[Scan]
initial_time=2016-01-27T22:27:23
final_time=2016-01-27T22:27:43
ip_count=19
run=1025
dataset=5
scan=361
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.81791E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.7476E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=4.12405E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.82714E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=8.72636E-10
mult1=-2.05408E-8
mult2=-3.32688E-9
rf_tmon=-3.04062E-3
rf_agc=3.50788E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=4.13334E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65678E0
bslens_imon=2.49017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20113E1
lens5a_imon=1.97908E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53818E1
cs_ef1b_imon=2.75003E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02071E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04793E1
cs_ea1_imon=2.56768E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99349E0
lens1_imon=1.58408E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64562E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03897E1
cs_ea2_imon=1.53736E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84377E1
cs_ef1a_imon=2.89112E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.93844E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11257E1
os_restr1_imon=2.88382E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15341E1
os_ea1_imon=1.88352E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63838E1
os_ef1bup_imon=3.08747E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26272E0
cs_ionrep_imon=1.17776E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01838E1
cs_anode1_imon=2.89077E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=7.56466E-10
tplens_vset=1.4E-1
tplens_vmon=1.61489E0
tplens_imon=-3.09505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26644E1
iondef3_imon=1.4956E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27711E1
iondef2_imon=1.57488E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.9836E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=4.01151E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24856E0
ionrepsh_imon=1.73663E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33504E1
lens5b_imon=2.18224E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.1323E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.08562E-1
os_ea2_imon=-4.90015E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00637E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71113E1
cs_ef2a_imon=3.18513E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61639E0
os_ef2alow_imon=-2.55721E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40468E-1
os_ef2bup_imon=-5.34783E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10834E1
os_restr2_imon=2.87305E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.2961E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01919E1
cs_anode2_imon=2.24577E-5
iondef1_vset=2.763E1
iondef1_vmon=2.75169E1
iondef1_imon=1.09033E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68208E1
iondef4_imon=1.0965E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.00064E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=3.40712E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10466E0
cs_ionaccel_imon=-1.72315E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02104E2
cs_ionfocb_imon=1.47362E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56272E1
einzel_imon=7.62876E-6
window_vset=0.0E0
window_vmon=2.64023E-1
window_imon=-9.62065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.3914E-4
mask2_vset=0.0E0
mask2_vmon=-1.86749E1
mask2_imon=-5.90213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.59753E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.79763E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.40995E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.43069E0
defgridb_imon=6.11806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33864E1
os_fil1_imon=4.69256E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.83187E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62002E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30716E1
cs_fil1_imon=9.97491E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6353E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61889E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20564E-2
os_fil2_imon=-2.42592E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.35028E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.49581E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32149E-1
cs_fil2_imon=-2.31587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04933E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21474E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.19444E-1
res40_imon=-2.51898E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.433E3	3.0E0	1.47E2	4.1E1	-7.29374E-2	-8.8001E1	-4.29153E-4	-8.80003E1	4.29153E-4	4.60148E-3	9.40084E-2	2.7229E1	-3.26632E1	-3.26213E1	2.67989E1	1.20209E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.9892E-1
2.0E0	9.7172E4	9.9E1	3.16E2	1.6E2	-7.286E-2	-8.8001E1	-3.09944E-4	-8.80005E1	7.15256E-5	4.64916E-3	9.42707E-2	2.7288E1	-3.2686E1	-3.2607E1	2.68263E1	1.20495E-7	2.52131E-3	2.52131E-3	6.31269E-3	2.99093E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80011E1	-6.4373E-4	-8.80003E1	3.33786E-4	4.72069E-3	9.38654E-2	2.71877E1	-3.26638E1	-3.26166E1	2.68192E1	1.19937E-7	2.52179E-3	2.52179E-3	6.29603E-3	2.9944E-1
4.0E0	2.096E4	7.0E0	6.55E2	3.98E2	-7.37874E-2	-8.8001E1	-2.6226E-4	-8.80004E1	4.05312E-4	4.76837E-3	9.39131E-2	2.74295E1	-3.26711E1	-3.26242E1	2.67962E1	1.19891E-7	2.51814E-3	2.51814E-3	6.32858E-3	3.006E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.8001E1	-2.6226E-4	-8.80005E1	4.52995E-4	4.86374E-3	9.37939E-2	2.72909E1	-3.26661E1	-3.2613E1	2.68052E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00563E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.40967E-2	-8.80011E1	-3.09944E-4	-8.80004E1	1.43051E-4	5.14984E-3	9.38654E-2	2.72919E1	-3.26657E1	-3.26362E1	2.68142E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.51013E-2	-8.8001E1	-4.29153E-4	-8.80004E1	5.48363E-4	4.91142E-3	9.37462E-2	2.72666E1	-3.26404E1	-3.26152E1	2.67782E1	1.20487E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.44059E-2	-8.80011E1	-1.66893E-4	-8.80003E1	6.19888E-4	5.19753E-3	9.40323E-2	2.72666E1	-3.26524E1	-3.26152E1	2.68046E1	1.20568E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.01223E-1
1.2E1	4.9E1	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.8001E1	-2.14577E-4	-8.80002E1	9.53674E-5	4.81606E-3	9.39369E-2	2.72355E1	-3.2652E1	-3.25877E1	2.68208E1	1.20084E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00942E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.44831E-2	-8.80011E1	-3.8147E-4	-8.80004E1	1.66893E-4	4.93526E-3	9.38654E-2	2.73496E1	-3.26837E1	-3.26813E1	2.67932E1	1.20158E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.00197E-1
1.4E1	3.247E3	3.0E0	5.66E2	3.82E2	-7.51788E-2	-8.80013E1	-5.48363E-4	-8.80002E1	-2.6226E-4	4.8399E-3	9.36508E-2	2.71459E1	-3.26597E1	-3.26398E1	2.68118E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.02922E-1
1.5E1	4.3E1	0.0E0	6.06E2	4.11E2	-7.47923E-2	-8.8001E1	7.15256E-5	-8.80004E1	1.90735E-4	5.10216E-3	9.36985E-2	2.73828E1	-3.26511E1	-3.26352E1	2.68124E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9978E-1
1.6E1	2.76E2	0.0E0	6.47E2	4.41E2	-7.40192E-2	-8.80012E1	-4.76837E-4	-8.80006E1	1.43051E-4	5.19753E-3	9.37462E-2	2.72827E1	-3.26655E1	-3.26124E1	2.67968E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9926E-1
1.7E1	3.0E2	0.0E0	6.87E2	4.7E2	-7.44059E-2	-8.80012E1	-5.00679E-4	-8.80001E1	2.14577E-4	4.88758E-3	9.39369E-2	2.72702E1	-3.26609E1	-3.26572E1	2.67836E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.98222E-1
1.8E1	1.286E3	0.0E0	7.27E2	5.0E2	-7.43285E-2	-8.80009E1	-5.24521E-4	-8.80001E1	2.14577E-4	4.88758E-3	9.4223E-2	2.73363E1	-3.26374E1	-3.26488E1	2.68046E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
1.9E1	9.5E2	0.0E0	7.68E2	5.29E2	-7.47149E-2	-8.80015E1	-3.33786E-4	-8.80002E1	-4.76837E-5	4.8399E-3	9.38654E-2	2.72325E1	-3.26502E1	-3.26024E1	2.67998E1	1.20122E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00041E-1
2.0E1	2.3741E4	1.2E1	8.08E2	5.58E2	-7.37874E-2	-8.80013E1	-4.76837E-4	-8.80003E1	7.15256E-5	5.00679E-3	9.38416E-2	2.73153E1	-3.26741E1	-3.2611E1	2.67896E1	1.2033E-7	2.52538E-3	2.52538E-3	6.33486E-3	3.00824E-1
2.1E1	5.2E1	3.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80015E1	-6.67572E-4	-8.80002E1	-1.43051E-4	4.52995E-3	9.36985E-2	2.73505E1	-3.26549E1	-3.26402E1	2.68337E1	1.2033E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.00302E-1
2.2E1	1.662E3	0.0E0	8.89E2	6.17E2	-7.45602E-2	-8.80013E1	-7.15256E-4	-8.80001E1	4.76837E-5	5.126E-3	9.39846E-2	2.7203E1	-3.26536E1	-3.25924E1	2.681E1	1.20055E-7	2.51525E-3	2.51525E-3	6.29128E-3	2.9943E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80012E1	-3.09944E-4	-8.80001E1	2.38419E-4	4.74453E-3	9.34839E-2	2.75169E1	-3.27711E1	-3.26644E1	2.68208E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00197E-1