[Scan]
initial_time=2016-01-27T22:30:56
final_time=2016-01-27T22:31:16
ip_count=19
run=1025
dataset=5
scan=369
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.81028E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.39617E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=4.07863E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.85999E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=8.40342E-10
mult1=-1.44723E-8
mult2=-2.18565E-9
rf_tmon=-8.7122E-3
rf_agc=2.91578E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=4.30381E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65383E0
bslens_imon=2.47247E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19813E1
lens5a_imon=1.98297E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.0492E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53772E1
cs_ef1b_imon=2.75349E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02273E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0477E1
cs_ea1_imon=2.57405E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99408E0
lens1_imon=1.55222E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.99135E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03761E1
cs_ea2_imon=1.52922E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84496E1
cs_ef1a_imon=2.89224E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=4.3267E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11123E1
os_restr1_imon=2.86665E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1527E1
os_ea1_imon=1.87431E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23027E0
cs_ionrep_imon=1.17032E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01905E1
cs_anode1_imon=2.89044E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=8.53431E-10
tplens_vset=1.4E-1
tplens_vmon=1.64733E0
tplens_imon=-2.91808E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25978E1
iondef3_imon=1.50197E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25984E1
iondef2_imon=1.57205E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.9841E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=4.38797E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25918E0
ionrepsh_imon=1.73875E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.17799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.34518E-1
os_ea2_imon=-4.79397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00531E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.18957E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61678E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40361E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=2.86017E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.2961E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.23452E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74114E1
iondef1_imon=1.09069E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=2.1223E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=3.41737E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12534E0
cs_ionaccel_imon=-1.74734E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56009E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=1.94517E-1
window_imon=-1.21756E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39214E-4
mask2_vset=0.0E0
mask2_vmon=-1.86957E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.57984E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.74454E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.19404E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.42773E0
defgridb_imon=6.18885E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3385E1
os_fil1_imon=4.51193E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.3891E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62012E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30671E1
cs_fil1_imon=9.97453E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63855E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62013E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02836E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.69813E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.41608E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16024E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21518E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.92929E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.388E3	1.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80012E1	-5.72205E-4	-8.80005E1	4.29153E-4	4.69685E-3	9.39131E-2	2.72947E1	-3.26561E1	-3.26335E1	2.68036E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00966E-1
2.0E0	9.7884E4	1.03E2	3.16E2	1.6E2	-7.286E-2	-8.80014E1	-4.05312E-4	-8.80004E1	1.66893E-4	4.72069E-3	9.408E-2	2.71965E1	-3.26298E1	-3.2621E1	2.68013E1	1.19941E-7	2.51709E-3	2.51709E-3	6.33388E-3	3.00348E-1
3.0E0	3.2E1	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80013E1	-9.53674E-4	-8.80003E1	5.72205E-4	4.36306E-3	9.377E-2	2.73611E1	-3.26573E1	-3.26366E1	2.68053E1	1.19883E-7	2.51838E-3	2.51838E-3	6.3074E-3	2.989E-1
4.0E0	2.0797E4	1.5E1	6.55E2	3.98E2	-7.25507E-2	-8.80013E1	-8.82149E-4	-8.8E1	2.14577E-4	5.126E-3	9.36985E-2	2.73281E1	-3.26496E1	-3.26101E1	2.68292E1	1.20293E-7	2.52131E-3	2.52131E-3	6.32858E-3	3.01862E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80013E1	-9.77516E-4	-8.79999E1	5.00679E-4	4.93526E-3	9.39608E-2	2.73222E1	-3.26567E1	-3.26077E1	2.68172E1	1.2033E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80015E1	-8.34465E-4	-8.79998E1	3.09944E-4	4.91142E-3	9.37223E-2	2.72647E1	-3.26744E1	-3.26474E1	2.68088E1	1.20158E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80014E1	-1.09673E-3	-8.8E1	7.39098E-4	4.76837E-3	9.35078E-2	2.72769E1	-3.26543E1	-3.25972E1	2.68232E1	1.19978E-7	2.5147E-3	2.5147E-3	6.31299E-3	2.98819E-1
8.0E0	0.0E0	1.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80014E1	-5.96046E-4	-8.80002E1	4.05312E-4	4.673E-3	9.36985E-2	2.72907E1	-3.26374E1	-3.26458E1	2.68256E1	1.20069E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.96671E-1
1.2E1	4.1E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80015E1	-9.77516E-4	-8.80001E1	3.33786E-4	4.8399E-3	9.36985E-2	2.72486E1	-3.26386E1	-3.26242E1	2.68244E1	1.19809E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.9952E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80014E1	-8.10623E-4	-8.80003E1	2.86102E-4	4.64916E-3	9.39608E-2	2.72261E1	-3.26543E1	-3.26372E1	2.68064E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9926E-1
1.4E1	3.061E3	3.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80013E1	-7.86781E-4	-8.79998E1	1.90735E-4	4.55379E-3	9.38177E-2	2.71945E1	-3.26512E1	-3.26464E1	2.67896E1	1.20004E-7	2.51739E-3	2.51739E-3	6.28592E-3	3.0071E-1
1.5E1	3.6E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80013E1	-8.82149E-4	-8.79999E1	5.48363E-4	4.76837E-3	9.41038E-2	2.74325E1	-3.26603E1	-3.26014E1	2.68166E1	1.19809E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.03185E-1
1.6E1	2.79E2	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80014E1	-1.23978E-3	-8.8E1	3.8147E-4	4.43459E-3	9.36031E-2	2.72626E1	-3.26567E1	-3.26478E1	2.68105E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.03185E-1
1.7E1	3.06E2	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80015E1	-8.34465E-4	-8.8E1	1.90735E-4	4.95911E-3	9.38654E-2	2.71783E1	-3.26771E1	-3.26122E1	2.68082E1	1.20004E-7	2.52276E-3	2.52276E-3	6.34518E-3	3.02511E-1
1.8E1	1.274E3	3.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80013E1	-7.62939E-4	-8.8E1	1.90735E-4	5.26905E-3	9.40323E-2	2.75086E1	-3.26608E1	-3.26231E1	2.67992E1	1.20487E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.02396E-1
1.9E1	1.002E3	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80015E1	-6.91414E-4	-8.80002E1	4.76837E-4	5.10216E-3	9.38654E-2	2.738E1	-3.26573E1	-3.26343E1	2.68227E1	1.20311E-7	2.52492E-3	2.52492E-3	6.30202E-3	3.00966E-1
2.0E1	2.3377E4	1.3E1	8.08E2	5.58E2	-7.31692E-2	-8.80014E1	-5.96046E-4	-8.80002E1	5.00679E-4	4.8399E-3	9.3627E-2	2.723E1	-3.26741E1	-3.26362E1	2.68388E1	1.19697E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.02253E-1
2.1E1	4.2E1	2.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80012E1	-8.58307E-4	-8.80003E1	4.76837E-5	5.14984E-3	9.37223E-2	2.73856E1	-3.26897E1	-3.2647E1	2.67836E1	1.20383E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01609E-1
2.2E1	1.678E3	1.0E0	8.89E2	6.17E2	-7.27828E-2	-8.8001E1	-5.24521E-4	-8.8E1	2.86102E-4	5.29289E-3	9.37462E-2	2.72084E1	-3.26349E1	-3.26531E1	2.67878E1	1.20174E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.03185E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80012E1	-5.72205E-4	-8.80005E1	3.09944E-4	5.24521E-3	9.37939E-2	2.74114E1	-3.25984E1	-3.25978E1	2.6795E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00197E-1