[Scan]
initial_time=2016-01-27T22:25:10
final_time=2016-01-27T22:25:30
ip_count=19
run=1025
dataset=5
scan=356
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.81684E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-6.49095E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=4.30405E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.98247E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=8.48138E-10
mult1=-1.47372E-8
mult2=-2.8244E-9
rf_tmon=-7.64273E-3
rf_agc=2.73734E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=4.15993E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65472E0
bslens_imon=2.62788E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19797E1
lens5a_imon=1.99028E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12436E2
lens4a_imon=2.05237E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53603E1
cs_ef1b_imon=2.75315E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05024E1
cs_ea1_imon=2.56635E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0023E0
lens1_imon=1.21113E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64817E1
os_ef1alow_imon=2.98634E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03372E1
cs_ea2_imon=1.52596E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84551E1
cs_ef1a_imon=2.89842E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=4.24778E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1139E1
os_restr1_imon=2.86714E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15197E1
os_ea1_imon=1.87961E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63606E1
os_ef1bup_imon=3.09303E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24369E0
cs_ionrep_imon=1.18097E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91921E2
cs_nozzle_imon=1.93316E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01867E1
cs_anode1_imon=2.89599E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=7.98249E-10
tplens_vset=1.4E-1
tplens_vmon=1.63603E0
tplens_imon=-2.09222E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2471E1
iondef3_imon=1.49027E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27101E1
iondef2_imon=1.57175E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98407E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=4.34113E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24309E0
ionrepsh_imon=1.75344E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33501E1
lens5b_imon=2.18747E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74565E1
cs_ef2b_imon=3.13057E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.25287E-1
os_ea2_imon=-5.91347E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00406E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.19764E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63029E0
os_ef2alow_imon=-2.52245E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.31201E-1
os_ef2bup_imon=-5.25053E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10886E1
os_restr2_imon=2.85741E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.29712E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01711E1
cs_anode2_imon=2.2416E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74655E1
iondef1_imon=1.08291E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68208E1
iondef4_imon=1.08121E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=2.02489E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=3.59619E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10176E0
cs_ionaccel_imon=-1.67102E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56226E1
einzel_imon=7.70174E-6
window_vset=0.0E0
window_vmon=2.30428E-1
window_imon=-1.01419E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39244E-4
mask2_vset=0.0E0
mask2_vmon=-1.86813E1
mask2_imon=-6.35391E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.52701E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93749E3
defgrida_imon=6.39866E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.13046E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.50959E0
defgridb_imon=6.067E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33866E1
os_fil1_imon=5.48028E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.98043E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61836E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3073E1
cs_fil1_imon=9.95835E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63229E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62428E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1313E-2
os_fil2_imon=-2.51859E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.00275E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.67156E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29402E-1
cs_fil2_imon=-2.62285E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.81364E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21728E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.83533E-1
res40_imon=-2.33827E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.452E3	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80009E1	-5.00679E-4	-8.80007E1	2.14577E-4	4.41074E-3	9.34839E-2	2.7301E1	-3.2639E1	-3.26219E1	2.68304E1	1.20226E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00563E-1
2.0E0	9.7834E4	9.6E1	3.16E2	1.6E2	-7.23964E-2	-8.80006E1	-6.91414E-4	-8.80007E1	2.86102E-4	4.36306E-3	9.40323E-2	2.72614E1	-3.26609E1	-3.26198E1	2.67963E1	1.20106E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.99686E-1
3.0E0	2.6E1	1.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80009E1	-6.4373E-4	-8.80007E1	0.0E0	4.43459E-3	9.37939E-2	2.73752E1	-3.26596E1	-3.26295E1	2.68053E1	1.19991E-7	2.52407E-3	2.52407E-3	6.34737E-3	3.01065E-1
4.0E0	2.0937E4	1.2E1	6.55E2	3.98E2	-7.35556E-2	-8.80008E1	-7.39098E-4	-8.80006E1	2.38419E-4	4.64916E-3	9.38416E-2	2.73275E1	-3.26608E1	-3.26366E1	2.68004E1	1.20092E-7	2.52025E-3	2.52025E-3	6.30212E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.8001E1	-8.34465E-4	-8.80004E1	-9.53674E-5	4.48227E-3	9.37939E-2	2.72955E1	-3.26771E1	-3.26176E1	2.68106E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80011E1	-7.39098E-4	-8.80005E1	1.43051E-4	4.36306E-3	9.35555E-2	2.72913E1	-3.26506E1	-3.26536E1	2.68018E1	1.2033E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80011E1	-7.86781E-4	-8.80004E1	3.09944E-4	4.60148E-3	9.377E-2	2.73724E1	-3.26554E1	-3.26236E1	2.68263E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80009E1	-8.34465E-4	-8.80005E1	1.19209E-4	4.64916E-3	9.3627E-2	2.72739E1	-3.26669E1	-3.2617E1	2.68153E1	1.19861E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00302E-1
1.2E1	4.8E1	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80013E1	-8.58307E-4	-8.80003E1	2.38419E-4	4.22001E-3	9.34362E-2	2.72612E1	-3.2653E1	-3.2629E1	2.68204E1	1.19965E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.01871E-1
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80013E1	-6.67572E-4	-8.80004E1	7.15256E-5	4.60148E-3	9.3627E-2	2.72951E1	-3.26832E1	-3.26136E1	2.67995E1	1.19913E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.9926E-1
1.4E1	3.267E3	1.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80012E1	-7.86781E-4	-8.80004E1	4.76837E-5	4.55379E-3	9.35316E-2	2.73184E1	-3.26411E1	-3.26306E1	2.68209E1	1.20278E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01871E-1
1.5E1	3.8E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80013E1	-5.24521E-4	-8.80007E1	1.19209E-4	4.52995E-3	9.35793E-2	2.73831E1	-3.2679E1	-3.26335E1	2.68232E1	1.19979E-7	2.51369E-3	2.51369E-3	6.3282E-3	3.00741E-1
1.6E1	2.55E2	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80012E1	-3.33786E-4	-8.80003E1	1.43051E-4	4.36306E-3	9.35078E-2	2.72132E1	-3.26627E1	-3.26176E1	2.68058E1	1.201E-7	2.51838E-3	2.51838E-3	6.3131E-3	3.01609E-1
1.7E1	3.09E2	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.8001E1	-3.8147E-4	-8.80003E1	3.33786E-4	4.673E-3	9.38654E-2	2.73976E1	-3.26627E1	-3.2635E1	2.67812E1	1.19809E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.01085E-1
1.8E1	1.239E3	1.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80014E1	-3.09944E-4	-8.80006E1	3.8147E-4	4.64916E-3	9.38177E-2	2.73345E1	-3.26819E1	-3.26176E1	2.67836E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00041E-1
1.9E1	9.72E2	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80011E1	-3.8147E-4	-8.80003E1	4.76837E-4	4.79221E-3	9.34839E-2	2.71471E1	-3.2647E1	-3.26314E1	2.67848E1	1.20069E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.9926E-1
2.0E1	2.3556E4	6.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80014E1	-6.4373E-4	-8.80003E1	4.29153E-4	4.62532E-3	9.37462E-2	2.73628E1	-3.26591E1	-3.26248E1	2.68064E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9952E-1
2.1E1	5.3E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.8001E1	-3.09944E-4	-8.80004E1	3.57628E-4	4.48227E-3	9.36985E-2	2.73275E1	-3.2675E1	-3.26555E1	2.68099E1	1.20209E-7	2.51417E-3	2.51417E-3	6.28592E-3	2.9892E-1
2.2E1	1.651E3	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80011E1	-4.76837E-4	-8.80002E1	4.29153E-4	4.36306E-3	9.37939E-2	2.72502E1	-3.26455E1	-3.26024E1	2.6825E1	1.20122E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00563E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80009E1	-7.86781E-4	-8.80004E1	1.43051E-4	4.57764E-3	9.37223E-2	2.74655E1	-3.27101E1	-3.2471E1	2.68208E1	1.20106E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.01738E-1