[Scan]
initial_time=2016-01-27T22:20:17
final_time=2016-01-27T22:20:37
ip_count=19
run=1025
dataset=5
scan=345
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.7447E-6
ql1_vset=
ql1_vmon=-8.80006E1
ql1_imon=-7.37727E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=4.23276E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.08178E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=8.63409E-10
mult1=-1.84217E-8
mult2=-3.66476E-9
rf_tmon=-1.28098E-2
rf_agc=2.40328E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=4.52793E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65147E0
bslens_imon=2.52556E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19665E1
lens5a_imon=1.96209E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12457E2
lens4a_imon=2.05135E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53661E1
cs_ef1b_imon=2.74968E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02195E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05065E1
cs_ea1_imon=2.58609E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00823E0
lens1_imon=1.39295E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64562E1
os_ef1alow_imon=2.986E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03944E1
cs_ea2_imon=1.55258E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84296E1
cs_ef1a_imon=2.89494E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=4.45151E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=2.88104E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15335E1
os_ea1_imon=1.89059E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63745E1
os_ef1bup_imon=3.0913E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21316E0
cs_ionrep_imon=1.18484E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01838E1
cs_anode1_imon=2.89807E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=8.65614E-10
tplens_vset=1.4E-1
tplens_vmon=1.62905E0
tplens_imon=-2.63493E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25377E1
iondef3_imon=1.48569E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27894E1
iondef2_imon=1.58479E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98445E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=4.35245E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23145E0
ionrepsh_imon=1.74371E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33728E1
lens5b_imon=2.16844E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74611E1
cs_ef2b_imon=3.12188E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.06793E-1
os_ea2_imon=-5.46646E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00517E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71275E1
cs_ef2a_imon=3.19347E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62566E0
os_ef2alow_imon=-2.58501E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.47419E-1
os_ef2bup_imon=-5.2679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10816E1
os_restr2_imon=2.87653E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.30105E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01798E1
cs_anode2_imon=2.24125E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73808E1
iondef1_imon=1.09317E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68208E1
iondef4_imon=1.09754E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.07952E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=2.96712E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11103E0
cs_ionaccel_imon=-1.59456E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47292E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56341E1
einzel_imon=7.65656E-6
window_vset=0.0E0
window_vmon=2.15369E-1
window_imon=-9.89867E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39154E-4
mask2_vset=0.0E0
mask2_vmon=-1.86807E1
mask2_imon=-5.17233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.57984E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.80825E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.31792E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.45726E0
defgridb_imon=6.09682E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33835E1
os_fil1_imon=5.08063E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.55385E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61968E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30667E1
cs_fil1_imon=9.98082E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63745E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62222E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.23096E-2
os_fil2_imon=-2.37958E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.11859E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.55276E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29902E-1
cs_fil2_imon=-2.15369E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.00879E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21491E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.93379E-1
res40_imon=-2.36607E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=200
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.438E3	0.0E0	1.47E2	4.1E1	-7.14689E-2	-8.80008E1	-4.05312E-4	-8.80002E1	2.6226E-4	4.72069E-3	9.36747E-2	2.72495E1	-3.26527E1	-3.26376E1	2.68146E1	1.198E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.0071E-1
2.0E0	9.6016E4	9.6E1	3.16E2	1.6E2	-7.15461E-2	-8.80008E1	-3.57628E-4	-8.80003E1	3.09944E-4	4.64916E-3	9.37939E-2	2.73494E1	-3.26578E1	-3.26472E1	2.67808E1	1.20192E-7	2.52131E-3	2.52131E-3	6.3074E-3	2.99093E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.12368E-2	-8.80008E1	-6.19888E-4	-8.80003E1	2.6226E-4	4.98295E-3	9.40323E-2	2.73184E1	-3.26614E1	-3.26376E1	2.67989E1	1.19925E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.01475E-1
4.0E0	2.0299E4	5.0E0	6.55E2	3.98E2	-7.16233E-2	-8.80006E1	-3.57628E-4	-8.80005E1	6.19888E-4	5.03063E-3	9.38892E-2	2.73293E1	-3.26762E1	-3.26213E1	2.68148E1	1.2026E-7	2.51525E-3	2.51525E-3	6.33977E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.12368E-2	-8.80007E1	-3.8147E-4	-8.80003E1	5.00679E-4	4.88758E-3	9.37462E-2	2.72234E1	-3.2654E1	-3.2654E1	2.67981E1	1.20055E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80005E1	-3.8147E-4	-8.80004E1	4.52995E-4	4.57764E-3	9.39846E-2	2.73886E1	-3.26735E1	-3.26116E1	2.68022E1	1.20307E-7	2.52364E-3	2.52364E-3	6.32273E-3	3.00149E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80006E1	-7.62939E-4	-8.80003E1	5.48363E-4	4.673E-3	9.38416E-2	2.72991E1	-3.26518E1	-3.26422E1	2.68076E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80006E1	-4.52995E-4	-8.80001E1	4.05312E-4	5.17368E-3	9.35316E-2	2.71483E1	-3.26536E1	-3.26194E1	2.682E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01085E-1
1.2E1	5.2E1	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.80005E1	-3.8147E-4	-8.80005E1	3.09944E-4	5.17368E-3	9.36985E-2	2.74415E1	-3.26452E1	-3.259E1	2.68382E1	1.2026E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.00453E-1
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80005E1	-6.4373E-4	-8.80006E1	3.09944E-4	5.22137E-3	9.38416E-2	2.72805E1	-3.25996E1	-3.26615E1	2.68088E1	1.20297E-7	2.51804E-3	2.51804E-3	6.33538E-3	3.00942E-1
1.4E1	3.088E3	7.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80006E1	-8.34465E-4	-8.80002E1	3.09944E-4	5.45979E-3	9.38892E-2	2.72662E1	-3.26785E1	-3.25953E1	2.68094E1	1.19913E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00824E-1
1.5E1	3.6E1	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80008E1	-7.15256E-4	-8.80002E1	2.6226E-4	5.24521E-3	9.40323E-2	2.74625E1	-3.26867E1	-3.26446E1	2.68286E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00197E-1
1.6E1	2.62E2	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.8001E1	-7.15256E-4	-8.80002E1	1.19209E-4	5.43594E-3	9.37462E-2	2.72522E1	-3.26711E1	-3.25972E1	2.6819E1	1.20226E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00824E-1
1.7E1	3.3E2	0.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80012E1	-1.90735E-4	-8.80004E1	2.14577E-4	4.76837E-3	9.36747E-2	2.73129E1	-3.26675E1	-3.26428E1	2.67842E1	1.20363E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.02253E-1
1.8E1	1.309E3	0.0E0	7.27E2	5.0E2	-7.42513E-2	-8.8001E1	-2.14577E-4	-8.80004E1	1.90735E-4	4.93526E-3	9.34362E-2	2.72919E1	-3.26536E1	-3.26446E1	2.6789E1	1.20191E-7	2.51693E-3	2.51693E-3	6.34661E-3	3.00144E-1
1.9E1	9.87E2	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80008E1	-4.76837E-4	-8.80005E1	2.38419E-4	4.79221E-3	9.35316E-2	2.72588E1	-3.26639E1	-3.26254E1	2.6813E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
2.0E1	2.3038E4	1.1E1	8.08E2	5.58E2	-7.32464E-2	-8.8001E1	-6.91414E-4	-8.80001E1	4.29153E-4	4.55379E-3	9.32693E-2	2.72576E1	-3.26404E1	-3.26374E1	2.6789E1	1.19705E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9978E-1
2.1E1	3.4E1	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80009E1	-4.29153E-4	-8.80001E1	2.14577E-4	4.57764E-3	9.32932E-2	2.73652E1	-3.26837E1	-3.26543E1	2.67974E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9952E-1
2.2E1	1.596E3	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80008E1	-6.19888E-4	-8.80002E1	1.43051E-4	4.79221E-3	9.36031E-2	2.72396E1	-3.26886E1	-3.2593E1	2.67989E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00453E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80006E1	-2.86102E-4	-8.80003E1	2.14577E-4	4.76837E-3	9.36747E-2	2.73808E1	-3.27894E1	-3.25377E1	2.68208E1	1.20209E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.0071E-1