[Scan]
initial_time=2016-01-27T22:24:44
final_time=2016-01-27T22:25:03
ip_count=19
run=1025
dataset=5
scan=355
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.82785E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-6.86634E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=3.88467E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.90368E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=8.74913E-10
mult1=-1.33766E-8
mult2=-1.93015E-9
rf_tmon=-7.88906E-3
rf_agc=2.99329E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=4.03941E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64391E0
bslens_imon=2.54136E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1937E1
lens5a_imon=1.98091E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53875E1
cs_ef1b_imon=2.75817E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05138E1
cs_ea1_imon=2.5714E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99209E0
lens1_imon=1.41661E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.52993E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=2.89224E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=3.98982E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11153E1
os_restr1_imon=2.88251E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14993E1
os_ea1_imon=1.89295E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63215E1
os_ef1bup_imon=3.07857E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2539E0
cs_ionrep_imon=1.18962E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.9351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=2.8908E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=7.4327E-10
tplens_vset=1.4E-1
tplens_vmon=1.59757E0
tplens_imon=-2.38062E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25557E1
iondef3_imon=1.49172E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25828E1
iondef2_imon=1.57463E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.9836E-4
ql6_vset=1.0E-1
ql6_vmon=9.42707E-2
ql6_imon=4.20654E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26171E0
ionrepsh_imon=1.73145E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.18855E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.12794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.97048E-1
os_ea2_imon=-5.55298E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00471E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71408E1
cs_ef2a_imon=3.19425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6378E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.34354E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10781E1
os_restr2_imon=2.86773E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.30865E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.23884E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73958E1
iondef1_imon=1.06381E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68058E1
iondef4_imon=1.07548E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.04095E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=3.3859E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-1.78338E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=2.02927E-1
window_imon=-1.09142E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86548E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=6.75915E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.64379E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.15209E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.37726E0
defgridb_imon=6.24725E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33864E1
os_fil1_imon=5.24474E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.37708E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6221E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30701E1
cs_fil1_imon=9.96882E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63747E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62259E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10551E-2
os_fil2_imon=-2.35963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.65919E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.39314E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.11937E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02209E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21571E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.56289E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.397E3	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80012E1	-2.86102E-4	-8.80003E1	3.09944E-4	4.45843E-3	9.377E-2	2.73532E1	-3.26724E1	-3.26225E1	2.67931E1	1.20226E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.02659E-1
2.0E0	9.777E4	8.3E1	3.16E2	1.6E2	-7.17779E-2	-8.8001E1	-7.15256E-5	-8.80002E1	1.90735E-4	4.69685E-3	9.36508E-2	2.74336E1	-3.26655E1	-3.26438E1	2.68101E1	1.20209E-7	2.52384E-3	2.52384E-3	6.29665E-3	3.03545E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80013E1	-1.19209E-4	-8.80001E1	5.24521E-4	4.52995E-3	9.37939E-2	2.71805E1	-3.26671E1	-3.26057E1	2.67812E1	1.19991E-7	2.51611E-3	2.51611E-3	6.3131E-3	3.02972E-1
4.0E0	2.1104E4	5.0E0	6.55E2	3.98E2	-7.13915E-2	-8.80012E1	-2.14577E-4	-8.80003E1	3.57628E-4	4.14848E-3	9.39369E-2	2.72919E1	-3.26554E1	-3.26386E1	2.68007E1	1.20042E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80012E1	-1.43051E-4	-8.80003E1	5.00679E-4	4.29153E-3	9.35793E-2	2.74301E1	-3.26657E1	-3.25954E1	2.68094E1	1.20592E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80012E1	-4.29153E-4	-8.80002E1	3.57628E-4	4.3869E-3	9.38416E-2	2.75222E1	-3.26602E1	-3.26219E1	2.6798E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.14689E-2	-8.80009E1	-9.53674E-5	-8.80001E1	1.66893E-4	4.50611E-3	9.4223E-2	2.73526E1	-3.26549E1	-3.26585E1	2.68082E1	1.19953E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.11597E-2	-8.8001E1	-2.6226E-4	-8.8E1	3.33786E-4	4.72069E-3	9.408E-2	2.71519E1	-3.26609E1	-3.26026E1	2.681E1	1.20226E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00563E-1
1.2E1	5.4E1	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80009E1	-5.96046E-4	-8.80003E1	4.05312E-4	4.72069E-3	9.38416E-2	2.7329E1	-3.26522E1	-3.26306E1	2.68054E1	1.20353E-7	2.51883E-3	2.51883E-3	6.29675E-3	3.0002E-1
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80012E1	-4.29153E-4	-8.80001E1	3.57628E-4	5.05447E-3	9.408E-2	2.73528E1	-3.26387E1	-3.26425E1	2.68108E1	1.2006E-7	2.51758E-3	2.51758E-3	6.3016E-3	2.98985E-1
1.4E1	3.096E3	2.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80011E1	-8.10623E-4	-8.80001E1	3.8147E-4	4.95911E-3	9.4223E-2	2.71521E1	-3.26811E1	-3.26303E1	2.68112E1					
1.5E1	3.5E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80012E1	-6.19888E-4	-8.80001E1	1.66893E-4	4.81606E-3	9.4223E-2	2.73393E1	-3.26837E1	-3.26476E1	2.67951E1	1.20191E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.9829E-1
1.6E1	2.7E2	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80012E1	-6.91414E-4	-8.80002E1	4.29153E-4	4.76837E-3	9.377E-2	2.73121E1	-3.26785E1	-3.26119E1	2.67979E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1
1.7E1	3.1E2	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80014E1	-8.34465E-4	-8.80004E1	5.24521E-4	4.48227E-3	9.38892E-2	2.73204E1	-3.26769E1	-3.26031E1	2.67857E1	1.20038E-7	2.51694E-3	2.51694E-3	6.29262E-3	2.99728E-1
1.8E1	1.331E3	2.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80011E1	-1.04904E-3	-8.80002E1	2.86102E-4	4.12464E-3	9.38177E-2	2.73281E1	-3.26402E1	-3.2652E1	2.67794E1	1.20171E-7	2.5199E-3	2.5199E-3	6.32483E-3	2.99535E-1
1.9E1	1.01E3	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.8001E1	-8.10623E-4	-8.80003E1	1.43051E-4	4.50611E-3	9.39131E-2	2.72727E1	-3.26873E1	-3.26272E1	2.68112E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
2.0E1	2.3593E4	1.5E1	8.08E2	5.58E2	-7.26282E-2	-8.80014E1	-1.0252E-3	-8.80001E1	5.72205E-4	4.95911E-3	9.41515E-2	2.73201E1	-3.26705E1	-3.25972E1	2.67908E1	1.19851E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.0071E-1
2.1E1	4.4E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80013E1	-6.67572E-4	-8.80004E1	5.00679E-4	4.57764E-3	9.38654E-2	2.72337E1	-3.26691E1	-3.26478E1	2.68012E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00302E-1
2.2E1	1.625E3	2.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80014E1	-8.58307E-4	-8.80005E1	5.24521E-4	4.48227E-3	9.40323E-2	2.72666E1	-3.26681E1	-3.259E1	2.68178E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01347E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80009E1	-5.00679E-4	-8.80004E1	1.90735E-4	4.93526E-3	9.42707E-2	2.73958E1	-3.25828E1	-3.25557E1	2.68058E1	1.20004E-7	2.52061E-3	2.52061E-3	6.33977E-3	3.02253E-1