[Scan]
initial_time=2016-01-27T22:26:57
final_time=2016-01-27T22:27:16
ip_count=19
run=1025
dataset=5
scan=360
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.8348E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-7.35486E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=4.03571E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.92945E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=8.38315E-10
mult1=-1.37379E-8
mult2=-2.16569E-9
rf_tmon=-7.06593E-3
rf_agc=3.11225E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=4.28808E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66149E0
bslens_imon=2.61759E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19936E1
lens5a_imon=1.97412E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.0481E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5354E1
cs_ef1b_imon=2.74794E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.01792E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05023E1
cs_ea1_imon=2.58892E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00764E0
lens1_imon=1.41773E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.97314E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03879E1
cs_ea2_imon=1.52781E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84139E1
cs_ef1a_imon=2.89911E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=4.30393E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11309E1
os_restr1_imon=2.8807E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15429E1
os_ea1_imon=1.87608E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63601E1
os_ef1bup_imon=3.09164E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22909E0
cs_ionrep_imon=1.1728E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93218E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0189E1
cs_anode1_imon=2.88348E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=7.45595E-10
tplens_vset=1.4E-1
tplens_vmon=1.64792E0
tplens_imon=-1.99784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26573E1
iondef3_imon=1.49135E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25701E1
iondef2_imon=1.56922E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.98321E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=4.06981E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34235E0
ionrepsh_imon=1.73486E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33463E1
lens5b_imon=2.17941E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74449E1
cs_ef2b_imon=3.11666E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.44546E-1
os_ea2_imon=-4.33385E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0604E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71032E1
cs_ef2a_imon=3.18443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63435E0
os_ef2alow_imon=-2.54678E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.61899E-1
os_ef2bup_imon=-5.27138E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10869E1
os_restr2_imon=2.86992E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.30141E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01682E1
cs_anode2_imon=2.23986E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72504E1
iondef1_imon=1.07936E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68004E1
iondef4_imon=1.09163E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=2.0002E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=3.50761E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12377E0
cs_ionaccel_imon=-1.69534E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5611E1
einzel_imon=7.71564E-6
window_vset=0.0E0
window_vmon=2.66339E-1
window_imon=-1.01072E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.39115E-4
mask2_vset=0.0E0
mask2_vmon=-1.86888E1
mask2_imon=-6.73619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.43118E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.66667E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.25067E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.45726E0
defgridb_imon=6.01542E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33839E1
os_fil1_imon=4.91266E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.90138E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6163E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30699E1
cs_fil1_imon=9.97862E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63426E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61994E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.117E-2
os_fil2_imon=-2.368E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.07602E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.80967E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31525E-1
cs_fil2_imon=-2.02047E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27523E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21396E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.90687E-1
res40_imon=-2.34174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.429E3	1.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80007E1	-7.39098E-4	-8.80002E1	3.8147E-4	4.86374E-3	9.37223E-2	2.72278E1	-3.26667E1	-3.26278E1	2.68028E1	1.20311E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01223E-1
2.0E0	9.8382E4	9.2E1	3.16E2	1.6E2	-7.29374E-2	-8.80007E1	-9.05991E-4	-8.80004E1	3.57628E-4	4.88758E-3	9.36747E-2	2.73541E1	-3.26676E1	-3.26744E1	2.68028E1	1.19953E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.01223E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80011E1	-4.76837E-4	-8.80005E1	1.90735E-4	4.86374E-3	9.39369E-2	2.72476E1	-3.26767E1	-3.26294E1	2.68088E1	1.19978E-7	2.52473E-3	2.52473E-3	6.29624E-3	3.0201E-1
4.0E0	2.1252E4	1.1E1	6.55E2	3.98E2	-7.30918E-2	-8.8001E1	-4.76837E-4	-8.80006E1	2.86102E-4	5.14984E-3	9.37939E-2	2.72177E1	-3.26447E1	-3.2641E1	2.68121E1	1.20064E-7	2.51854E-3	2.51854E-3	6.31251E-3	3.00392E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80012E1	-4.52995E-4	-8.80004E1	6.4373E-4	4.91142E-3	9.37939E-2	2.73273E1	-3.26573E1	-3.26356E1	2.68106E1	1.1984E-7	2.51874E-3	2.51874E-3	6.33065E-3	3.00363E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80007E1	-5.24521E-4	-8.80004E1	3.8147E-4	4.8399E-3	9.36508E-2	2.73243E1	-3.26494E1	-3.26254E1	2.67992E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80009E1	-4.76837E-4	-8.80005E1	2.86102E-4	4.79221E-3	9.36031E-2	2.73429E1	-3.26723E1	-3.2623E1	2.68166E1	1.20278E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.03976E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80009E1	-5.48363E-4	-8.80005E1	1.43051E-4	4.72069E-3	9.35316E-2	2.73111E1	-3.2644E1	-3.26122E1	2.68575E1	1.20122E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00302E-1
1.2E1	4.7E1	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80009E1	-3.8147E-4	-8.80003E1	5.00679E-4	4.673E-3	9.37462E-2	2.73351E1	-3.27185E1	-3.25755E1	2.6831E1	1.20174E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9978E-1
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80011E1	-3.8147E-4	-8.80003E1	5.00679E-4	4.93526E-3	9.36747E-2	2.72355E1	-3.27251E1	-3.26083E1	2.67763E1	1.20435E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01085E-1
1.4E1	3.175E3	1.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80007E1	-5.48363E-4	-8.80003E1	0.0E0	4.74453E-3	9.37939E-2	2.72739E1	-3.26615E1	-3.26487E1	2.68334E1	1.20568E-7	2.52276E-3	2.52276E-3	6.28592E-3	3.01223E-1
1.5E1	5.0E1	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.8001E1	-4.29153E-4	-8.80005E1	2.38419E-4	4.64916E-3	9.39369E-2	2.73123E1	-3.26651E1	-3.26603E1	2.67956E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
1.6E1	2.58E2	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80011E1	-6.91414E-4	-8.80007E1	2.14577E-4	4.41074E-3	9.35555E-2	2.72715E1	-3.26949E1	-3.26224E1	2.68196E1	1.20435E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00824E-1
1.7E1	2.95E2	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80011E1	-8.58307E-4	-8.80003E1	2.86102E-4	4.64916E-3	9.36508E-2	2.73159E1	-3.26458E1	-3.26332E1	2.68304E1	1.20203E-7	2.51645E-3	2.51645E-3	6.3148E-3	2.99318E-1
1.8E1	1.313E3	0.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80011E1	-5.00679E-4	-8.80002E1	2.86102E-4	4.8399E-3	9.377E-2	2.73523E1	-3.26472E1	-3.26443E1	2.68046E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
1.9E1	1.016E3	0.0E0	7.68E2	5.29E2	-7.33239E-2	-8.8001E1	-1.43051E-4	-8.79999E1	1.90735E-4	4.93526E-3	9.38892E-2	2.72715E1	-3.26573E1	-3.2632E1	2.68128E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99686E-1
2.0E1	2.3682E4	1.8E1	8.08E2	5.58E2	-7.42513E-2	-8.80012E1	-2.38419E-4	-8.80001E1	4.05312E-4	4.93526E-3	9.35793E-2	2.72783E1	-3.26641E1	-3.26353E1	2.67988E1	1.20363E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.0148E-1
2.1E1	4.7E1	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80012E1	-3.8147E-4	-8.80004E1	3.09944E-4	4.55379E-3	9.35555E-2	2.72991E1	-3.26464E1	-3.26452E1	2.67932E1	1.20196E-7	2.52212E-3	2.52212E-3	6.35051E-3	2.97979E-1
2.2E1	1.692E3	0.0E0	8.89E2	6.17E2	-7.42513E-2	-8.80008E1	-2.38419E-4	-8.80002E1	4.76837E-4	4.69685E-3	9.38177E-2	2.73057E1	-3.26362E1	-3.26669E1	2.68076E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9926E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80012E1	-2.14577E-4	-8.80004E1	1.90735E-4	4.74453E-3	9.37939E-2	2.72504E1	-3.25701E1	-3.26573E1	2.68004E1	1.20174E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00302E-1