[Scan]
initial_time=2016-01-27T22:30:03
final_time=2016-01-27T22:30:23
ip_count=19
run=1025
dataset=5
scan=367
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.80616E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.899E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=4.46761E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.93026E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=8.72982E-10
mult1=-1.66637E-8
mult2=-2.45912E-9
rf_tmon=-6.6033E-3
rf_agc=3.17534E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=4.33159E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67978E0
bslens_imon=2.6282E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19948E1
lens5a_imon=1.97448E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53682E1
cs_ef1b_imon=2.74988E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02316E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04599E1
cs_ea1_imon=2.57441E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00529E0
lens1_imon=1.27261E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.98955E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.54656E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=2.89476E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=4.17054E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=2.86845E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.154E1
os_ea1_imon=1.91572E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24974E0
cs_ionrep_imon=1.17209E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93487E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.89584E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=8.2041E-10
tplens_vset=1.4E-1
tplens_vmon=1.65323E0
tplens_imon=-1.32535E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.50657E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26188E1
iondef2_imon=1.57594E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02893E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=4.17686E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24856E0
ionrepsh_imon=1.72353E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34041E1
lens5b_imon=2.17056E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74922E1
cs_ef2b_imon=3.12181E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.05023E-1
os_ea2_imon=-4.79397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00463E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.19497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62759E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52975E-1
os_ef2bup_imon=-5.20715E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=2.87134E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.31025E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.23704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74144E1
iondef1_imon=1.08396E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68412E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=2.00201E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=3.56007E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-1.73653E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47201E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=1.46465E-1
window_imon=-1.09142E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39239E-4
mask2_vset=0.0E0
mask2_vmon=-1.86915E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.16927E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.53571E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.31792E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.52518E0
defgridb_imon=6.17469E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33874E1
os_fil1_imon=3.83919E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.3891E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61887E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30624E1
cs_fil1_imon=9.96149E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63489E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62162E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.12966E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.51793E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.64135E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.22148E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26236E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21577E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31858E-3
inlet_lpb_pmon=3.01209E-1
chamber_ion_pmon=1.19925E-7
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.31371E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.503E3	2.0E0	1.47E2	4.1E1	-7.31692E-2	-8.8001E1	-3.33786E-4	-8.80005E1	3.8147E-4	4.64916E-3	9.38416E-2	2.71789E1	-3.26496E1	-3.26372E1	2.67955E1	1.20158E-7	2.52599E-3	2.52599E-3	6.32356E-3	3.00453E-1
2.0E0	9.7858E4	1.01E2	3.16E2	1.6E2	-7.30146E-2	-8.80014E1	-7.39098E-4	-8.80002E1	3.33786E-4	4.76837E-3	9.39369E-2	2.73658E1	-3.26711E1	-3.2653E1	2.68219E1	1.20363E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.99175E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80014E1	-5.24521E-4	-8.80003E1	1.43051E-4	4.86374E-3	9.39131E-2	2.72943E1	-3.26771E1	-3.2647E1	2.6803E1	1.20435E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9926E-1
4.0E0	2.0998E4	5.0E0	6.55E2	3.98E2	-7.20871E-2	-8.80014E1	-3.57628E-4	-8.80005E1	3.33786E-4	4.81606E-3	9.35555E-2	2.72538E1	-3.26372E1	-3.26148E1	2.68052E1	1.20435E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9952E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80012E1	-3.57628E-4	-8.80007E1	3.33786E-4	5.29289E-3	9.35793E-2	2.7373E1	-3.26927E1	-3.26194E1	2.68022E1	1.20311E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80012E1	-5.72205E-4	-8.80006E1	3.09944E-4	4.95911E-3	9.36031E-2	2.73233E1	-3.26454E1	-3.25867E1	2.68117E1	1.20174E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80013E1	-1.43051E-4	-8.80004E1	4.76837E-4	4.62532E-3	9.37939E-2	2.72199E1	-3.26616E1	-3.26553E1	2.6802E1	1.19891E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.00852E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80013E1	-4.29153E-4	-8.80005E1	7.39098E-4	4.8399E-3	9.41038E-2	2.73556E1	-3.26524E1	-3.2638E1	2.68058E1	1.20208E-7	2.52407E-3	2.52407E-3	6.3131E-3	2.98361E-1
1.2E1	4.3E1	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.80013E1	-1.90735E-4	-8.80006E1	6.4373E-4	4.52995E-3	9.39131E-2	2.72787E1	-3.26735E1	-3.26128E1	2.68016E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01609E-1
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80017E1	-4.76837E-4	-8.80002E1	7.15256E-4	4.76837E-3	9.40084E-2	2.7278E1	-3.26472E1	-3.26142E1	2.68058E1	1.20017E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.01871E-1
1.4E1	3.173E3	1.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80012E1	-2.86102E-4	-8.80004E1	1.14441E-3	4.60148E-3	9.38654E-2	2.72684E1	-3.26829E1	-3.26634E1	2.67998E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02659E-1
1.5E1	3.6E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80012E1	-7.86781E-4	-8.80004E1	6.67572E-4	4.72069E-3	9.39369E-2	2.74595E1	-3.26609E1	-3.26194E1	2.67974E1	1.19757E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.00824E-1
1.6E1	2.76E2	1.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80012E1	-4.76837E-4	-8.80001E1	8.82149E-4	4.72069E-3	9.37939E-2	2.71969E1	-3.26494E1	-3.26597E1	2.67968E1	1.19809E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00302E-1
1.7E1	3.0E2	1.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80012E1	-6.91414E-4	-8.80002E1	5.96046E-4	4.45843E-3	9.36031E-2	2.73466E1	-3.26615E1	-3.26482E1	2.68569E1	1.20278E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.01871E-1
1.8E1	1.255E3	1.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80015E1	-5.48363E-4	-8.80003E1	3.8147E-4	4.69685E-3	9.36508E-2	2.73358E1	-3.26667E1	-3.26077E1	2.67992E1	1.19913E-7	2.51771E-3	2.51771E-3	6.29098E-3	2.99E-1
1.9E1	1.005E3	4.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80011E1	-5.48363E-4	-8.80002E1	5.00679E-4	4.64916E-3	9.35316E-2	2.72522E1	-3.26554E1	-3.26705E1	2.6814E1	1.20363E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01995E-1
2.0E1	2.3756E4	1.2E1	8.08E2	5.58E2	-7.31692E-2	-8.80013E1	-2.6226E-4	-8.8E1	7.39098E-4	4.72069E-3	9.3627E-2	2.74408E1	-3.26343E1	-3.25865E1	2.68094E1	1.20122E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.01609E-1
2.1E1	5.9E1	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80013E1	-4.05312E-4	-8.80002E1	4.76837E-4	4.74453E-3	9.37939E-2	2.72591E1	-3.26602E1	-3.26408E1	2.68112E1	1.20106E-7	2.51632E-3	2.51632E-3	6.29128E-3	3.01223E-1
2.2E1	1.701E3	1.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80012E1	-1.66893E-4	-8.80001E1	4.52995E-4	4.48227E-3	9.38177E-2	2.7403E1	-3.26548E1	-3.26529E1	2.6795E1	1.19902E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.00966E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80012E1	-2.14577E-4	-8.80002E1	2.6226E-4	4.88758E-3	9.36985E-2	2.74144E1	-3.26188E1	-3.26056E1	2.68412E1	1.19925E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.01209E-1