[Scan]
initial_time=2016-01-27T22:24:17
final_time=2016-01-27T22:24:37
ip_count=19
run=1025
dataset=5
scan=354
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.7949E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-7.01213E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=4.58622E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.01235E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=8.66127E-10
mult1=-2.14438E-8
mult2=-3.39728E-9
rf_tmon=2.03057E-3
rf_agc=4.33133E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=4.02761E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63309E0
bslens_imon=2.61346E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19863E1
lens5a_imon=1.97081E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.05024E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=2.75457E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.02186E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04862E1
cs_ea1_imon=2.58149E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0023E0
lens1_imon=1.34451E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.50974E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8464E1
cs_ef1a_imon=2.89765E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=4.09436E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11165E1
os_restr1_imon=2.85656E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15528E1
os_ea1_imon=1.88718E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63431E1
os_ef1bup_imon=3.09442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24429E0
cs_ionrep_imon=1.19142E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93416E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=2.88647E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=7.78198E-10
tplens_vset=1.4E-1
tplens_vmon=1.64083E0
tplens_imon=-3.8947E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27582E1
iondef3_imon=1.50614E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27185E1
iondef2_imon=1.58076E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98458E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=4.26543E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30497E0
ionrepsh_imon=1.73181E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33802E1
lens5b_imon=2.17449E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7488E1
cs_ef2b_imon=3.14055E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.17476E-1
os_ea2_imon=-5.12038E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00497E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6366E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.22942E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=2.86305E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.30325E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.23884E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.09301E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.08449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.06548E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=3.7117E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10611E0
cs_ionaccel_imon=-1.64283E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=2.22749E-1
window_imon=-1.24639E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86758E1
mask2_imon=-6.73362E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92598E3
multa_neg_imon=7.51619E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.22201E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.59911E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.49456E0
defgridb_imon=6.03456E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33858E1
os_fil1_imon=4.43985E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.4852E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61631E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3075E1
cs_fil1_imon=9.95909E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63207E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62131E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.28607E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.93839E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.48208E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14222E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21551E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=3.03286E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.10949E-1
res40_imon=-2.44651E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.415E3	0.0E0	1.47E2	4.1E1	-7.201E-2	-8.80008E1	-6.19888E-4	-8.80002E1	2.86102E-4	4.72069E-3	9.39608E-2	2.74939E1	-3.26573E1	-3.2636E1	2.67984E1	1.20192E-7	2.51809E-3	2.51809E-3	6.32644E-3	3.00896E-1
2.0E0	9.7691E4	7.0E1	3.16E2	1.6E2	-7.20871E-2	-8.80011E1	-1.12057E-3	-8.80002E1	-4.76837E-5	5.00679E-3	9.38654E-2	2.73382E1	-3.26616E1	-3.26547E1	2.67889E1					
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80009E1	-1.07288E-3	-8.80003E1	4.29153E-4	4.55379E-3	9.39608E-2	2.72089E1	-3.26797E1	-3.26178E1	2.68004E1	1.19829E-7	2.52635E-3	2.52635E-3	6.3245E-3	3.00522E-1
4.0E0	2.1038E4	1.3E1	6.55E2	3.98E2	-7.24736E-2	-8.80011E1	-7.39098E-4	-8.80003E1	2.38419E-4	4.55379E-3	9.38177E-2	2.71417E1	-3.26567E1	-3.2626E1	2.67931E1	1.20209E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80011E1	-7.86781E-4	-8.8E1	1.66893E-4	4.74453E-3	9.408E-2	2.74355E1	-3.26633E1	-3.26008E1	2.68052E1	1.20192E-7	2.52236E-3	2.52236E-3	6.32858E-3	3.006E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80009E1	-8.10623E-4	-8.80002E1	3.57628E-4	4.72069E-3	9.38892E-2	2.72432E1	-3.26536E1	-3.26404E1	2.68274E1	1.20226E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.8001E1	-7.39098E-4	-8.80001E1	2.38419E-4	5.10216E-3	9.377E-2	2.73784E1	-3.26591E1	-3.2641E1	2.6796E1	1.20174E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80009E1	-5.72205E-4	-8.8E1	2.38419E-4	4.93526E-3	9.38654E-2	2.71801E1	-3.26518E1	-3.26332E1	2.68009E1	1.20069E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00041E-1
1.2E1	5.1E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80012E1	-8.10623E-4	-8.80001E1	2.86102E-4	4.673E-3	9.377E-2	2.73263E1	-3.26413E1	-3.26431E1	2.67982E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00302E-1
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80011E1	-9.53674E-4	-8.79999E1	4.76837E-4	4.64916E-3	9.41277E-2	2.73351E1	-3.26344E1	-3.26344E1	2.68064E1	1.20062E-7	2.51972E-3	2.51972E-3	6.31555E-3	3.0012E-1
1.4E1	3.121E3	4.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80011E1	-4.76837E-4	-8.80003E1	4.29153E-4	5.26905E-3	9.37462E-2	2.72195E1	-3.26696E1	-3.25975E1	2.68015E1					
1.5E1	4.2E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80012E1	-5.24521E-4	-8.80007E1	5.48363E-4	5.05447E-3	9.36985E-2	2.72211E1	-3.26356E1	-3.26527E1	2.6816E1	1.20064E-7	2.5165E-3	2.5165E-3	6.31761E-3	3.01121E-1
1.6E1	3.07E2	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80009E1	-9.05991E-4	-8.80004E1	4.52995E-4	4.673E-3	9.37223E-2	2.7358E1	-3.26765E1	-3.26182E1	2.68112E1	1.19674E-7	2.52222E-3	2.52222E-3	6.31321E-3	3.00363E-1
1.7E1	3.12E2	1.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80008E1	-8.10623E-4	-8.80003E1	4.52995E-4	4.76837E-3	9.40323E-2	2.73682E1	-3.26753E1	-3.26194E1	2.68208E1	1.20137E-7	2.51581E-3	2.51581E-3	6.3074E-3	2.99348E-1
1.8E1	1.326E3	1.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80008E1	-8.10623E-4	-8.80003E1	5.24521E-4	4.57764E-3	9.41277E-2	2.74187E1	-3.26597E1	-3.26122E1	2.68046E1	1.19965E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.01871E-1
1.9E1	9.84E2	1.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80009E1	-7.62939E-4	-8.80004E1	6.19888E-4	4.55379E-3	9.38177E-2	2.71582E1	-3.2656E1	-3.26517E1	2.68172E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.9943E-1
2.0E1	2.3604E4	2.0E1	8.08E2	5.58E2	-7.22418E-2	-8.80008E1	-7.39098E-4	-8.80001E1	4.29153E-4	4.81606E-3	9.36031E-2	2.74108E1	-3.26422E1	-3.26344E1	2.68022E1	1.20244E-7	2.51136E-3	2.51136E-3	6.32978E-3	3.00942E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80009E1	-7.39098E-4	-8.8E1	9.53674E-5	4.91142E-3	9.36508E-2	2.72912E1	-3.26642E1	-3.26121E1	2.68186E1	1.2033E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01085E-1
2.2E1	1.665E3	2.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80009E1	-3.33786E-4	-8.80003E1	5.00679E-4	4.62532E-3	9.37939E-2	2.7203E1	-3.26472E1	-3.26449E1	2.6801E1	1.20243E-7	2.51814E-3	2.51814E-3	6.33919E-3	3.01104E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80012E1	-5.48363E-4	-8.80005E1	2.86102E-4	5.05447E-3	9.38654E-2	2.73375E1	-3.27185E1	-3.27582E1	2.68046E1	1.198E-7	2.51739E-3	2.51739E-3	6.28592E-3	3.03286E-1