[Scan]
initial_time=2016-01-27T22:20:44
final_time=2016-01-27T22:21:03
ip_count=19
run=1025
dataset=5
scan=346
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.80686E-6
ql1_vset=
ql1_vmon=-8.80006E1
ql1_imon=-7.59304E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=4.02701E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.08468E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=8.83901E-10
mult1=-1.47516E-8
mult2=-2.72537E-9
rf_tmon=-8.53056E-3
rf_agc=2.79758E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=4.25899E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66398E0
bslens_imon=2.75659E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19891E1
lens5a_imon=1.9998E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05009E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5382E1
cs_ef1b_imon=2.76047E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02194E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05077E1
cs_ea1_imon=2.59984E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00729E0
lens1_imon=1.56569E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64563E1
os_ef1alow_imon=2.99906E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04027E1
cs_ea2_imon=1.52611E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83739E1
cs_ef1a_imon=2.89553E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=4.10318E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11227E1
os_restr1_imon=2.87996E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15204E1
os_ea1_imon=1.8914E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63616E1
os_ef1bup_imon=3.09832E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2381E0
cs_ionrep_imon=1.19441E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91851E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02029E1
cs_anode1_imon=2.90409E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=8.23772E-10
tplens_vset=1.4E-1
tplens_vmon=1.60454E0
tplens_imon=-1.02346E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.24725E1
iondef3_imon=1.49519E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27003E1
iondef2_imon=1.57879E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98395E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=4.20976E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.282E0
ionrepsh_imon=1.74101E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33588E1
lens5b_imon=2.17768E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74806E1
cs_ef2b_imon=3.12751E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.21505E-1
os_ea2_imon=-4.38243E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00741E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71108E1
cs_ef2a_imon=3.18511E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61764E0
os_ef2alow_imon=-2.50605E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.43364E-1
os_ef2bup_imon=-5.25011E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11059E1
os_restr2_imon=2.86789E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.31073E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01886E1
cs_anode2_imon=2.24746E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74729E1
iondef1_imon=1.0925E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68244E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.02038E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=3.36671E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11652E0
cs_ionaccel_imon=-1.59915E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.473E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56146E1
einzel_imon=7.73844E-6
window_vset=0.0E0
window_vmon=1.65974E-1
window_imon=-1.08537E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39158E-4
mask2_vset=0.0E0
mask2_vmon=-1.86805E1
mask2_imon=-6.18293E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.64237E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.24534E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.35991E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.56745E0
defgridb_imon=6.18045E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33823E1
os_fil1_imon=4.86632E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.36387E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6195E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30642E1
cs_fil1_imon=9.9697E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63767E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62315E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.30049E-2
os_fil2_imon=-2.34089E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.76731E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57413E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28673E-1
cs_fil2_imon=-2.37981E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24001E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21453E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31761E-3
inlet_lpb_pmon=2.97972E-1
chamber_ion_pmon=1.20404E-7
chamber_cvt_pmon=2.52568E-3
foreline_cvt_pmon=2.52568E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.01651E-1
res40_imon=-2.42042E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.531E3	5.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80011E1	-5.00679E-4	-8.80003E1	2.38419E-5	4.95911E-3	9.36031E-2	2.73139E1	-3.26691E1	-3.26236E1	2.68111E1	1.2006E-7	2.51874E-3	2.51874E-3	6.3016E-3	3.00087E-1
2.0E0	9.6461E4	1.0E2	3.16E2	1.6E2	-7.33239E-2	-8.80011E1	-7.39098E-4	-8.80004E1	4.05312E-4	5.10216E-3	9.33886E-2	2.73675E1	-3.26493E1	-3.2615E1	2.68013E1	1.20158E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.01223E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80007E1	-6.19888E-4	-8.80002E1	2.86102E-4	5.126E-3	9.377E-2	2.72599E1	-3.26538E1	-3.26393E1	2.68354E1	1.20031E-7	2.51693E-3	2.51693E-3	6.30182E-3	2.99879E-1
4.0E0	2.043E4	1.1E1	6.55E2	3.98E2	-7.21643E-2	-8.80009E1	-6.4373E-4	-8.80002E1	3.57628E-4	5.03063E-3	9.35793E-2	2.73039E1	-3.2647E1	-3.26086E1	2.67866E1	1.20293E-7	2.51709E-3	2.51709E-3	6.31798E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.8001E1	-5.00679E-4	-8.80001E1	4.76837E-4	5.05447E-3	9.36031E-2	2.72222E1	-3.26837E1	-3.26032E1	2.67938E1	1.20174E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80012E1	-5.72205E-4	-8.80004E1	2.14577E-4	4.55379E-3	9.36508E-2	2.74477E1	-3.26487E1	-3.26517E1	2.68208E1	1.20174E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.8001E1	-3.57628E-4	-8.80003E1	3.57628E-4	4.62532E-3	9.37223E-2	2.72703E1	-3.26661E1	-3.25971E1	2.68142E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80008E1	-4.05312E-4	-8.80003E1	4.52995E-4	4.98295E-3	9.377E-2	2.71814E1	-3.26542E1	-3.26334E1	2.67998E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9952E-1
1.2E1	3.9E1	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80008E1	-7.62939E-4	-8.80004E1	5.72205E-4	5.14984E-3	9.377E-2	2.74573E1	-3.26779E1	-3.2639E1	2.67962E1	1.20383E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02133E-1
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80008E1	-3.8147E-4	-8.80005E1	6.91414E-4	4.79221E-3	9.36985E-2	2.7442E1	-3.26461E1	-3.26567E1	2.68233E1	1.20069E-7	2.52209E-3	2.52209E-3	6.28006E-3	3.01347E-1
1.4E1	3.069E3	1.0E0	5.66E2	3.82E2	-7.30918E-2	-8.8001E1	-1.43051E-4	-8.80003E1	4.76837E-4	5.17368E-3	9.38416E-2	2.74425E1	-3.26685E1	-3.26071E1	2.68028E1	1.20311E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0148E-1
1.5E1	3.8E1	1.0E0	6.06E2	4.11E2	-7.17779E-2	-8.8001E1	-3.33786E-4	-8.80001E1	3.57628E-4	4.8399E-3	9.36747E-2	2.72829E1	-3.26639E1	-3.25846E1	2.67938E1	1.20142E-7	2.52236E-3	2.52236E-3	6.33388E-3	2.98842E-1
1.6E1	2.46E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.8001E1	-3.09944E-4	-8.8E1	5.24521E-4	4.88758E-3	9.40561E-2	2.72877E1	-3.26723E1	-3.26308E1	2.68196E1	1.20031E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.01475E-1
1.7E1	2.92E2	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80007E1	-1.90735E-4	-8.80001E1	4.76837E-4	4.86374E-3	9.38177E-2	2.72883E1	-3.26777E1	-3.26753E1	2.68007E1	1.19861E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00824E-1
1.8E1	1.206E3	0.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80007E1	-1.90735E-4	-8.80001E1	5.72205E-4	5.00679E-3	9.38416E-2	2.73482E1	-3.26785E1	-3.25924E1	2.6792E1	1.20311E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.02769E-1
1.9E1	1.016E3	0.0E0	7.68E2	5.29E2	-7.17007E-2	-8.80006E1	-5.00679E-4	-8.80002E1	6.19888E-4	5.38826E-3	9.36747E-2	2.7257E1	-3.26368E1	-3.26735E1	2.67926E1	1.20278E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.03449E-1
2.0E1	2.3013E4	1.2E1	8.08E2	5.58E2	-7.201E-2	-8.80006E1	-5.00679E-4	-8.80002E1	5.72205E-4	4.98295E-3	9.35555E-2	2.74013E1	-3.26602E1	-3.26296E1	2.68028E1	1.20226E-7	2.5188E-3	2.5188E-3	6.28006E-3	3.00302E-1
2.1E1	3.7E1	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80007E1	-4.05312E-4	-8.8E1	5.24521E-4	4.91142E-3	9.34839E-2	2.72498E1	-3.2653E1	-3.26248E1	2.68148E1	1.20363E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.99941E-1
2.2E1	1.648E3	1.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80007E1	-2.38419E-4	-8.80005E1	4.05312E-4	4.98295E-3	9.37939E-2	2.73275E1	-3.26316E1	-3.26378E1	2.67953E1	1.20174E-7	2.51116E-3	2.51116E-3	6.3074E-3	2.98222E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80006E1	-3.57628E-4	-8.80002E1	9.53674E-5	5.126E-3	9.35078E-2	2.74729E1	-3.27003E1	-3.24725E1	2.68244E1	1.20404E-7	2.52568E-3	2.52568E-3	6.31761E-3	2.97972E-1