[Scan]
initial_time=2016-01-27T22:25:37
final_time=2016-01-27T22:25:56
ip_count=19
run=1025
dataset=5
scan=357
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.78809E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-7.2639E-10
ql2_vset=
ql2_vmon=-1.00136E-3
ql2_imon=3.95644E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.03391E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=8.20327E-10
mult1=-2.53404E-8
mult2=-3.56989E-9
rf_tmon=8.07902E-3
rf_agc=4.84401E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=4.13215E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66385E0
bslens_imon=2.46539E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19919E1
lens5a_imon=2.00173E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53532E1
cs_ef1b_imon=2.74664E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04941E1
cs_ea1_imon=2.58113E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98051E0
lens1_imon=1.63717E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64512E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03879E1
cs_ea2_imon=1.53665E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=2.8926E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=4.07946E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1125E1
os_restr1_imon=2.87566E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15482E1
os_ea1_imon=1.86653E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63828E1
os_ef1bup_imon=3.09659E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24679E0
cs_ionrep_imon=1.18731E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93459E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=2.90305E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=7.65371E-10
tplens_vset=1.4E-1
tplens_vmon=1.63376E0
tplens_imon=-3.4136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27304E1
iondef3_imon=1.51223E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27717E1
iondef2_imon=1.58019E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.98417E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=4.44496E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.36713E0
ionrepsh_imon=1.73911E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33522E1
lens5b_imon=2.18826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.26849E-1
os_ea2_imon=-7.23616E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00658E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62759E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42163E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=2.86773E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.29999E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.241E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73145E1
iondef1_imon=1.07618E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67878E1
iondef4_imon=1.08053E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.04333E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=3.3493E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12293E0
cs_ionaccel_imon=-1.71491E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.4728E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=3.00834E-1
window_imon=-8.06708E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39246E-4
mask2_vset=0.0E0
mask2_vmon=-1.86608E1
mask2_imon=-7.27421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92751E3
multa_neg_imon=7.75681E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.70206E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.21882E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.62853E0
defgridb_imon=6.06851E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33851E1
os_fil1_imon=4.12751E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.85161E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62095E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30702E1
cs_fil1_imon=9.97519E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63507E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62416E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.15499E-2
os_fil2_imon=-2.46775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.3978E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.39963E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.23872E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2155E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.38869E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.359E3	1.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80008E1	-6.19888E-4	-8.80003E1	-9.53674E-5	4.72069E-3	9.37462E-2	2.72727E1	-3.26669E1	-3.2644E1	2.681E1	1.20158E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.99941E-1
2.0E0	9.7993E4	9.0E1	3.16E2	1.6E2	-7.40192E-2	-8.80012E1	-5.24521E-4	-8.80003E1	2.86102E-4	4.79221E-3	9.377E-2	2.73706E1	-3.26505E1	-3.25966E1	2.6807E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01609E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80013E1	-4.29153E-4	-8.80001E1	5.72205E-4	4.74453E-3	9.377E-2	2.7238E1	-3.26573E1	-3.26143E1	2.6792E1	1.19978E-7	2.52027E-3	2.52027E-3	6.30182E-3	3.00144E-1
4.0E0	2.1037E4	1.3E1	6.55E2	3.98E2	-7.29374E-2	-8.80013E1	-4.52995E-4	-8.80005E1	4.05312E-4	4.50611E-3	9.36508E-2	2.73884E1	-3.26674E1	-3.26177E1	2.684E1	1.20113E-7	2.51244E-3	2.51244E-3	6.33297E-3	3.00149E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.8001E1	-5.24521E-4	-8.80007E1	1.90735E-4	5.14984E-3	9.37939E-2	2.73417E1	-3.2662E1	-3.26095E1	2.67998E1	1.19937E-7	2.51384E-3	2.51384E-3	6.29603E-3	3.01337E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80011E1	-4.76837E-5	-8.80004E1	2.6226E-4	4.8399E-3	9.35078E-2	2.72108E1	-3.26741E1	-3.26038E1	2.68172E1	1.20278E-7	2.52428E-3	2.52428E-3	6.34588E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80012E1	-4.05312E-4	-8.80006E1	2.38419E-4	4.86374E-3	9.3627E-2	2.72504E1	-3.26464E1	-3.26386E1	2.68124E1	1.19705E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.97963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80011E1	-6.19888E-4	-8.80003E1	3.33786E-4	4.76837E-3	9.37939E-2	2.73924E1	-3.2649E1	-3.26136E1	2.68022E1	1.20383E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9874E-1
1.2E1	4.5E1	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80009E1	-9.05991E-4	-8.80004E1	3.57628E-4	4.62532E-3	9.3627E-2	2.72186E1	-3.26806E1	-3.26337E1	2.67996E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01223E-1
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80005E1	-7.15256E-4	-8.80006E1	4.52995E-4	4.72069E-3	9.377E-2	2.72883E1	-3.26489E1	-3.25516E1	2.67981E1	1.20137E-7	2.51615E-3	2.51615E-3	6.32151E-3	2.9926E-1
1.4E1	3.244E3	1.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80005E1	-4.76837E-4	-8.80003E1	2.38419E-4	4.24385E-3	9.38177E-2	2.73406E1	-3.26634E1	-3.26389E1	2.68113E1	1.20078E-7	2.51369E-3	2.51369E-3	6.3074E-3	3.00247E-1
1.5E1	4.1E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80004E1	-6.91414E-4	-8.80002E1	2.86102E-4	4.55379E-3	9.38892E-2	2.73081E1	-3.26729E1	-3.26164E1	2.67866E1	1.20122E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.01609E-1
1.6E1	3.03E2	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80007E1	-5.96046E-4	-8.80004E1	5.48363E-4	4.57764E-3	9.377E-2	2.71822E1	-3.26404E1	-3.25948E1	2.68082E1	1.20226E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00041E-1
1.7E1	3.18E2	1.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80007E1	-6.91414E-4	-8.80006E1	6.4373E-4	4.8399E-3	9.38177E-2	2.73381E1	-3.26554E1	-3.26212E1	2.68034E1	1.20045E-7	2.51725E-3	2.51725E-3	6.3131E-3	2.9971E-1
1.8E1	1.277E3	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80008E1	-7.86781E-4	-8.80002E1	3.33786E-4	4.55379E-3	9.377E-2	2.73051E1	-3.26644E1	-3.26113E1	2.67944E1	1.20017E-7	2.52428E-3	2.52428E-3	6.29645E-3	3.00302E-1
1.9E1	1.003E3	1.0E0	7.68E2	5.29E2	-7.286E-2	-8.80008E1	-5.48363E-4	-8.80003E1	4.29153E-4	4.98295E-3	9.3627E-2	2.73748E1	-3.26543E1	-3.26146E1	2.68184E1	1.19851E-7	2.52061E-3	2.52061E-3	6.29665E-3	2.99175E-1
2.0E1	2.3439E4	1.2E1	8.08E2	5.58E2	-7.3401E-2	-8.80009E1	-8.34465E-4	-8.80003E1	4.52995E-4	5.126E-3	9.36747E-2	2.73448E1	-3.26621E1	-3.26494E1	2.68076E1	1.20174E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00041E-1
2.1E1	4.9E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80012E1	-8.10623E-4	-8.80004E1	1.90735E-4	5.07832E-3	9.37223E-2	2.72909E1	-3.26455E1	-3.26242E1	2.67992E1	1.20226E-7	2.52757E-3	2.52757E-3	6.31288E-3	3.01347E-1
2.2E1	1.692E3	2.0E0	8.89E2	6.17E2	-7.286E-2	-8.80011E1	-9.53674E-4	-8.80004E1	-7.15256E-5	4.81606E-3	9.35793E-2	2.72306E1	-3.26621E1	-3.26518E1	2.6818E1	1.20209E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00966E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80011E1	-1.00136E-3	-8.8E1	1.90735E-4	5.05447E-3	9.38892E-2	2.73145E1	-3.27717E1	-3.27304E1	2.67878E1	1.19851E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.00966E-1