[Scan]
initial_time=2016-01-27T22:22:04
final_time=2016-01-27T22:22:23
ip_count=19
run=1025
dataset=5
scan=349
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.78606E-6
ql1_vset=
ql1_vmon=-8.80006E1
ql1_imon=-7.24733E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=4.30977E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.00195E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=8.46064E-10
mult1=-2.3709E-8
mult2=-2.76441E-9
rf_tmon=7.05254E-4
rf_agc=4.01107E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=3.9084E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66798E0
bslens_imon=2.51848E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19913E1
lens5a_imon=1.99041E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05065E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53712E1
cs_ef1b_imon=2.7506E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02075E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04846E1
cs_ea1_imon=2.57051E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98877E0
lens1_imon=1.52037E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03997E1
cs_ea2_imon=1.52002E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84562E1
cs_ef1a_imon=2.89332E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=3.87168E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11592E1
os_restr1_imon=2.86737E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15176E1
os_ea1_imon=1.8775E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24207E0
cs_ionrep_imon=1.17953E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93317E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01707E1
cs_anode1_imon=2.89548E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=7.64442E-10
tplens_vset=1.4E-1
tplens_vmon=1.63022E0
tplens_imon=-2.67032E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27835E1
iondef3_imon=1.5002E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26201E1
iondef2_imon=1.57028E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.9841E-4
ql6_vset=1.0E-1
ql6_vmon=9.41277E-2
ql6_imon=4.27699E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22614E0
ionrepsh_imon=1.7292E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.18366E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.16821E-1
os_ea2_imon=-6.49289E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00577E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.18056E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62098E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.35556E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=2.86197E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.30636E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.23812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71936E1
iondef1_imon=1.0921E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6768E1
iondef4_imon=1.08449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.04459E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=3.32916E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13855E0
cs_ionaccel_imon=-1.72212E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=2.07131E-1
window_imon=-1.04097E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86638E1
mask2_imon=-7.31025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.29314E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.62774E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.10202E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.51927E0
defgridb_imon=6.05435E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3385E1
os_fil1_imon=5.2988E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.72547E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61965E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30681E1
cs_fil1_imon=9.95933E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63705E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62272E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16765E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.7582E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.36546E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.4257E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22031E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21648E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28552E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.70705E-1
res40_imon=-2.48976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.483E3	3.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80006E1	-4.76837E-4	-8.80001E1	4.76837E-5	5.05447E-3	9.39131E-2	2.72949E1	-3.26711E1	-3.26104E1	2.67836E1	1.20055E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.9892E-1
2.0E0	9.7836E4	7.4E1	3.16E2	1.6E2	-7.26282E-2	-8.80006E1	-5.48363E-4	-8.80001E1	1.66893E-4	5.38826E-3	9.38892E-2	2.72451E1	-3.26664E1	-3.26744E1	2.68058E1	1.20226E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00824E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80006E1	-7.39098E-4	-8.80002E1	4.76837E-5	5.03063E-3	9.39846E-2	2.73104E1	-3.26573E1	-3.26006E1	2.68052E1	1.20084E-7	2.52362E-3	2.52362E-3	6.33538E-3	3.01475E-1
4.0E0	2.1124E4	6.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80005E1	-5.72205E-4	-8.80004E1	1.19209E-4	4.95911E-3	9.39608E-2	2.73004E1	-3.26909E1	-3.26236E1	2.6807E1	1.20243E-7	2.51603E-3	2.51603E-3	6.2863E-3	3.03129E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80005E1	-5.72205E-4	-8.80001E1	-4.76837E-5	4.79221E-3	9.37939E-2	2.73057E1	-3.26699E1	-3.26344E1	2.68244E1	1.19705E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.02659E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80007E1	-7.62939E-4	-8.80004E1	3.33786E-4	4.673E-3	9.36747E-2	2.73381E1	-3.26573E1	-3.26645E1	2.6804E1	1.19861E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80009E1	-5.96046E-4	-8.80002E1	3.8147E-4	4.673E-3	9.36747E-2	2.73387E1	-3.26573E1	-3.26201E1	2.6795E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80007E1	-6.91414E-4	-8.80001E1	2.6226E-4	4.79221E-3	9.37939E-2	2.72979E1	-3.26585E1	-3.26188E1	2.6798E1	1.19809E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00824E-1
1.2E1	4.9E1	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80005E1	-9.53674E-4	-8.8E1	2.86102E-4	4.60148E-3	9.37223E-2	2.73234E1	-3.2668E1	-3.26038E1	2.6793E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00302E-1
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80007E1	-4.05312E-4	-8.80002E1	2.6226E-4	4.93526E-3	9.36031E-2	2.71948E1	-3.26467E1	-3.26844E1	2.68154E1	1.20136E-7	2.52044E-3	2.52044E-3	6.31754E-3	3.01318E-1
1.4E1	3.217E3	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80008E1	-6.67572E-4	-8.80004E1	1.66893E-4	4.93526E-3	9.37223E-2	2.75209E1	-3.2686E1	-3.2553E1	2.68451E1					
1.5E1	3.5E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80007E1	-4.52995E-4	-8.80001E1	4.29153E-4	5.126E-3	9.38416E-2	2.72414E1	-3.26675E1	-3.26182E1	2.68106E1	1.19824E-7	2.52835E-3	2.52835E-3	6.34982E-3	2.99929E-1
1.6E1	3.0E2	0.0E0	6.47E2	4.41E2	-7.12368E-2	-8.80007E1	-5.00679E-4	-8.8E1	1.19209E-4	4.95911E-3	9.39846E-2	2.73906E1	-3.2662E1	-3.26254E1	2.67966E1	1.20106E-7	2.52599E-3	2.52599E-3	6.33977E-3	2.97394E-1
1.7E1	2.9E2	0.0E0	6.87E2	4.7E2	-7.17007E-2	-8.80007E1	-5.00679E-4	-8.80003E1	2.38419E-4	5.03063E-3	9.37939E-2	2.72618E1	-3.26723E1	-3.25882E1	2.68026E1	1.198E-7	2.52492E-3	2.52492E-3	6.30202E-3	2.97901E-1
1.8E1	1.221E3	0.0E0	7.27E2	5.0E2	-7.201E-2	-8.80006E1	-4.29153E-4	-8.80003E1	2.38419E-4	5.38826E-3	9.377E-2	2.72522E1	-3.26807E1	-3.26278E1	2.68123E1	1.20383E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.97963E-1
1.9E1	1.011E3	1.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80006E1	-8.58307E-4	-8.80002E1	1.90735E-4	5.07832E-3	9.34839E-2	2.73446E1	-3.26579E1	-3.25989E1	2.68148E1	1.20122E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9952E-1
2.0E1	2.3462E4	1.8E1	8.08E2	5.58E2	-7.19325E-2	-8.80008E1	-3.09944E-4	-8.8E1	4.05312E-4	5.126E-3	9.41753E-2	2.72587E1	-3.2659E1	-3.26666E1	2.68186E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.9943E-1
2.1E1	4.6E1	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80004E1	-3.8147E-4	-8.80004E1	5.00679E-4	5.22137E-3	9.41277E-2	2.7229E1	-3.26644E1	-3.26207E1	2.67879E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0071E-1
2.2E1	1.578E3	2.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80005E1	-2.14577E-4	-8.80002E1	2.14577E-4	5.126E-3	9.39131E-2	2.72721E1	-3.26362E1	-3.25966E1	2.68094E1	1.19941E-7	2.51709E-3	2.51709E-3	6.29157E-3	3.00852E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80006E1	-4.52995E-4	-8.80002E1	4.05312E-4	5.14984E-3	9.41277E-2	2.71936E1	-3.26201E1	-3.27835E1	2.6768E1	1.20017E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.01085E-1