[Scan]
initial_time=2016-01-27T22:28:17
final_time=2016-01-27T22:28:36
ip_count=19
run=1025
dataset=5
scan=363
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.77356E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-7.15005E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=4.08304E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.82248E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=8.47626E-10
mult1=-2.06117E-8
mult2=-2.48808E-9
rf_tmon=-3.27068E-3
rf_agc=3.65536E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=4.33993E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68332E0
bslens_imon=2.58927E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20208E1
lens5a_imon=1.96351E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.05146E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53712E1
cs_ef1b_imon=2.75709E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.0222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04687E1
cs_ea1_imon=2.58609E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03242E0
lens1_imon=1.20182E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.645E1
os_ef1alow_imon=2.99387E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04038E1
cs_ea2_imon=1.54656E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84496E1
cs_ef1a_imon=2.89801E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=3.98386E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=2.87026E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1507E1
os_ea1_imon=1.89236E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26862E0
cs_ionrep_imon=1.17103E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93257E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01665E1
cs_anode1_imon=2.89296E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=7.76064E-10
tplens_vset=1.4E-1
tplens_vmon=1.63258E0
tplens_imon=-2.17481E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27127E1
iondef3_imon=1.49843E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26024E1
iondef2_imon=1.5816E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02914E2
lens6_imon=2.98452E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=4.43721E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25387E0
ionrepsh_imon=1.7253E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34053E1
lens5b_imon=2.19038E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.00304E-1
os_ea2_imon=-5.43106E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00577E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.18741E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61978E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42764E-1
os_ef2bup_imon=-5.10984E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=2.86701E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.27911E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.24749E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72148E1
iondef1_imon=1.09883E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68146E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.03185E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=3.25525E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13314E0
cs_ionaccel_imon=-1.82663E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.4728E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56339E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=2.40768E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39257E-4
mask2_vset=0.0E0
mask2_vmon=-1.86698E1
mask2_imon=-6.73362E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92684E3
multa_neg_imon=7.49489E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.76223E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.24713E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.56061E0
defgridb_imon=6.38352E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33831E1
os_fil1_imon=5.18467E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.25695E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6187E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3071E1
cs_fil1_imon=9.9481E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63303E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62461E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.12966E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.53906E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.67046E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.28755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21625E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31283E-3
inlet_lpb_pmon=2.98959E-1
chamber_ion_pmon=1.20269E-7
chamber_cvt_pmon=2.5143E-3
foreline_cvt_pmon=2.5143E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.54797E-1
res40_imon=-2.62311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.495E3	0.0E0	1.47E2	4.1E1	-7.13143E-2	-8.80009E1	-2.6226E-4	-8.80002E1	1.66893E-4	5.05447E-3	9.377E-2	2.73281E1	-3.26537E1	-3.26443E1	2.67955E1	1.20311E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00197E-1
2.0E0	9.749E4	9.7E1	3.16E2	1.6E2	-7.15461E-2	-8.8001E1	-5.00679E-4	-8.80001E1	3.57628E-4	4.62532E-3	9.38654E-2	2.72463E1	-3.26536E1	-3.26052E1	2.68069E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.0071E-1
3.0E0	1.1E1	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.8001E1	-3.57628E-4	-8.80005E1	1.90735E-4	4.79221E-3	9.38654E-2	2.7235E1	-3.26631E1	-3.2622E1	2.68169E1	1.20084E-7	2.52139E-3	2.52139E-3	6.29067E-3	3.01742E-1
4.0E0	2.0736E4	1.4E1	6.55E2	3.98E2	-7.18554E-2	-8.80009E1	-4.29153E-4	-8.80002E1	2.86102E-4	4.673E-3	9.38177E-2	2.73652E1	-3.26771E1	-3.26554E1	2.67976E1	1.19941E-7	2.52131E-3	2.52131E-3	6.32858E-3	3.01104E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80008E1	-4.29153E-4	-8.80004E1	3.57628E-4	4.93526E-3	9.37939E-2	2.73234E1	-3.26927E1	-3.2629E1	2.68041E1	1.20106E-7	2.50989E-3	2.50989E-3	6.32896E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80008E1	-3.8147E-4	-8.80001E1	9.53674E-5	5.07832E-3	9.38892E-2	2.73069E1	-3.26679E1	-3.26549E1	2.67943E1	1.19861E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.98222E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80007E1	-4.76837E-4	-8.79999E1	2.14577E-4	5.126E-3	9.377E-2	2.72961E1	-3.2644E1	-3.26098E1	2.68157E1	1.19941E-7	2.51814E-3	2.51814E-3	6.32328E-3	2.98342E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.8001E1	-8.34465E-4	-8.80002E1	3.57628E-4	5.31673E-3	9.36747E-2	2.72576E1	-3.26476E1	-3.26086E1	2.68094E1	1.19872E-7	2.52362E-3	2.52362E-3	6.29624E-3	3.00144E-1
1.2E1	4.1E1	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80013E1	-8.10623E-4	-8.80004E1	3.8147E-4	4.79221E-3	9.36747E-2	2.73237E1	-3.26747E1	-3.26488E1	2.68206E1	1.20226E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01085E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80011E1	-6.67572E-4	-8.80002E1	9.53674E-5	4.79221E-3	9.3627E-2	2.72931E1	-3.26645E1	-3.2629E1	2.67947E1	1.20158E-7	2.51096E-3	2.51096E-3	6.32896E-3	3.0071E-1
1.4E1	3.156E3	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80011E1	-7.39098E-4	-8.80005E1	3.33786E-4	4.8399E-3	9.35316E-2	2.73105E1	-3.26488E1	-3.26188E1	2.68016E1	1.20244E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.01475E-1
1.5E1	3.6E1	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80007E1	-5.00679E-4	-8.80004E1	4.29153E-4	4.98295E-3	9.377E-2	2.72498E1	-3.26543E1	-3.26392E1	2.6795E1	1.20069E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01871E-1
1.6E1	2.79E2	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.8001E1	-5.00679E-4	-8.80004E1	3.09944E-4	5.07832E-3	9.38892E-2	2.73375E1	-3.26549E1	-3.26236E1	2.67824E1	1.19653E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9978E-1
1.7E1	2.67E2	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80009E1	-8.58307E-4	-8.80006E1	2.14577E-4	4.91142E-3	9.35316E-2	2.73352E1	-3.26844E1	-3.26089E1	2.68412E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.9943E-1
1.8E1	1.257E3	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80011E1	-3.8147E-4	-8.80003E1	7.15256E-5	4.95911E-3	9.33409E-2	2.73195E1	-3.26482E1	-3.2647E1	2.67776E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9978E-1
1.9E1	1.035E3	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80011E1	-3.8147E-4	-8.80002E1	4.05312E-4	4.48227E-3	9.377E-2	2.72985E1	-3.26747E1	-3.26008E1	2.68178E1	1.20106E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
2.0E1	2.3548E4	1.3E1	8.08E2	5.58E2	-7.29374E-2	-8.80009E1	-4.29153E-4	-8.80003E1	-2.38419E-5	4.36306E-3	9.35793E-2	2.73133E1	-3.26749E1	-3.26398E1	2.67882E1	1.20017E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00041E-1
2.1E1	3.6E1	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80011E1	-6.4373E-4	-8.80003E1	-4.76837E-5	4.57764E-3	9.36985E-2	2.72745E1	-3.26678E1	-3.26173E1	2.68017E1	1.20338E-7	2.51923E-3	2.51923E-3	6.32247E-3	3.00054E-1
2.2E1	1.671E3	3.0E0	8.89E2	6.17E2	-7.17007E-2	-8.80011E1	-7.15256E-4	-8.80006E1	4.76837E-5	5.17368E-3	9.37223E-2	2.7332E1	-3.26891E1	-3.2634E1	2.67884E1	1.1995E-7	2.51527E-3	2.51527E-3	6.29581E-3	3.01193E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80011E1	-6.91414E-4	-8.80004E1	1.66893E-4	4.62532E-3	9.3627E-2	2.72148E1	-3.26024E1	-3.27127E1	2.68146E1	1.20269E-7	2.5143E-3	2.5143E-3	6.31283E-3	2.98959E-1