9.583E4	8.8E1	3.16E2	1.6E2	-7.37103E-2	-8.79987E1	-7.86781E-4	-8.80006E1	6.19888E-4	4.55379E-3	9.38654E-2	2.72114E1	-3.26615E1	-3.26452E1	2.67872E1	1.198E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.03286E-1
3.0E0	8.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.79986E1	-2.14577E-4	-8.80008E1	3.33786E-4	4.76837E-3	9.35793E-2	2.72437E1	-3.26695E1	-3.26185E1	2.67896E1	1.20226E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01609E-1
4.0E0	2.0635E4	1.7E1	6.55E2	3.98E2	-7.35556E-2	-8.79986E1	-3.8147E-4	-8.80008E1	5.24521E-4	4.45843E-3	9.36985E-2	2.74337E1	-3.26909E1	-3.26669E1	2.68117E1	1.19902E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.03027E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.79988E1	-4.05312E-4	-8.80005E1	5.48363E-4	4.64916E-3	9.36508E-2	2.73424E1	-3.26494E1	-3.26272E1	2.6813E1	1.19809E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.79988E1	-3.57628E-4	-8.80004E1	4.52995E-4	4.79221E-3	9.36508E-2	2.72506E1	-3.26609E1	-3.26064E1	2.68082E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.7999E1	-3.57628E-4	-8.80006E1	5.72205E-4	4.62532E-3	9.39131E-2	2.72751E1	-3.26494E1	-3.2623E1	2.67812E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.79989E1	-5.72205E-4	-8.80007E1	8.34465E-4	4.79221E-3	9.38892E-2	2.73369E1	-3.26524E1	-3.26386E1	2.68034E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00563E-1
1.2E1	4.3E1	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.79986E1	-5.96046E-4	-8.80005E1	5.00679E-4	4.88758E-3	9.38892E-2	2.73322E1	-3.26585E1	-3.26461E1	2.68004E1	1.20383E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.00302E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.14689E-2	-8.79986E1	-4.52995E-4	-8.80006E1	5.24521E-4	4.95911E-3	9.377E-2	2.73117E1	-3.26681E1	-3.26242E1	2.67787E1	1.20069E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01347E-1
1.4E1	3.11E3	3.0E0	5.66E2	3.82E2	-7.23189E-2	-8.79988E1	-4.05312E-4	-8.80004E1	4.29153E-4	4.60148E-3	9.36985E-2	2.73234E1	-3.26354E1	-3.26419E1	2.67926E1	1.20209E-7	2.51417E-3	2.51417E-3	6.2752E-3	3.01995E-1
1.5E1	4.5E1	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.79986E1	-6.91414E-4	-8.80003E1	2.86102E-4	5.00679E-3	9.36747E-2	2.7251E1	-3.26452E1	-3.262E1	2.67908E1	1.2033E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00563E-1
1.6E1	2.64E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.79988E1	-9.05991E-4	-8.80006E1	2.86102E-4	4.88758E-3	9.38654E-2	2.73399E1	-3.25948E1	-3.2742E1	2.67932E1	1.20174E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01609E-1
1.7E1	3.04E2	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.79985E1	-3.57628E-4	-8.80005E1	6.19888E-4	4.79221E-3	9.37223E-2	2.73273E1	-3.26699E1	-3.26398E1	2.68304E1	1.20226E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00824E-1
1.8E1	1.24E3	1.0E0	7.27E2	5.0E2	-7.25507E-2	-8.79986E1	-1.90735E-4	-8.80008E1	6.67572E-4	4.76837E-3	9.34124E-2	2.72384E1	-3.265E1	-3.26645E1	2.67613E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02133E-1
1.9E1	1.004E3	1.0E0	7.68E2	5.29E2	-7.26282E-2	-8.79983E1	-7.15256E-5	-8.80005E1	5.48363E-4	4.88758E-3	9.35555E-2	2.72225E1	-3.26691E1	-3.26148E1	2.68124E1	1.20106E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.0071E-1
2.0E1	2.2915E4	1.0E1	8.08E2	5.58E2	-7.27053E-2	-8.79983E1	2.38419E-5	-8.80006E1	3.8147E-4	5.07832E-3	9.36747E-2	2.74072E1	-3.2647E1	-3.26104E1	2.68186E1	1.19913E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.01609E-1
2.1E1	4.4E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.79988E1	2.6226E-4	-8.80007E1	2.86102E-4	4.72069E-3	9.39846E-2	2.72847E1	-3.26633E1	-3.26314E1	2.6774E1	1.20311E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99175E-1
2.2E1	1.602E3	2.0E0	8.89E2	6.17E2	-7.19325E-2	-8.79988E1	-2.38419E-4	-8.80005E1	2.86102E-4	4.95911E-3	9.36031E-2	2.72951E1	-3.26408E1	-3.26284E1	2.67511E1	1.19965E-7	2.52209E-3	2.52209E-3	6.29645E-3	2.98481E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.79989E1	-1.19209E-4	-8.80008E1	1.43051E-4	4.86374E-3	9.38177E-2	2.73219E1	-3.26933E1	-3.26248E1	2.68286E1	1.20311E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.96887E-1