[Scan]
initial_time=2016-01-27T22:17:37
final_time=2016-01-27T22:17:56
ip_count=19
run=1025
dataset=5
scan=339
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.82078E-6
ql1_vset=
ql1_vmon=-8.80002E1
ql1_imon=-8.11493E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=4.08709E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.37236E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=8.32772E-10
mult1=-1.81646E-8
mult2=-2.71346E-9
rf_tmon=-2.31504E-3
rf_agc=3.53797E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=4.26507E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64698E0
bslens_imon=2.72766E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19649E1
lens5a_imon=1.98E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05287E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53489E1
cs_ef1b_imon=2.76591E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02238E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05176E1
cs_ea1_imon=2.59126E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0067E0
lens1_imon=1.62974E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64933E1
os_ef1alow_imon=2.99673E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03749E1
cs_ea2_imon=1.52993E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84128E1
cs_ef1a_imon=2.89125E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=4.21619E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11221E1
os_restr1_imon=2.86906E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15228E1
os_ea1_imon=1.89162E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63778E1
os_ef1bup_imon=3.10143E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25924E0
cs_ionrep_imon=1.16318E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93253E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01796E1
cs_anode1_imon=2.90292E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=7.97975E-10
tplens_vset=1.4E-1
tplens_vmon=1.65052E0
tplens_imon=-3.71445E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26874E1
iondef3_imon=1.50813E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26284E1
iondef2_imon=1.59183E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.9835E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=4.3751E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23263E0
ionrepsh_imon=1.73394E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3358E1
lens5b_imon=2.18518E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74774E1
cs_ef2b_imon=3.14502E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.36583E-1
os_ea2_imon=-4.76565E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00693E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71128E1
cs_ef2a_imon=3.1929E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64424E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51149E-1
os_ef2bup_imon=-5.37856E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10857E1
os_restr2_imon=2.86984E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.29189E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01945E1
cs_anode2_imon=2.24668E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71907E1
iondef1_imon=1.08492E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6818E1
iondef4_imon=1.08328E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.02978E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=3.65388E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1282E0
cs_ionaccel_imon=-1.7743E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47265E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56431E1
einzel_imon=7.73455E-6
window_vset=0.0E0
window_vmon=2.61335E-1
window_imon=-1.18657E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.86759E1
mask2_imon=-5.71586E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.28677E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.3913E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.20501E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.5612E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33917E1
os_fil1_imon=4.74307E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.69471E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62427E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30735E1
cs_fil1_imon=9.98333E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63955E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62759E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.2221E-2
os_fil2_imon=-2.39279E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.76731E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.24207E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30211E-1
cs_fil2_imon=-2.2371E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.31321E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21704E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20363E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.19815E-1
res40_imon=-2.32311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.458E3	3.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80004E1	-1.19209E-4	-8.80003E1	2.86102E-4	4.79221E-3	9.39369E-2	2.73661E1	-3.26831E1	-3.26143E1	2.68093E1	1.20171E-7	2.51642E-3	2.51642E-3	6.31321E-3	3.0147E-1
2.0E0	9.6052E4	8.9E1	3.16E2	1.6E2	-7.20871E-2	-8.80002E1	-4.76837E-5	-8.80004E1	4.52995E-4	4.55379E-3	9.41277E-2	2.7381E1	-3.26585E1	-3.26027E1	2.68106E1	1.20016E-7	2.51752E-3	2.51752E-3	6.29211E-3	3.00878E-1
3.0E0	9.0E0	1.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80006E1	-1.90735E-4	-8.80006E1	5.96046E-4	4.74453E-3	9.37939E-2	2.73735E1	-3.26862E1	-3.26083E1	2.68196E1	1.20084E-7	2.51915E-3	2.51915E-3	6.29067E-3	2.98026E-1
4.0E0	2.0758E4	8.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80005E1	-7.15256E-5	-8.80005E1	3.57628E-4	5.126E-3	9.34839E-2	2.71895E1	-3.26632E1	-3.26555E1	2.67781E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99941E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80006E1	-3.8147E-4	-8.80004E1	6.19888E-4	4.64916E-3	9.36985E-2	2.73859E1	-3.26505E1	-3.26132E1	2.68232E1	1.20069E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80007E1	-3.8147E-4	-8.80002E1	2.38419E-4	4.86374E-3	9.39369E-2	2.72276E1	-3.26849E1	-3.26158E1	2.68142E1	1.2033E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.11597E-2	-8.80005E1	-5.00679E-4	-8.80004E1	1.43051E-4	4.76837E-3	9.39131E-2	2.73847E1	-3.26767E1	-3.25883E1	2.68163E1	1.20017E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00041E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.08504E-2	-8.80001E1	-2.86102E-4	-8.80005E1	2.14577E-4	5.29289E-3	9.36031E-2	2.71363E1	-3.26404E1	-3.26032E1	2.6795E1	1.20226E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.9952E-1
1.2E1	5.3E1	0.0E0	4.85E2	3.23E2	-7.13915E-2	-8.80005E1	-3.57628E-4	-8.8E1	2.6226E-4	5.36442E-3	9.34124E-2	2.73299E1	-3.26585E1	-3.26496E1	2.67926E1	1.20004E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.9943E-1
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.13915E-2	-8.80006E1	-3.09944E-4	-8.80005E1	2.6226E-4	5.4121E-3	9.37223E-2	2.73718E1	-3.26823E1	-3.26309E1	2.68034E1	1.20226E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00041E-1
1.4E1	3.148E3	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80005E1	-3.09944E-4	-8.80003E1	1.43051E-4	5.03063E-3	9.36747E-2	2.75114E1	-3.26834E1	-3.2648E1	2.68047E1	1.20278E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.97704E-1
1.5E1	4.0E1	0.0E0	6.06E2	4.11E2	-7.13915E-2	-8.80004E1	-3.8147E-4	-8.80001E1	4.29153E-4	5.126E-3	9.39608E-2	2.73904E1	-3.26771E1	-3.26266E1	2.68112E1	1.20142E-7	2.52025E-3	2.52025E-3	6.29157E-3	2.99343E-1
1.6E1	2.92E2	1.0E0	6.47E2	4.41E2	-7.286E-2	-8.80008E1	-4.52995E-4	-8.79999E1	2.14577E-4	4.72069E-3	9.36747E-2	2.73429E1	-3.26903E1	-3.26098E1	2.68088E1	1.20122E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
1.7E1	3.1E2	0.0E0	6.87E2	4.7E2	-7.201E-2	-8.80005E1	-8.10623E-4	-8.79999E1	4.76837E-4	4.60148E-3	9.37939E-2	2.74024E1	-3.26711E1	-3.26609E1	2.67908E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02922E-1
1.8E1	1.204E3	1.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80003E1	-4.29153E-4	-8.79999E1	3.33786E-4	4.8399E-3	9.39846E-2	2.74142E1	-3.26714E1	-3.26054E1	2.68202E1	1.20011E-7	2.5208E-3	2.5208E-3	6.32099E-3	3.00637E-1
1.9E1	9.41E2	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80003E1	-5.96046E-4	-8.80004E1	2.86102E-4	4.64916E-3	9.39608E-2	2.71981E1	-3.26755E1	-3.26613E1	2.67814E1					
2.0E1	2.2851E4	2.0E1	8.08E2	5.58E2	-7.15461E-2	-8.80005E1	-5.96046E-4	-8.80003E1	1.66893E-4	4.36306E-3	9.3627E-2	2.72814E1	-3.26622E1	-3.26241E1	2.68331E1	1.1993E-7	2.51679E-3	2.51679E-3	6.30221E-3	2.97786E-1
2.1E1	4.2E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80005E1	-6.67572E-4	-8.80003E1	5.48363E-4	4.74453E-3	9.38416E-2	2.7373E1	-3.26657E1	-3.26188E1	2.68136E1	1.20262E-7	2.51725E-3	2.51725E-3	6.3131E-3	2.9917E-1
2.2E1	1.626E3	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80002E1	-3.09944E-4	-8.80001E1	3.33786E-4	4.57764E-3	9.40561E-2	2.73788E1	-3.2698E1	-3.26337E1	2.67794E1	1.19913E-7	2.51443E-3	2.51443E-3	6.28552E-3	2.99E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80002E1	-1.90735E-4	-8.80003E1	4.29153E-4	5.05447E-3	9.39131E-2	2.71907E1	-3.26284E1	-3.26874E1	2.6818E1	1.20363E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00197E-1