[Scan]
initial_time=2016-01-27T22:15:50
final_time=2016-01-27T22:16:10
ip_count=19
run=1025
dataset=5
scan=335
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.7587E-6
ql1_vset=
ql1_vmon=-8.80004E1
ql1_imon=-7.97939E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=4.15027E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.37286E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=8.83341E-10
mult1=-1.7278E-8
mult2=-2.71542E-9
rf_tmon=-4.12604E-3
rf_agc=3.4306E-2
counter1=0
counter2=1
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=4.21417E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65607E0
bslens_imon=2.58361E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1998E1
lens5a_imon=1.98117E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.0503E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53678E1
cs_ef1b_imon=2.7702E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02444E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05306E1
cs_ea1_imon=2.57685E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05212E0
lens1_imon=1.57134E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64764E1
os_ef1alow_imon=2.99478E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03898E1
cs_ea2_imon=1.52759E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83564E1
cs_ef1a_imon=2.88346E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=4.41325E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=2.88229E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1517E1
os_ea1_imon=1.8924E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63668E1
os_ef1bup_imon=3.07691E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23263E0
cs_ionrep_imon=1.18381E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.9335E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01685E1
cs_anode1_imon=2.90137E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=8.03709E-10
tplens_vset=1.4E-1
tplens_vmon=1.64014E0
tplens_imon=-1.32569E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26425E1
iondef3_imon=1.49372E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26455E1
iondef2_imon=1.59378E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.9847E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=4.31931E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.38123E0
ionrepsh_imon=1.77871E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33541E1
lens5b_imon=2.18012E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12751E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.3788E-1
os_ea2_imon=-5.85579E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00545E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71238E1
cs_ef2a_imon=3.18083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64878E0
os_ef2alow_imon=-2.45934E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.20659E-1
os_ef2bup_imon=-5.2034E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1089E1
os_restr2_imon=2.86205E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.30668E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0177E1
cs_anode2_imon=2.25058E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.09387E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68286E1
iondef4_imon=1.08133E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.07944E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=3.847E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11846E0
cs_ionaccel_imon=-1.70035E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.47242E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56055E1
einzel_imon=7.7073E-6
window_vset=0.0E0
window_vmon=1.5819E-1
window_imon=-1.05423E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39177E-4
mask2_vset=0.0E0
mask2_vmon=-1.86584E1
mask2_imon=-6.88354E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9272E3
multa_neg_imon=7.43083E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.5081E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.18944E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.60343E0
defgridb_imon=6.13045E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33925E1
os_fil1_imon=4.83389E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.7012E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62693E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30711E1
cs_fil1_imon=9.9568E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63721E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62825E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16638E-2
os_fil2_imon=-2.49009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.48089E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.20309E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30071E-1
cs_fil2_imon=-2.32143E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25298E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21679E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33538E-3
inlet_lpb_pmon=3.0041E-1
chamber_ion_pmon=1.20297E-7
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40095E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.45763E-1
res40_imon=-2.47102E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.455E3	1.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80004E1	-1.19209E-4	-8.80004E1	6.67572E-4	4.3869E-3	9.40323E-2	2.74555E1	-3.26478E1	-3.26319E1	2.67943E1	1.20132E-7	2.50968E-3	2.50968E-3	6.31332E-3	3.00761E-1
2.0E0	9.6335E4	8.8E1	3.16E2	1.6E2	-7.15461E-2	-8.80004E1	-2.86102E-4	-8.80001E1	3.33786E-4	4.79221E-3	9.38177E-2	2.71784E1	-3.26493E1	-3.26389E1	2.68163E1	1.19991E-7	2.52448E-3	2.52448E-3	6.32858E-3	3.01104E-1
3.0E0	2.2E1	1.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80005E1	-3.09944E-4	-8.80001E1	6.67572E-4	5.10216E-3	9.39369E-2	2.73629E1	-3.26531E1	-3.25965E1	2.6825E1	1.201E-7	2.52407E-3	2.52407E-3	6.3074E-3	3.01065E-1
4.0E0	2.0597E4	1.6E1	6.55E2	3.98E2	-7.15461E-2	-8.80006E1	-7.15256E-5	-8.80005E1	1.43051E-4	4.79221E-3	9.36747E-2	2.74349E1	-3.26675E1	-3.26398E1	2.6819E1	1.20106E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.00966E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80003E1	-4.76837E-5	-8.80001E1	5.24521E-4	4.81606E-3	9.377E-2	2.72573E1	-3.26555E1	-3.26526E1	2.6822E1	1.20106E-7	2.52815E-3	2.52815E-3	6.32896E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.80004E1	-2.38419E-4	-8.80002E1	5.00679E-4	5.05447E-3	9.39846E-2	2.74072E1	-3.26795E1	-3.25888E1	2.67998E1	1.2033E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.80003E1	-7.15256E-5	-8.80003E1	7.62939E-4	5.17368E-3	9.38177E-2	2.72847E1	-3.26404E1	-3.26488E1	2.67794E1	1.20174E-7	2.52538E-3	2.52538E-3	6.34037E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80001E1	-4.76837E-5	-8.80001E1	5.72205E-4	4.93526E-3	9.37223E-2	2.72198E1	-3.26002E1	-3.26344E1	2.68136E1	1.20122E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01871E-1
1.2E1	4.0E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.79997E1	2.38419E-5	-8.80002E1	4.29153E-4	4.8399E-3	9.38177E-2	2.71519E1	-3.26627E1	-3.25942E1	2.67986E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.03185E-1
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.79997E1	-1.66893E-4	-8.80003E1	5.72205E-4	4.91142E-3	9.41515E-2	2.73526E1	-3.26308E1	-3.26416E1	2.67992E1	1.20383E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9978E-1
1.4E1	3.136E3	7.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80001E1	-1.19209E-4	-8.80004E1	7.15256E-4	4.72069E-3	9.32693E-2	2.74385E1	-3.26723E1	-3.26044E1	2.68166E1	1.20017E-7	2.51225E-3	2.51225E-3	6.29098E-3	2.9926E-1
1.5E1	3.4E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80003E1	-3.8147E-4	-8.80002E1	7.62939E-4	4.55379E-3	9.34124E-2	2.72546E1	-3.27071E1	-3.26152E1	2.68208E1	1.20363E-7	2.52492E-3	2.52492E-3	6.31278E-3	3.00197E-1
1.6E1	2.53E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80001E1	-7.15256E-5	-8.80004E1	5.48363E-4	4.8399E-3	9.37223E-2	2.72909E1	-3.26419E1	-3.26101E1	2.6797E1	1.20031E-7	2.51915E-3	2.51915E-3	6.34099E-3	3.00676E-1
1.7E1	3.3E2	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80001E1	-7.15256E-5	-8.80007E1	5.48363E-4	4.95911E-3	9.37939E-2	2.73194E1	-3.26479E1	-3.26653E1	2.68569E1	1.20276E-7	2.52301E-3	2.52301E-3	6.3074E-3	3.01981E-1
1.8E1	1.294E3	1.0E0	7.27E2	5.0E2	-7.25507E-2	-8.79998E1	-4.52995E-4	-8.80004E1	1.90735E-4	4.62532E-3	9.34362E-2	2.73611E1	-3.26697E1	-3.26242E1	2.68238E1	1.20316E-7	2.51611E-3	2.51611E-3	6.30171E-3	3.00251E-1
1.9E1	9.49E2	0.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80001E1	-1.90735E-4	-8.80007E1	3.09944E-4	4.62532E-3	9.37939E-2	2.73033E1	-3.26711E1	-3.2614E1	2.6834E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00197E-1
2.0E1	2.2987E4	1.6E1	8.08E2	5.58E2	-7.21643E-2	-8.80001E1	-5.24521E-4	-8.80007E1	4.76837E-4	4.93526E-3	9.36508E-2	2.72438E1	-3.26741E1	-3.26554E1	2.68593E1	1.20122E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.9926E-1
2.1E1	5.8E1	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80002E1	-4.52995E-4	-8.80005E1	2.6226E-4	4.64916E-3	9.37462E-2	2.74538E1	-3.26579E1	-3.26449E1	2.68128E1	1.19953E-7	2.51203E-3	2.51203E-3	6.30202E-3	2.99686E-1
2.2E1	1.688E3	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80005E1	-3.09944E-4	-8.80005E1	3.09944E-4	4.98295E-3	9.3627E-2	2.7236E1	-3.26771E1	-3.26585E1	2.68004E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00453E-1
2.3E1	0.0E0	1.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80004E1	-5.48363E-4	-8.80003E1	2.86102E-4	5.00679E-3	9.37939E-2	2.73405E1	-3.26455E1	-3.26425E1	2.68286E1	1.20297E-7	2.51693E-3	2.51693E-3	6.33538E-3	3.0041E-1