[Scan]
initial_time=2016-01-27T22:18:04
final_time=2016-01-27T22:18:23
ip_count=19
run=1025
dataset=5
scan=340
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.78728E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-7.49886E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=4.29738E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.20288E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=8.5541E-10
mult1=-1.67255E-8
mult2=-3.0636E-9
rf_tmon=-3.13812E-3
rf_agc=3.39099E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=4.03726E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64498E0
bslens_imon=2.52202E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19677E1
lens5a_imon=2.00315E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.04959E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53394E1
cs_ef1b_imon=2.75853E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04959E1
cs_ea1_imon=2.58432E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98641E0
lens1_imon=1.53099E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.99171E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03956E1
cs_ea2_imon=1.52674E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=2.90089E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=4.02892E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11394E1
os_restr1_imon=2.87422E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1517E1
os_ea1_imon=1.89697E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63888E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25623E0
cs_ionrep_imon=1.18484E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93647E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.88647E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=8.20291E-10
tplens_vset=1.4E-1
tplens_vmon=1.64084E0
tplens_imon=-3.87372E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25985E1
iondef3_imon=1.49807E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2738E1
iondef2_imon=1.56745E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98633E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=4.43065E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26154E0
ionrepsh_imon=1.7069E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33705E1
lens5b_imon=2.19286E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74796E1
cs_ef2b_imon=3.14272E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.30389E-1
os_ea2_imon=-4.58161E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00711E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.17731E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6354E0
os_ef2alow_imon=-2.38885E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.23543E-1
os_ef2bup_imon=-5.13147E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10649E1
os_restr2_imon=2.86233E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.27981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.24857E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72433E1
iondef1_imon=1.08573E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.12197E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=2.04411E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=3.75044E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-1.88429E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47525E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=1.50069E-1
window_imon=-1.18512E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39333E-4
mask2_vset=0.0E0
mask2_vmon=-1.86596E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.20112E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.36228E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.4418E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.45726E0
defgridb_imon=6.23132E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33893E1
os_fil1_imon=5.1186E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.43114E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62454E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30627E1
cs_fil1_imon=9.9696E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63621E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62716E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.2183E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.44005E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.23511E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29004E-1
cs_fil2_imon=-2.35963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.25985E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21598E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.46988E-1
res40_imon=-2.31317E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.506E3	0.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80006E1	-5.24521E-4	-8.80005E1	4.76837E-5	4.95911E-3	9.35793E-2	2.71954E1	-3.26826E1	-3.26101E1	2.67955E1	1.20158E-7	2.52169E-3	2.52169E-3	6.28592E-3	3.0148E-1
2.0E0	9.6589E4	7.8E1	3.16E2	1.6E2	-7.24736E-2	-8.80004E1	-3.09944E-4	-8.80001E1	1.43051E-4	4.55379E-3	9.35555E-2	2.74157E1	-3.26362E1	-3.26398E1	2.67995E1	1.20055E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.02511E-1
3.0E0	1.1E1	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80004E1	7.15256E-5	-8.80001E1	0.0E0	4.74453E-3	9.37939E-2	2.73311E1	-3.26891E1	-3.26178E1	2.68065E1	1.20191E-7	2.52027E-3	2.52027E-3	6.33538E-3	3.00144E-1
4.0E0	2.0951E4	1.0E1	6.55E2	3.98E2	-7.30918E-2	-8.80004E1	-2.86102E-4	-8.80002E1	-2.38419E-5	5.05447E-3	9.35078E-2	2.72337E1	-3.26779E1	-3.26266E1	2.67978E1	1.20158E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80005E1	-1.19209E-4	-8.80001E1	0.0E0	4.93526E-3	9.39131E-2	2.71717E1	-3.26536E1	-3.2626E1	2.68112E1	1.19851E-7	2.52061E-3	2.52061E-3	6.34518E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80007E1	-2.14577E-4	-8.80004E1	-1.19209E-4	4.55379E-3	9.3627E-2	2.72107E1	-3.26691E1	-3.26266E1	2.68214E1	1.20311E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80005E1	-1.90735E-4	-8.80002E1	0.0E0	5.126E-3	9.38892E-2	2.74505E1	-3.26699E1	-3.26278E1	2.68129E1	1.20517E-7	2.50882E-3	2.50882E-3	6.31817E-3	3.04063E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80007E1	-1.43051E-4	-8.80004E1	2.38419E-5	5.05447E-3	9.39131E-2	2.72302E1	-3.26844E1	-3.26083E1	2.68182E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01085E-1
1.2E1	6.0E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80007E1	4.76837E-5	-8.80002E1	1.90735E-4	4.95911E-3	9.37939E-2	2.7224E1	-3.26416E1	-3.26032E1	2.67896E1	1.20122E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.00302E-1
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80007E1	-3.8147E-4	-8.80002E1	-9.53674E-5	5.126E-3	9.39369E-2	2.7358E1	-3.26524E1	-3.26212E1	2.6795E1	1.20004E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.01223E-1
1.4E1	3.043E3	5.0E0	5.66E2	3.82E2	-7.23189E-2	-8.8001E1	-6.91414E-4	-8.80003E1	7.15256E-5	5.05447E-3	9.377E-2	2.72252E1	-3.26573E1	-3.2611E1	2.67818E1	1.20191E-7	2.51359E-3	2.51359E-3	6.3074E-3	2.99613E-1
1.5E1	3.5E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80008E1	-7.15256E-4	-8.80004E1	2.38419E-5	4.76837E-3	9.38416E-2	2.74181E1	-3.26915E1	-3.2653E1	2.6798E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.99175E-1
1.6E1	2.59E2	0.0E0	6.47E2	4.41E2	-7.16233E-2	-8.80007E1	-3.57628E-4	-8.80001E1	3.57628E-4	5.24521E-3	9.377E-2	2.72258E1	-3.26693E1	-3.26104E1	2.68148E1	1.19965E-7	2.52209E-3	2.52209E-3	6.34588E-3	3.00563E-1
1.7E1	3.14E2	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80007E1	-3.09944E-4	-8.80003E1	1.19209E-4	5.126E-3	9.35793E-2	2.74181E1	-3.26699E1	-3.26386E1	2.68454E1	1.20174E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00041E-1
1.8E1	1.266E3	2.0E0	7.27E2	5.0E2	-7.17007E-2	-8.80003E1	-2.86102E-4	-8.80004E1	0.0E0	4.76837E-3	9.40084E-2	2.71817E1	-3.26637E1	-3.27025E1	2.67891E1	1.19913E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.9978E-1
1.9E1	1.004E3	0.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80004E1	-4.29153E-4	-8.80004E1	2.86102E-4	4.95911E-3	9.39846E-2	2.74342E1	-3.26291E1	-3.26535E1	2.68119E1	1.20142E-7	2.52025E-3	2.52025E-3	6.34982E-3	3.00348E-1
2.0E1	2.2873E4	1.3E1	8.08E2	5.58E2	-7.201E-2	-8.80005E1	-2.38419E-4	-8.80002E1	3.09944E-4	5.00679E-3	9.39846E-2	2.73173E1	-3.26695E1	-3.26069E1	2.67902E1	1.20208E-7	2.51952E-3	2.51952E-3	6.31879E-3	3.00251E-1
2.1E1	5.7E1	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80005E1	-4.29153E-4	-8.80003E1	4.05312E-4	5.14984E-3	9.36031E-2	2.73033E1	-3.26561E1	-3.26044E1	2.68046E1	1.20158E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.0071E-1
2.2E1	1.682E3	1.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80005E1	-5.96046E-4	-8.80006E1	2.6226E-4	5.00679E-3	9.39846E-2	2.73511E1	-3.26714E1	-3.25476E1	2.67812E1	1.2033E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80005E1	-7.62939E-4	-8.80003E1	1.43051E-4	4.95911E-3	9.377E-2	2.72433E1	-3.2738E1	-3.25985E1	2.67992E1	1.20209E-7	2.51525E-3	2.51525E-3	6.28592E-3	2.9943E-1