[Scan]
initial_time=2016-01-27T22:22:31
final_time=2016-01-27T22:22:50
ip_count=19
run=1025
dataset=5
scan=350
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.201E-2
qbias_imon=-3.79153E-6
ql1_vset=
ql1_vmon=-8.80008E1
ql1_imon=-7.19237E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=4.17423E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.9564E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=8.57949E-10
mult1=-1.74081E-8
mult2=-1.92758E-9
rf_tmon=-8.68598E-3
rf_agc=2.90795E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=4.23145E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67335E0
bslens_imon=2.51973E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19971E1
lens5a_imon=1.98884E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05078E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=2.7607E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02085E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=2.58834E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01011E0
lens1_imon=1.37335E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.99567E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04033E1
cs_ea2_imon=1.52741E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84616E1
cs_ef1a_imon=2.90377E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=4.0586E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=2.86701E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15462E1
os_ea1_imon=1.87384E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.0919E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21725E0
cs_ionrep_imon=1.18061E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93362E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=2.89657E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=8.02517E-10
tplens_vset=1.4E-1
tplens_vmon=1.60598E0
tplens_imon=-2.05617E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.48631E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25599E1
iondef2_imon=1.57463E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.9849E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=4.3422E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.36625E0
ionrepsh_imon=1.7556E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33904E1
lens5b_imon=2.1644E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.39707E-1
os_ea2_imon=-4.97618E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71384E1
cs_ef2a_imon=3.18993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62218E0
os_ef2alow_imon=-2.45372E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.20539E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=2.858E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.31334E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.24028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71918E1
iondef1_imon=1.09012E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6785E1
iondef4_imon=1.09566E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.02212E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=3.58665E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11693E0
cs_ionaccel_imon=-1.77257E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47179E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=1.8731E-1
window_imon=-8.64372E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.87041E1
mask2_imon=-7.45441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.57027E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.60774E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.13407E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.5517E0
defgridb_imon=6.08142E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33863E1
os_fil1_imon=4.6621E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.21491E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62088E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30676E1
cs_fil1_imon=9.96732E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63369E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62321E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09261E-2
os_fil2_imon=-2.61191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.25985E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.36865E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22632E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21544E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28511E-3
inlet_lpb_pmon=3.00676E-1
chamber_ion_pmon=1.19925E-7
chamber_cvt_pmon=2.51359E-3
foreline_cvt_pmon=2.51359E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.83318E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.395E3	1.0E0	1.47E2	4.1E1	-7.201E-2	-8.80013E1	-5.48363E-4	-8.80003E1	2.86102E-4	4.88758E-3	9.36508E-2	2.7367E1	-3.26779E1	-3.2682E1	2.68029E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02396E-1
2.0E0	9.8071E4	1.01E2	3.16E2	1.6E2	-7.22418E-2	-8.80012E1	-8.82149E-4	-8.80004E1	7.15256E-5	4.79221E-3	9.38416E-2	2.72757E1	-3.26585E1	-3.26383E1	2.67951E1	1.19757E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9978E-1
3.0E0	1.5E1	1.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80012E1	-8.34465E-4	-8.80002E1	1.19209E-4	4.88758E-3	9.38416E-2	2.74511E1	-3.26498E1	-3.26237E1	2.68221E1	1.20122E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00302E-1
4.0E0	2.1013E4	1.0E1	6.55E2	3.98E2	-7.21643E-2	-8.80012E1	-8.82149E-4	-8.80002E1	1.43051E-4	5.00679E-3	9.377E-2	2.71562E1	-3.26596E1	-3.26411E1	2.67984E1	1.20106E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.13915E-2	-8.80011E1	-6.19888E-4	-8.80002E1	1.43051E-4	4.91142E-3	9.37223E-2	2.73832E1	-3.26549E1	-3.26422E1	2.67866E1	1.20276E-7	2.51886E-3	2.51886E-3	6.3074E-3	3.01237E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.11597E-2	-8.8001E1	-3.8147E-4	-8.80003E1	0.0E0	4.52995E-3	9.37223E-2	2.7298E1	-3.26467E1	-3.26555E1	2.68111E1	1.20403E-7	2.51359E-3	2.51359E-3	6.34661E-3	3.0201E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80008E1	-4.52995E-4	-8.80005E1	5.00679E-4	5.126E-3	9.38416E-2	2.73387E1	-3.26556E1	-3.26095E1	2.67931E1	1.20142E-7	2.51709E-3	2.51709E-3	6.33388E-3	3.00348E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.80007E1	-5.24521E-4	-8.80001E1	2.14577E-4	4.81606E-3	9.35555E-2	2.72455E1	-3.26508E1	-3.26437E1	2.68112E1	1.20276E-7	2.51886E-3	2.51886E-3	6.3126E-3	2.99014E-1
1.2E1	4.5E1	0.0E0	4.85E2	3.23E2	-7.11597E-2	-8.80007E1	-7.62939E-4	-8.8E1	1.90735E-4	4.91142E-3	9.35555E-2	2.72766E1	-3.26511E1	-3.26323E1	2.6807E1	1.20209E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.97901E-1
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.13915E-2	-8.80011E1	-6.67572E-4	-8.8E1	2.14577E-4	5.126E-3	9.35793E-2	2.73305E1	-3.26708E1	-3.26113E1	2.68001E1	1.20042E-7	2.51393E-3	2.51393E-3	6.32328E-3	2.99845E-1
1.4E1	3.26E3	1.0E0	5.66E2	3.82E2	-7.08504E-2	-8.80012E1	-7.86781E-4	-8.80001E1	3.09944E-4	4.98295E-3	9.38177E-2	2.73187E1	-3.26579E1	-3.26402E1	2.68082E1	1.20192E-7	2.51919E-3	2.51919E-3	6.32328E-3	3.01609E-1
1.5E1	4.1E1	0.0E0	6.06E2	4.11E2	-7.06958E-2	-8.80011E1	-7.86781E-4	-8.8E1	1.43051E-4	4.8399E-3	9.40084E-2	2.73068E1	-3.26654E1	-3.26133E1	2.68011E1	1.20106E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.01995E-1
1.6E1	2.8E2	0.0E0	6.47E2	4.41E2	-7.00005E-2	-8.80007E1	-5.24521E-4	-8.80002E1	1.19209E-4	4.74453E-3	9.36747E-2	2.73363E1	-3.27031E1	-3.26174E1	2.68058E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.9892E-1
1.7E1	2.9E2	0.0E0	6.87E2	4.7E2	-7.02322E-2	-8.80009E1	-5.24521E-4	-8.80002E1	3.09944E-4	4.8399E-3	9.36747E-2	2.72745E1	-3.26639E1	-3.26561E1	2.68346E1	1.20031E-7	2.5225E-3	2.5225E-3	6.31858E-3	2.98819E-1
1.8E1	1.348E3	1.0E0	7.27E2	5.0E2	-7.10825E-2	-8.80007E1	-5.00679E-4	-8.80003E1	3.33786E-4	4.55379E-3	9.37939E-2	2.72865E1	-3.26705E1	-3.25761E1	2.67908E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.98222E-1
1.9E1	9.9E2	0.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80007E1	-3.09944E-4	-8.80004E1	4.29153E-4	4.88758E-3	9.3627E-2	2.73339E1	-3.26627E1	-3.26536E1	2.68082E1	1.20158E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.0071E-1
2.0E1	2.3331E4	8.0E0	8.08E2	5.58E2	-7.201E-2	-8.80009E1	-2.38419E-4	-8.80003E1	4.52995E-4	4.81606E-3	9.3627E-2	2.72769E1	-3.26759E1	-3.26134E1	2.68124E1	1.20244E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.0041E-1
2.1E1	4.7E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80009E1	-2.86102E-4	-8.80005E1	2.86102E-4	5.03063E-3	9.39131E-2	2.73741E1	-3.26708E1	-3.26891E1	2.68124E1	1.20106E-7	2.50882E-3	2.50882E-3	6.30202E-3	3.01738E-1
2.2E1	1.638E3	1.0E0	8.89E2	6.17E2	-7.13143E-2	-8.80009E1	-7.39098E-4	-8.80008E1	1.90735E-4	5.14984E-3	9.36031E-2	2.7321E1	-3.26719E1	-3.26064E1	2.67842E1	1.20158E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.201E-2	-8.80008E1	-5.72205E-4	-8.80004E1	3.33786E-4	4.86374E-3	9.377E-2	2.71918E1	-3.25599E1	-3.26278E1	2.6785E1	1.19925E-7	2.51359E-3	2.51359E-3	6.28511E-3	3.00676E-1