[Scan]
initial_time=2016-01-27T22:32:17
final_time=2016-01-27T22:32:36
ip_count=19
run=1025
dataset=5
scan=372
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.79406E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.56009E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=4.4136E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.93124E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=8.4573E-10
mult1=-1.3172E-8
mult2=-2.71882E-9
rf_tmon=-4.36159E-3
rf_agc=3.39856E-2
counter1=1
counter2=2
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=4.23563E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66211E0
bslens_imon=2.72144E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19826E1
lens5a_imon=1.98696E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05138E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53666E1
cs_ef1b_imon=2.73982E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.02228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05153E1
cs_ea1_imon=2.57939E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98813E0
lens1_imon=1.47209E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.9934E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03637E1
cs_ea2_imon=1.52673E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8416E1
cs_ef1a_imon=2.89666E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=4.16863E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11214E1
os_restr1_imon=2.88178E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15246E1
os_ea1_imon=1.89863E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63645E1
os_ef1bup_imon=3.08612E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21917E0
cs_ionrep_imon=1.18185E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93493E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01949E1
cs_anode1_imon=2.89494E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=7.87568E-10
tplens_vset=1.4E-1
tplens_vmon=1.62691E0
tplens_imon=-4.36818E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26733E1
iondef3_imon=1.49274E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26602E1
iondef2_imon=1.57235E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98366E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=4.30632E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24483E0
ionrepsh_imon=1.73012E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33729E1
lens5b_imon=2.1703E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74773E1
cs_ef2b_imon=3.12505E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.63265E-1
os_ea2_imon=-6.02431E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00422E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.18715E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62028E0
os_ef2alow_imon=-2.61813E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55289E-1
os_ef2bup_imon=-5.34845E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10904E1
os_restr2_imon=2.87577E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.30829E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01896E1
cs_anode2_imon=2.24241E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72704E1
iondef1_imon=1.07406E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68127E1
iondef4_imon=1.08847E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.08718E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=3.97968E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11774E0
cs_ionaccel_imon=-1.76526E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47321E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56386E1
einzel_imon=7.67639E-6
window_vset=0.0E0
window_vmon=1.62559E-1
window_imon=-1.11559E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39161E-4
mask2_vset=0.0E0
mask2_vmon=-1.86749E1
mask2_imon=-5.88986E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.46371E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.31211E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.46744E0
defgridb_imon=6.12086E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33853E1
os_fil1_imon=4.81385E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.14159E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61808E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30671E1
cs_fil1_imon=9.96411E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62787E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62116E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.0722E-2
os_fil2_imon=-2.44125E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.30939E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.53826E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30474E-1
cs_fil2_imon=-2.23614E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04559E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21605E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.66429E-1
res40_imon=-2.54085E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=552
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.507E3	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80016E1	-6.91414E-4	-8.80002E1	3.8147E-4	4.48227E-3	9.38177E-2	2.72772E1	-3.26733E1	-3.26493E1	2.67943E1	1.19909E-7	2.51758E-3	2.51758E-3	6.31611E-3	3.00778E-1
2.0E0	9.7933E4	8.7E1	3.16E2	1.6E2	-7.22418E-2	-8.80016E1	-5.00679E-4	-8.80003E1	6.67572E-4	4.79221E-3	9.35078E-2	2.72903E1	-3.26644E1	-3.26297E1	2.68075E1	1.20042E-7	2.51287E-3	2.51287E-3	6.33388E-3	3.006E-1
3.0E0	2.3E1	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80015E1	-8.10623E-4	-8.79999E1	5.72205E-4	4.62532E-3	9.36508E-2	2.73092E1	-3.26892E1	-3.2659E1	2.68134E1	1.20163E-7	2.51859E-3	2.51859E-3	6.31398E-3	3.01452E-1
4.0E0	2.1243E4	4.0E0	6.55E2	3.98E2	-7.09279E-2	-8.80013E1	-7.86781E-4	-8.80003E1	5.72205E-4	4.76837E-3	9.36747E-2	2.73163E1	-3.26673E1	-3.26349E1	2.68088E1	1.20042E-7	2.51709E-3	2.51709E-3	6.32858E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80013E1	-6.67572E-4	-8.80003E1	4.05312E-4	4.673E-3	9.37462E-2	2.73213E1	-3.26741E1	-3.26068E1	2.68016E1	1.20069E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.12368E-2	-8.80013E1	-6.4373E-4	-8.80001E1	7.15256E-5	4.60148E-3	9.377E-2	2.7266E1	-3.26597E1	-3.26458E1	2.68052E1	1.19749E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80017E1	-5.72205E-4	-8.8E1	4.05312E-4	4.50611E-3	9.39608E-2	2.72678E1	-3.26651E1	-3.26368E1	2.68172E1	1.1966E-7	2.5147E-3	2.5147E-3	6.32978E-3	2.99879E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80014E1	-5.48363E-4	-8.8E1	5.24521E-4	4.55379E-3	9.3627E-2	2.72721E1	-3.26579E1	-3.26201E1	2.6819E1	1.20069E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9978E-1
1.2E1	4.4E1	1.0E0	4.85E2	3.23E2	-7.12368E-2	-8.80014E1	-7.62939E-4	-8.80003E1	4.05312E-4	4.673E-3	9.42469E-2	2.73321E1	-3.26404E1	-3.26242E1	2.68117E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0148E-1
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.12368E-2	-8.80016E1	-8.10623E-4	-8.80003E1	6.19888E-4	4.76837E-3	9.38177E-2	2.73405E1	-3.26543E1	-3.26531E1	2.68256E1	1.20174E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.02659E-1
1.4E1	3.212E3	1.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80013E1	-4.29153E-4	-8.80002E1	6.67572E-4	4.81606E-3	9.39369E-2	2.72234E1	-3.27005E1	-3.26206E1	2.67932E1	1.20106E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.98665E-1
1.5E1	4.3E1	0.0E0	6.06E2	4.11E2	-7.17779E-2	-8.8001E1	-7.15256E-4	-8.80003E1	5.96046E-4	4.74453E-3	9.40084E-2	2.73216E1	-3.26726E1	-3.26455E1	2.68058E1	1.20209E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.01223E-1
1.6E1	2.91E2	0.0E0	6.47E2	4.41E2	-7.08504E-2	-8.80011E1	-6.19888E-4	-8.80004E1	3.09944E-4	4.50611E-3	9.38892E-2	2.72829E1	-3.26416E1	-3.26236E1	2.6799E1	1.20017E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.02659E-1
1.7E1	2.79E2	1.0E0	6.87E2	4.7E2	-7.13143E-2	-8.80013E1	-3.33786E-4	-8.80002E1	1.90735E-4	5.05447E-3	9.39369E-2	2.72626E1	-3.2659E1	-3.26254E1	2.67688E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00041E-1
1.8E1	1.227E3	1.0E0	7.27E2	5.0E2	-7.201E-2	-8.80011E1	-2.38419E-4	-8.80003E1	2.86102E-4	4.91142E-3	9.37223E-2	2.73027E1	-3.26741E1	-3.26464E1	2.68226E1	1.19851E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.99686E-1
1.9E1	1.032E3	1.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80011E1	-4.29153E-4	-8.80003E1	2.6226E-4	5.05447E-3	9.36031E-2	2.73535E1	-3.26856E1	-3.26496E1	2.67879E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.98481E-1
2.0E1	2.3593E4	1.2E1	8.08E2	5.58E2	-7.27053E-2	-8.80011E1	-3.57628E-4	-8.80002E1	3.33786E-4	4.64916E-3	9.37939E-2	2.72973E1	-3.26741E1	-3.26164E1	2.67373E1	1.19841E-7	2.51182E-3	2.51182E-3	6.29157E-3	2.99093E-1
2.1E1	5.0E1	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80014E1	-7.86781E-4	-8.80006E1	3.33786E-4	4.81606E-3	9.377E-2	2.72853E1	-3.26795E1	-3.25984E1	2.68088E1	1.19978E-7	2.51693E-3	2.51693E-3	6.33538E-3	2.99879E-1
2.2E1	1.669E3	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80015E1	-5.48363E-4	-8.80007E1	4.76837E-4	4.93526E-3	9.37939E-2	2.72874E1	-3.26915E1	-3.26484E1	2.67914E1	1.20174E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.01085E-1
2.3E1	1.0E0	2.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80015E1	-5.24521E-4	-8.80005E1	5.24521E-4	4.74453E-3	9.39131E-2	2.72704E1	-3.26602E1	-3.26733E1	2.68127E1	1.20004E-7	2.51203E-3	2.51203E-3	6.28592E-3	3.01995E-1