[Scan]
initial_time=2016-01-27T22:14:57
final_time=2016-01-27T22:15:16
ip_count=19
run=1025
dataset=5
scan=333
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.75384E-6
ql1_vset=
ql1_vmon=-8.80001E1
ql1_imon=-8.81219E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=4.34959E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.54568E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=8.67188E-10
mult1=-2.09191E-8
mult2=-2.7311E-9
rf_tmon=-6.03732E-3
rf_agc=3.20998E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=4.31502E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64853E0
bslens_imon=2.71974E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19829E1
lens5a_imon=1.99612E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.05077E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5352E1
cs_ef1b_imon=2.77365E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02057E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04904E1
cs_ea1_imon=2.57039E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99963E0
lens1_imon=1.4544E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64651E1
os_ef1alow_imon=2.99285E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03791E1
cs_ea2_imon=1.53563E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84277E1
cs_ef1a_imon=2.90578E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=4.19378E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11283E1
os_restr1_imon=2.88666E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15171E1
os_ea1_imon=1.88939E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63456E1
os_ef1bup_imon=3.08367E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26608E0
cs_ionrep_imon=1.19732E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91914E2
cs_nozzle_imon=1.93316E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01661E1
cs_anode1_imon=2.91534E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=7.92801E-10
tplens_vset=1.4E-1
tplens_vmon=1.62129E0
tplens_imon=-1.8349E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26219E1
iondef3_imon=1.50442E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26526E1
iondef2_imon=1.58632E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98363E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=4.24171E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2851E0
ionrepsh_imon=1.7501E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33696E1
lens5b_imon=2.17267E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7478E1
cs_ef2b_imon=3.1243E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.10515E-1
os_ea2_imon=-4.98986E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06067E2
lens4b_imon=2.00606E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71195E1
cs_ef2a_imon=3.18473E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61194E0
os_ef2alow_imon=-2.55501E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.21172E-1
os_ef2bup_imon=-5.23864E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=2.87642E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.29089E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01866E1
cs_anode2_imon=2.25229E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72986E1
iondef1_imon=1.09159E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67866E1
iondef4_imon=1.10373E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.06901E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=3.44396E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10966E0
cs_ionaccel_imon=-1.8346E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47315E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56286E1
einzel_imon=7.75613E-6
window_vset=0.0E0
window_vmon=2.76176E-1
window_imon=-7.69341E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.3904E-4
mask2_vset=0.0E0
mask2_vmon=-1.86737E1
mask2_imon=-6.39598E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92673E3
multa_neg_imon=7.23401E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.40164E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=6.99907E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.59951E0
defgridb_imon=6.26739E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3391E1
os_fil1_imon=5.71136E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.538E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62492E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30696E1
cs_fil1_imon=9.96502E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63481E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62584E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.13708E-2
os_fil2_imon=-2.3805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.00478E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.22335E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3094E-1
cs_fil2_imon=-2.16426E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13053E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21564E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.94162E-1
res40_imon=-2.49014E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.47E3	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80001E1	-3.09944E-4	-8.80003E1	2.6226E-4	4.79221E-3	9.37939E-2	2.7265E1	-3.26597E1	-3.26546E1	2.67859E1	1.2021E-7	2.52466E-3	2.52466E-3	6.3023E-3	3.01853E-1
2.0E0	9.6425E4	8.7E1	3.16E2	1.6E2	-7.31692E-2	-8.8E1	-1.66893E-4	-8.80004E1	3.57628E-4	4.86374E-3	9.39131E-2	2.73249E1	-3.26518E1	-3.26627E1	2.68004E1	1.20005E-7	2.52222E-3	2.52222E-3	6.31902E-3	3.01193E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.79999E1	-4.29153E-4	-8.80006E1	5.48363E-4	4.57764E-3	9.408E-2	2.72912E1	-3.26614E1	-3.26341E1	2.67949E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00563E-1
4.0E0	2.0584E4	1.2E1	6.55E2	3.98E2	-7.32464E-2	-8.79999E1	-4.52995E-4	-8.80009E1	5.00679E-4	4.62532E-3	9.3627E-2	2.72432E1	-3.26603E1	-3.2608E1	2.68028E1	1.20142E-7	2.51709E-3	2.51709E-3	6.32328E-3	2.99845E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.79999E1	-1.66893E-4	-8.80007E1	3.09944E-4	4.98295E-3	9.36985E-2	2.72543E1	-3.26438E1	-3.26205E1	2.68154E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.8E1	-3.57628E-4	-8.80004E1	1.43051E-4	4.86374E-3	9.34839E-2	2.73009E1	-3.26488E1	-3.26597E1	2.68004E1	1.20122E-7	2.52318E-3	2.52318E-3	6.26916E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.8E1	-5.72205E-4	-8.80005E1	3.57628E-4	4.64916E-3	9.35078E-2	2.73075E1	-3.26543E1	-3.26378E1	2.681E1	1.2035E-7	2.52809E-3	2.52809E-3	6.30182E-3	3.00676E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80001E1	-2.6226E-4	-8.80005E1	1.43051E-4	5.19753E-3	9.36031E-2	2.72925E1	-3.26645E1	-3.2617E1	2.67914E1	1.20158E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00453E-1
1.2E1	4.1E1	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80002E1	-5.00679E-4	-8.80008E1	-2.38419E-4	5.126E-3	9.35793E-2	2.73482E1	-3.26545E1	-3.26238E1	2.67903E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00302E-1
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80001E1	-7.39098E-4	-8.80003E1	-7.15256E-5	5.03063E-3	9.38416E-2	2.73051E1	-3.26524E1	-3.25924E1	2.68142E1	1.20258E-7	2.51854E-3	2.51854E-3	6.33297E-3	3.03321E-1
1.4E1	3.111E3	0.0E0	5.66E2	3.82E2	-7.17007E-2	-8.80003E1	-7.39098E-4	-8.80004E1	7.15256E-5	4.93526E-3	9.41277E-2	2.72696E1	-3.26693E1	-3.26554E1	2.67956E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.03185E-1
1.5E1	4.0E1	0.0E0	6.06E2	4.11E2	-7.05415E-2	-8.8E1	-3.33786E-4	-8.80006E1	7.15256E-5	4.79221E-3	9.41753E-2	2.73098E1	-3.26437E1	-3.26331E1	2.67972E1	1.20217E-7	2.51863E-3	2.51863E-3	6.32371E-3	3.02975E-1
1.6E1	2.75E2	0.0E0	6.47E2	4.41E2	-7.10825E-2	-8.80002E1	-6.67572E-4	-8.80005E1	1.90735E-4	5.07832E-3	9.40561E-2	2.73213E1	-3.2641E1	-3.2626E1	2.67848E1					
1.7E1	3.07E2	0.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80003E1	-2.86102E-4	-8.80006E1	-7.15256E-5	4.69685E-3	9.36031E-2	2.72715E1	-3.26975E1	-3.2608E1	2.67854E1	1.19965E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00302E-1
1.8E1	1.293E3	0.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80005E1	-9.77516E-4	-8.80004E1	-9.53674E-5	4.48227E-3	9.34601E-2	2.72354E1	-3.26567E1	-3.26404E1	2.68226E1	1.20278E-7	2.52428E-3	2.52428E-3	6.32936E-3	2.98481E-1
1.9E1	1.058E3	1.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80003E1	-6.19888E-4	-8.80006E1	-1.19209E-4	4.81606E-3	9.36985E-2	2.73476E1	-3.26449E1	-3.26667E1	2.68148E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.98222E-1
2.0E1	2.3236E4	1.5E1	8.08E2	5.58E2	-7.23964E-2	-8.80003E1	-3.8147E-4	-8.80003E1	0.0E0	4.93526E-3	9.37223E-2	2.7355E1	-3.26741E1	-3.26026E1	2.681E1	1.2026E-7	2.5131E-3	2.5131E-3	6.30202E-3	2.99175E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.13915E-2	-8.80002E1	-4.76837E-5	-8.80003E1	7.15256E-5	4.81606E-3	9.36985E-2	2.72084E1	-3.26597E1	-3.26374E1	2.68232E1	1.2054E-7	2.51225E-3	2.51225E-3	6.34037E-3	2.9952E-1
2.2E1	1.588E3	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80001E1	-3.33786E-4	-8.80004E1	-7.15256E-5	4.93526E-3	9.39369E-2	2.73576E1	-3.26644E1	-3.26354E1	2.68059E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01085E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80001E1	-4.05312E-4	-8.80003E1	0.0E0	4.93526E-3	9.377E-2	2.72986E1	-3.26526E1	-3.26219E1	2.67866E1	1.20004E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.0148E-1