[Scan]
initial_time=2016-01-27T22:13:37
final_time=2016-01-27T22:13:56
ip_count=19
run=1025
dataset=5
scan=330
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.79103E-6
ql1_vset=
ql1_vmon=-8.80002E1
ql1_imon=-9.04584E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=4.40013E-10
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.71045E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=9.05287E-10
mult1=-1.70731E-8
mult2=-2.61881E-9
rf_tmon=-5.54584E-3
rf_agc=3.27568E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=4.39775E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63436E0
bslens_imon=2.50786E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19818E1
lens5a_imon=1.97377E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53866E1
cs_ef1b_imon=2.76977E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04994E1
cs_ea1_imon=2.58361E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02357E0
lens1_imon=1.44604E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.98279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0408E1
cs_ea2_imon=1.52391E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=2.90246E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=4.27449E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11365E1
os_restr1_imon=2.88477E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14952E1
os_ea1_imon=1.87962E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63349E1
os_ef1bup_imon=3.08965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24207E0
cs_ionrep_imon=1.17457E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93452E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01892E1
cs_anode1_imon=2.92228E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=7.0951E-10
tplens_vset=1.4E-1
tplens_vmon=1.66326E0
tplens_imon=-3.27202E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25924E1
iondef3_imon=1.4956E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26386E1
iondef2_imon=1.5724E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02895E2
lens6_imon=2.98332E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=4.01461E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27805E0
ionrepsh_imon=1.73946E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33321E1
lens5b_imon=2.17587E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74655E1
cs_ef2b_imon=3.12538E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.62833E-1
os_ea2_imon=-5.8204E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00573E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71175E1
cs_ef2a_imon=3.19403E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64518E0
os_ef2alow_imon=-2.68333E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.59877E-1
os_ef2bup_imon=-5.21685E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10994E1
os_restr2_imon=2.87486E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.31202E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01856E1
cs_anode2_imon=2.23547E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73652E1
iondef1_imon=1.10555E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.08901E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.03221E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=3.86024E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10419E0
cs_ionaccel_imon=-1.62533E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.474E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56328E1
einzel_imon=7.82584E-6
window_vset=0.0E0
window_vmon=2.32556E-1
window_imon=-1.0238E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86904E1
mask2_imon=-6.62877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.65063E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.61712E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.34978E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.5931E0
defgridb_imon=5.98002E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33924E1
os_fil1_imon=5.2585E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.49361E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62509E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30648E1
cs_fil1_imon=9.97242E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63138E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62803E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09167E-2
os_fil2_imon=-2.43761E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.70833E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.25536E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30097E-1
cs_fil2_imon=-2.83273E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21477E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.97647E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.76646E-1
res40_imon=-2.44271E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.446E3	1.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80001E1	-3.57628E-4	-8.80005E1	2.14577E-4	4.81606E-3	9.37939E-2	2.7216E1	-3.26472E1	-3.26307E1	2.67935E1	1.19953E-7	2.51525E-3	2.51525E-3	6.34518E-3	3.01738E-1
2.0E0	9.7064E4	8.9E1	3.16E2	1.6E2	-7.286E-2	-8.79999E1	0.0E0	-8.80008E1	0.0E0	4.74453E-3	9.39369E-2	2.74036E1	-3.26374E1	-3.26242E1	2.67775E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.03027E-1
3.0E0	2.4E1	0.0E0	4.85E2	2.79E2	-7.11597E-2	-8.8E1	2.14577E-4	-8.80003E1	-4.76837E-5	4.50611E-3	9.38177E-2	2.72838E1	-3.26735E1	-3.26434E1	2.68072E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
4.0E0	2.1198E4	6.0E0	6.55E2	3.98E2	-7.24736E-2	-8.79997E1	9.53674E-5	-8.80003E1	0.0E0	4.62532E-3	9.43184E-2	2.72329E1	-3.26598E1	-3.2583E1	2.68192E1	1.20002E-7	2.51256E-3	2.51256E-3	6.28096E-3	3.01081E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.79998E1	4.76837E-5	-8.80003E1	-2.38419E-5	4.43459E-3	9.36508E-2	2.74105E1	-3.26474E1	-3.26399E1	2.68082E1	1.19862E-7	2.51468E-3	2.51468E-3	6.31344E-3	3.01753E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17779E-2	-8.79998E1	2.38419E-5	-8.80006E1	3.09944E-4	4.79221E-3	9.39608E-2	2.72466E1	-3.26457E1	-3.26165E1	2.67907E1	1.20243E-7	2.52025E-3	2.52025E-3	6.29157E-3	3.01356E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.79996E1	0.0E0	-8.80005E1	4.29153E-4	4.673E-3	9.40084E-2	2.73261E1	-3.26729E1	-3.26428E1	2.6807E1	1.2006E-7	2.51642E-3	2.51642E-3	6.3016E-3	3.00916E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.79993E1	2.14577E-4	-8.80005E1	3.33786E-4	4.64916E-3	9.38892E-2	2.73874E1	-3.26368E1	-3.26248E1	2.6789E1	1.20069E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9978E-1
1.2E1	4.3E1	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.79995E1	1.66893E-4	-8.80003E1	3.33786E-4	4.55379E-3	9.3627E-2	2.74343E1	-3.2626E1	-3.26224E1	2.6816E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9952E-1
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.79999E1	4.76837E-4	-8.80004E1	1.66893E-4	4.52995E-3	9.37939E-2	2.72089E1	-3.26561E1	-3.26549E1	2.67995E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01347E-1
1.4E1	3.137E3	1.0E0	5.66E2	3.82E2	-7.25507E-2	-8.8E1	1.66893E-4	-8.80005E1	2.38419E-4	4.62532E-3	9.39608E-2	2.73871E1	-3.26488E1	-3.26471E1	2.68128E1	1.20311E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0148E-1
1.5E1	3.7E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.79998E1	1.90735E-4	-8.80003E1	4.05312E-4	4.8399E-3	9.36508E-2	2.71601E1	-3.26521E1	-3.2619E1	2.67991E1	1.20127E-7	2.51783E-3	2.51783E-3	6.29703E-3	3.02479E-1
1.6E1	2.87E2	2.0E0	6.47E2	4.41E2	-7.27053E-2	-8.8E1	2.38419E-4	-8.80003E1	3.8147E-4	4.72069E-3	9.36985E-2	2.73117E1	-3.25683E1	-3.27209E1	2.68053E1	1.20281E-7	2.5118E-3	2.5118E-3	6.31321E-3	3.00639E-1
1.7E1	3.19E2	1.0E0	6.87E2	4.7E2	-7.201E-2	-8.8E1	-2.38419E-4	-8.80005E1	4.29153E-4	4.88758E-3	9.39846E-2	2.71935E1	-3.26562E1	-3.26089E1	2.68123E1	1.19705E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00563E-1
1.8E1	1.262E3	1.0E0	7.27E2	5.0E2	-7.19325E-2	-8.79999E1	-2.14577E-4	-8.80001E1	4.29153E-4	4.86374E-3	9.39369E-2	2.74048E1	-3.26723E1	-3.26242E1	2.6816E1	1.20177E-7	2.51679E-3	2.51679E-3	6.28667E-3	2.99506E-1
1.9E1	1.018E3	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.79998E1	-1.43051E-4	-8.80004E1	1.43051E-4	4.64916E-3	9.40323E-2	2.72455E1	-3.26526E1	-3.2616E1	2.68163E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00824E-1
2.0E1	2.2865E4	2.2E1	8.08E2	5.58E2	-7.29374E-2	-8.79998E1	-1.19209E-4	-8.80006E1	3.33786E-4	4.673E-3	9.40561E-2	2.73677E1	-3.26532E1	-3.26538E1	2.67931E1	1.20158E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.00966E-1
2.1E1	4.2E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80001E1	-1.43051E-4	-8.80004E1	5.00679E-4	4.45843E-3	9.33886E-2	2.72853E1	-3.26621E1	-3.26494E1	2.6792E1	1.20092E-7	2.51287E-3	2.51287E-3	6.31798E-3	2.99093E-1
2.2E1	1.689E3	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80002E1	-3.33786E-4	-8.80003E1	3.57628E-4	4.41074E-3	9.39131E-2	2.72196E1	-3.26284E1	-3.26514E1	2.67908E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9978E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80002E1	-2.14577E-4	-8.80006E1	4.29153E-4	4.24385E-3	9.36031E-2	2.73652E1	-3.26386E1	-3.25924E1	2.68052E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.97647E-1