[Scan]
initial_time=2016-01-27T22:23:50
final_time=2016-01-27T22:24:10
ip_count=19
run=1025
dataset=5
scan=353
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.73159E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.83141E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=4.25375E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.00593E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=8.79943E-10
mult1=-1.18234E-8
mult2=-2.4192E-9
rf_tmon=-7.61268E-3
rf_agc=2.82866E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=4.16481E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65088E0
bslens_imon=2.34505E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19913E1
lens5a_imon=1.99536E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05008E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5385E1
cs_ef1b_imon=2.74952E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04787E1
cs_ea1_imon=2.57936E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99939E0
lens1_imon=1.308E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.98594E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03938E1
cs_ea2_imon=1.5232E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=2.89368E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=4.2212E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=2.87782E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=1.869E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23558E0
cs_ionrep_imon=1.16572E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93505E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=2.89621E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=7.99656E-10
tplens_vset=1.4E-1
tplens_vmon=1.64674E0
tplens_imon=-1.75008E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.24692E1
iondef3_imon=1.48781E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2653E1
iondef2_imon=1.57453E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98477E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=4.07922E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24502E0
ionrepsh_imon=1.71646E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.18012E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.92635E-1
os_ea2_imon=-7.09459E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00545E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.18524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61978E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.25945E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10727E1
os_restr2_imon=2.8717E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.30388E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.24281E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74235E1
iondef1_imon=1.09635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68065E1
iondef4_imon=1.08521E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.01329E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=3.71778E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-1.78699E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47277E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=1.63283E-1
window_imon=-1.00132E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86855E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.65063E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.6242E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.4595E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.51337E0
defgridb_imon=6.10036E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33804E1
os_fil1_imon=4.43385E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.37708E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61974E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3068E1
cs_fil1_imon=9.96606E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62936E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62092E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.117E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.47899E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.34142E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.3296E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68031E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21554E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.16955E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.514E3	2.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80009E1	-5.00679E-4	-8.80003E1	1.19209E-4	4.50611E-3	9.38654E-2	2.72379E1	-3.26531E1	-3.25995E1	2.68099E1	1.20106E-7	2.51203E-3	2.51203E-3	6.31817E-3	2.9841E-1
2.0E0	9.8E4	8.3E1	3.16E2	1.6E2	-7.22418E-2	-8.80008E1	-4.05312E-4	-8.80002E1	1.90735E-4	4.60148E-3	9.377E-2	2.7365E1	-3.26691E1	-3.26035E1	2.68113E1	1.19809E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01609E-1
3.0E0	1.3E1	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80008E1	-8.34465E-4	-8.80002E1	5.00679E-4	4.3869E-3	9.36508E-2	2.7162E1	-3.26718E1	-3.26324E1	2.6807E1	1.19978E-7	2.52139E-3	2.52139E-3	6.32978E-3	3.01742E-1
4.0E0	2.1137E4	1.6E1	6.55E2	3.98E2	-7.20871E-2	-8.80008E1	-7.15256E-4	-8.80002E1	3.09944E-4	4.48227E-3	9.38177E-2	2.70612E1	-3.26687E1	-3.26452E1	2.67944E1	1.19941E-7	2.51919E-3	2.51919E-3	6.2863E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.14689E-2	-8.80009E1	-7.15256E-4	-8.80004E1	1.66893E-4	4.45843E-3	9.37223E-2	2.7382E1	-3.2653E1	-3.2653E1	2.68106E1	1.20226E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80012E1	-2.6226E-4	-8.80005E1	2.14577E-4	4.98295E-3	9.35316E-2	2.73181E1	-3.26661E1	-3.25983E1	2.67956E1	1.19965E-7	2.51662E-3	2.51662E-3	6.28552E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80011E1	-4.52995E-4	-8.80003E1	9.53674E-5	4.79221E-3	9.37462E-2	2.72485E1	-3.26773E1	-3.26071E1	2.68123E1	1.20209E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.99175E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80009E1	-3.8147E-4	-8.80003E1	1.19209E-4	4.673E-3	9.37223E-2	2.71559E1	-3.26496E1	-3.26136E1	2.68274E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01223E-1
1.2E1	5.1E1	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80009E1	-6.91414E-4	-8.80003E1	3.09944E-4	4.91142E-3	9.38177E-2	2.71675E1	-3.26723E1	-3.26188E1	2.68436E1	1.20069E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.00563E-1
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80012E1	-6.67572E-4	-8.80007E1	5.48363E-4	4.86374E-3	9.37223E-2	2.73478E1	-3.26657E1	-3.26194E1	2.68118E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01738E-1
1.4E1	3.175E3	1.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80013E1	-4.29153E-4	-8.80007E1	3.8147E-4	4.673E-3	9.39846E-2	2.74787E1	-3.26591E1	-3.26344E1	2.68094E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00824E-1
1.5E1	3.9E1	0.0E0	6.06E2	4.11E2	-7.17779E-2	-8.80013E1	-8.34465E-4	-8.80006E1	2.14577E-4	4.72069E-3	9.36747E-2	2.71635E1	-3.26797E1	-3.26242E1	2.68047E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00563E-1
1.6E1	2.8E2	0.0E0	6.47E2	4.41E2	-7.16233E-2	-8.80012E1	-6.91414E-4	-8.80005E1	2.38419E-4	4.76837E-3	9.377E-2	2.70769E1	-3.26596E1	-3.26338E1	2.68289E1	1.19998E-7	2.51564E-3	2.51564E-3	6.31541E-3	3.004E-1
1.7E1	3.09E2	0.0E0	6.87E2	4.7E2	-7.11597E-2	-8.80011E1	-5.00679E-4	-8.80004E1	4.29153E-4	4.43459E-3	9.377E-2	2.71247E1	-3.26546E1	-3.2628E1	2.68179E1					
1.8E1	1.267E3	1.0E0	7.27E2	5.0E2	-7.13143E-2	-8.80012E1	-6.4373E-4	-8.80004E1	4.52995E-4	4.33922E-3	9.3627E-2	2.73598E1	-3.26651E1	-3.2644E1	2.6822E1	1.20171E-7	2.51642E-3	2.51642E-3	6.31902E-3	2.98435E-1
1.9E1	1.02E3	0.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80014E1	-4.29153E-4	-8.80005E1	4.52995E-4	4.50611E-3	9.37939E-2	2.72402E1	-3.26638E1	-3.26402E1	2.67902E1	1.20466E-7	2.52061E-3	2.52061E-3	6.33977E-3	2.97647E-1
2.0E1	2.3542E4	1.4E1	8.08E2	5.58E2	-7.24736E-2	-8.80013E1	-2.86102E-4	-8.80002E1	1.90735E-4	4.72069E-3	9.37462E-2	2.72641E1	-3.26698E1	-3.26232E1	2.68222E1	1.20017E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.01085E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80011E1	-5.96046E-4	-8.80003E1	3.57628E-4	4.64916E-3	9.377E-2	2.73605E1	-3.26803E1	-3.26101E1	2.68034E1	1.20258E-7	2.5216E-3	2.5216E-3	6.28703E-3	3.01365E-1
2.2E1	1.567E3	2.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80013E1	-5.00679E-4	-8.80002E1	4.29153E-4	4.81606E-3	9.38892E-2	2.71982E1	-3.26687E1	-3.26278E1	2.6801E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01871E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80012E1	-4.76837E-4	-8.80002E1	1.19209E-4	4.93526E-3	9.36508E-2	2.74235E1	-3.2653E1	-3.24692E1	2.68065E1	1.20055E-7	2.51632E-3	2.51632E-3	6.33977E-3	2.9943E-1