[Scan]
initial_time=2016-01-27T22:31:50
final_time=2016-01-27T22:32:09
ip_count=19
run=1025
dataset=5
scan=371
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.80182E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.66034E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=4.33457E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.8873E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=8.42118E-10
mult1=-1.93127E-8
mult2=-2.74855E-9
rf_tmon=-5.06518E-3
rf_agc=3.30512E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=4.07612E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63429E0
bslens_imon=2.68916E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19779E1
lens5a_imon=1.9773E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53508E1
cs_ef1b_imon=2.75781E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02161E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04814E1
cs_ea1_imon=2.58762E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02874E0
lens1_imon=1.30846E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.9964E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03889E1
cs_ea2_imon=1.53534E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8455E1
cs_ef1a_imon=2.8872E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=4.29201E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=2.88107E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15342E1
os_ea1_imon=1.8897E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=1.17809E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93496E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=2.89044E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=7.84612E-10
tplens_vset=1.4E-1
tplens_vmon=1.60178E0
tplens_imon=-2.41667E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26116E1
iondef3_imon=1.48018E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26951E1
iondef2_imon=1.5685E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98465E-4
ql6_vset=1.0E-1
ql6_vmon=9.41515E-2
ql6_imon=4.07529E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34823E0
ionrepsh_imon=1.73577E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3373E1
lens5b_imon=2.17846E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.11893E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.11468E-1
os_ea2_imon=-4.79594E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.18452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61317E0
os_ef2alow_imon=-2.62311E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.27147E-1
os_ef2bup_imon=-5.29365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=2.8598E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.30649E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.23812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73556E1
iondef1_imon=1.10238E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67938E1
iondef4_imon=1.08737E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.0586E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=3.52395E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-1.67526E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47169E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56291E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.20346E-1
window_imon=-1.05178E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86927E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.14849E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.53564E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.20256E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.61787E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3386E1
os_fil1_imon=4.71616E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.22091E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61803E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30693E1
cs_fil1_imon=9.96372E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63663E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6212E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10551E-2
os_fil2_imon=-2.48577E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.93839E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.55555E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-1.93917E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2143E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21586E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.70104E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.455E3	0.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80007E1	-4.76837E-4	-8.80002E1	6.91414E-4	4.95911E-3	9.35793E-2	2.73086E1	-3.26666E1	-3.26104E1	2.68146E1	1.20069E-7	2.5199E-3	2.5199E-3	6.28006E-3	3.01609E-1
2.0E0	9.7757E4	9.2E1	3.16E2	1.6E2	-7.24736E-2	-8.8001E1	-5.00679E-4	-8.79997E1	2.6226E-4	4.86374E-3	9.35316E-2	2.73001E1	-3.26628E1	-3.26335E1	2.67876E1	1.20142E-7	2.52236E-3	2.52236E-3	6.3074E-3	3.00348E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80014E1	-2.38419E-4	-8.79998E1	6.91414E-4	4.88758E-3	9.35316E-2	2.73486E1	-3.26828E1	-3.26822E1	2.68111E1	1.201E-7	2.51498E-3	2.51498E-3	6.27901E-3	2.98092E-1
4.0E0	2.1028E4	8.0E0	6.55E2	3.98E2	-7.286E-2	-8.80008E1	-4.05312E-4	-8.79999E1	1.43051E-4	4.8399E-3	9.3627E-2	2.72829E1	-3.2647E1	-3.2635E1	2.68178E1	1.19941E-7	2.51603E-3	2.51603E-3	6.30212E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80011E1	-3.8147E-4	-8.8E1	2.86102E-4	4.74453E-3	9.37462E-2	2.72685E1	-3.26484E1	-3.26001E1	2.68157E1	1.20069E-7	2.5068E-3	2.5068E-3	6.32386E-3	3.01085E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80013E1	-5.24521E-4	-8.8E1	1.43051E-4	5.126E-3	9.377E-2	2.7308E1	-3.26868E1	-3.26514E1	2.6792E1	1.2026E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80012E1	-8.34465E-4	-8.80002E1	7.15256E-5	4.93526E-3	9.40323E-2	2.72829E1	-3.26621E1	-3.26308E1	2.68004E1	1.20106E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80011E1	-2.6226E-4	-8.80003E1	1.90735E-4	4.74453E-3	9.41038E-2	2.73243E1	-3.26591E1	-3.2632E1	2.68106E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
1.2E1	5.6E1	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80012E1	-3.57628E-4	-8.80002E1	4.76837E-4	4.86374E-3	9.37223E-2	2.72414E1	-3.26488E1	-3.265E1	2.68106E1	1.19913E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00824E-1
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80014E1	-4.76837E-4	-8.80003E1	3.09944E-4	4.8399E-3	9.41277E-2	2.73239E1	-3.26294E1	-3.2667E1	2.67856E1	1.19809E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00563E-1
1.4E1	3.044E3	2.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80013E1	-6.4373E-4	-8.80004E1	1.66893E-4	4.673E-3	9.39369E-2	2.73135E1	-3.26565E1	-3.26208E1	2.68107E1	1.20424E-7	2.5199E-3	2.5199E-3	6.3126E-3	3.01485E-1
1.5E1	4.8E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80013E1	-5.72205E-4	-8.80003E1	2.86102E-4	4.673E-3	9.36985E-2	2.72986E1	-3.26927E1	-3.25965E1	2.67908E1	1.19794E-7	2.52029E-3	2.52029E-3	6.31925E-3	2.99353E-1
1.6E1	2.68E2	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80014E1	-6.91414E-4	-8.80002E1	5.24521E-4	4.76837E-3	9.3627E-2	2.73147E1	-3.26536E1	-3.25894E1	2.68382E1	1.20106E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.9943E-1
1.7E1	3.13E2	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80016E1	-4.76837E-4	-8.80003E1	4.05312E-4	4.91142E-3	9.31978E-2	2.7329E1	-3.26664E1	-3.26209E1	2.68065E1	1.20055E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00453E-1
1.8E1	1.301E3	0.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80014E1	-5.00679E-4	-8.80004E1	6.91414E-4	4.673E-3	9.36985E-2	2.7308E1	-3.26762E1	-3.26107E1	2.68052E1	1.1974E-7	2.51709E-3	2.51709E-3	6.33388E-3	3.02368E-1
1.9E1	1.016E3	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80015E1	-7.86781E-4	-8.80006E1	5.72205E-4	5.29289E-3	9.36985E-2	2.73478E1	-3.26951E1	-3.265E1	2.67902E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00966E-1
2.0E1	2.3718E4	1.3E1	8.08E2	5.58E2	-7.36328E-2	-8.80014E1	-1.0252E-3	-8.80005E1	6.67572E-4	4.79221E-3	9.36031E-2	2.73243E1	-3.26567E1	-3.2629E1	2.6777E1	1.20017E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.01609E-1
2.1E1	6.1E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80017E1	-8.34465E-4	-8.8E1	3.33786E-4	5.03063E-3	9.377E-2	2.73157E1	-3.26638E1	-3.26048E1	2.6796E1	1.19851E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.00197E-1
2.2E1	1.655E3	0.0E0	8.89E2	6.17E2	-7.43285E-2	-8.80016E1	-8.34465E-4	-8.80001E1	6.4373E-4	4.57764E-3	9.39131E-2	2.72337E1	-3.26697E1	-3.26531E1	2.68208E1	1.19953E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.00453E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80015E1	-5.72205E-4	-8.80005E1	9.53674E-5	4.86374E-3	9.41515E-2	2.73556E1	-3.26951E1	-3.26116E1	2.67938E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1