[Scan]
initial_time=2016-01-27T22:21:37
final_time=2016-01-27T22:21:57
ip_count=19
run=1025
dataset=5
scan=348
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.79358E-6
ql1_vset=
ql1_vmon=-8.80008E1
ql1_imon=-7.39384E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=4.17376E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.08251E-9
ql4_vset=
ql4_vmon=5.96046E-4
ql4_imon=8.69095E-10
mult1=-2.05408E-8
mult2=-2.58886E-9
rf_tmon=-1.70657E-3
rf_agc=3.7275E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=4.07398E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63384E0
bslens_imon=2.15228E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19816E1
lens5a_imon=2.01938E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.04686E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53632E1
cs_ef1b_imon=2.7462E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02017E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0544E1
cs_ea1_imon=2.57835E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98962E0
lens1_imon=1.37013E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64811E1
os_ef1alow_imon=2.9919E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0376E1
cs_ea2_imon=1.53549E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=2.89286E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=4.20976E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11309E1
os_restr1_imon=2.88417E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15242E1
os_ea1_imon=1.89423E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6378E1
os_ef1bup_imon=3.07983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25499E0
cs_ionrep_imon=1.18683E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91911E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0196E1
cs_anode1_imon=2.89494E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=8.0018E-10
tplens_vset=1.4E-1
tplens_vmon=1.64027E0
tplens_imon=-4.23588E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27275E1
iondef3_imon=1.49656E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26176E1
iondef2_imon=1.57547E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98447E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=4.668E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22719E0
ionrepsh_imon=1.7531E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3444E1
lens5b_imon=2.18554E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74698E1
cs_ef2b_imon=3.12744E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.80268E-1
os_ea2_imon=-5.27874E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06194E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71235E1
cs_ef2a_imon=3.19694E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60654E0
os_ef2alow_imon=-2.58848E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.24251E-1
os_ef2bup_imon=-5.12542E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10874E1
os_restr2_imon=2.86818E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23006E2
cs_ionfoca_imon=6.2965E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01607E1
cs_anode2_imon=2.23743E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7263E1
iondef1_imon=1.07524E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.0687E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.04562E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=3.55649E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1452E0
cs_ionaccel_imon=-1.74052E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47306E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56457E1
einzel_imon=7.7643E-6
window_vset=0.0E0
window_vmon=2.5823E-1
window_imon=-9.82917E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.3906E-4
mask2_vset=0.0E0
mask2_vmon=-1.86819E1
mask2_imon=-5.97163E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=6.8973E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.15339E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.19625E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.57791E0
defgridb_imon=6.48363E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33851E1
os_fil1_imon=4.18285E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.68707E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6192E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30639E1
cs_fil1_imon=9.95725E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63941E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61916E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.32707E-2
os_fil2_imon=-2.41433E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.46612E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.61595E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31774E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.07602E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21405E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.32766E-1
res40_imon=-2.43905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.507E3	1.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80008E1	-1.66893E-4	-8.80001E1	4.76837E-4	5.10216E-3	9.36747E-2	2.74577E1	-3.26669E1	-3.26302E1	2.68226E1	1.20127E-7	2.51679E-3	2.51679E-3	6.31779E-3	3.00741E-1
2.0E0	9.8188E4	8.9E1	3.16E2	1.6E2	-7.26282E-2	-8.80009E1	-5.24521E-4	-8.8E1	5.00679E-4	5.03063E-3	9.36508E-2	2.72998E1	-3.26431E1	-3.26443E1	2.68166E1	1.20457E-7	2.5147E-3	2.5147E-3	6.31299E-3	2.99879E-1
3.0E0	2.5E1	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80009E1	-3.09944E-4	-8.8E1	4.76837E-4	5.03063E-3	9.38892E-2	2.72673E1	-3.26638E1	-3.26278E1	2.68088E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99941E-1
4.0E0	2.0836E4	1.1E1	6.55E2	3.98E2	-7.19325E-2	-8.80008E1	-1.43051E-4	-8.80003E1	1.43051E-4	4.98295E-3	9.408E-2	2.74199E1	-3.26843E1	-3.26254E1	2.68034E1	1.20158E-7	2.52169E-3	2.52169E-3	6.34518E-3	3.01738E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.13915E-2	-8.8001E1	-1.66893E-4	-8.80002E1	1.66893E-4	5.03063E-3	9.41515E-2	2.72048E1	-3.26344E1	-3.26278E1	2.68034E1	1.20158E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.13143E-2	-8.8001E1	-5.24521E-4	-8.80003E1	3.8147E-4	4.95911E-3	9.41515E-2	2.74107E1	-3.26685E1	-3.26195E1	2.68082E1	1.19809E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80007E1	-5.72205E-4	-8.80005E1	3.33786E-4	5.05447E-3	9.37223E-2	2.72648E1	-3.26554E1	-3.26224E1	2.68094E1	1.20004E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.98665E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.8001E1	-5.48363E-4	-8.80006E1	9.53674E-5	4.52995E-3	9.36747E-2	2.7376E1	-3.26597E1	-3.26885E1	2.68059E1	1.19925E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.01742E-1
1.2E1	5.3E1	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80005E1	-5.72205E-4	-8.80005E1	1.90735E-4	4.81606E-3	9.36508E-2	2.72555E1	-3.2659E1	-3.26124E1	2.68316E1	1.2026E-7	2.52169E-3	2.52169E-3	6.28056E-3	3.0148E-1
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80007E1	-5.48363E-4	-8.80004E1	6.91414E-4	4.86374E-3	9.36747E-2	2.72739E1	-3.26296E1	-3.262E1	2.67884E1	1.20174E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.01085E-1
1.4E1	3.161E3	2.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80005E1	-7.86781E-4	-8.80004E1	3.8147E-4	4.88758E-3	9.37939E-2	2.73562E1	-3.26609E1	-3.26248E1	2.68154E1	1.19757E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01347E-1
1.5E1	5.3E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80007E1	-5.96046E-4	-8.79999E1	5.24521E-4	4.88758E-3	9.35793E-2	2.73207E1	-3.26645E1	-3.26086E1	2.68184E1	1.20383E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00302E-1
1.6E1	2.86E2	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80008E1	-8.34465E-4	-8.80002E1	3.57628E-4	5.126E-3	9.37223E-2	2.72432E1	-3.26615E1	-3.26476E1	2.68094E1	1.2033E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00824E-1
1.7E1	2.74E2	1.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80005E1	-6.67572E-4	-8.80002E1	6.67572E-4	4.81606E-3	9.3627E-2	2.73075E1	-3.26514E1	-3.26667E1	2.68028E1	1.19965E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.02396E-1
1.8E1	1.285E3	0.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80006E1	-5.48363E-4	-8.80003E1	5.00679E-4	5.126E-3	9.35555E-2	2.73167E1	-3.26758E1	-3.26561E1	2.68173E1	1.20004E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.99686E-1
1.9E1	1.058E3	1.0E0	7.68E2	5.29E2	-7.26282E-2	-8.8001E1	-9.29832E-4	-8.80003E1	3.57628E-4	4.93526E-3	9.35793E-2	2.73197E1	-3.26362E1	-3.26101E1	2.68203E1	1.19831E-7	2.51472E-3	2.51472E-3	6.3074E-3	3.00741E-1
2.0E1	2.3574E4	1.8E1	8.08E2	5.58E2	-7.22418E-2	-8.80007E1	-4.05312E-4	-8.80005E1	1.19209E-4	5.14984E-3	9.36747E-2	2.7358E1	-3.26867E1	-3.26254E1	2.681E1	1.20116E-7	2.51758E-3	2.51758E-3	6.31321E-3	3.01193E-1
2.1E1	4.8E1	1.0E0	8.49E2	5.88E2	-7.15461E-2	-8.80009E1	-7.39098E-4	-8.80005E1	3.33786E-4	4.60148E-3	9.35793E-2	2.7301E1	-3.26832E1	-3.26142E1	2.6828E1	1.20278E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00824E-1
2.2E1	1.624E3	1.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80009E1	-9.05991E-4	-8.80001E1	2.6226E-4	4.43459E-3	9.36985E-2	2.72721E1	-3.26419E1	-3.26443E1	2.67752E1	1.2033E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00824E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80008E1	-7.15256E-4	-8.8E1	5.96046E-4	4.86374E-3	9.38892E-2	2.7263E1	-3.26176E1	-3.27275E1	2.68178E1	1.20004E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.0071E-1