[Scan]
initial_time=2016-01-27T22:34:30
final_time=2016-01-27T22:34:49
ip_count=19
run=1025
dataset=5
scan=377
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.88251E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.43265E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=4.08471E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.852E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=8.74329E-10
mult1=-2.32379E-8
mult2=-2.80245E-9
rf_tmon=-4.2E-3
rf_agc=3.3664E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=4.04704E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65652E0
bslens_imon=2.59183E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1955E1
lens5a_imon=1.97586E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53656E1
cs_ef1b_imon=2.73821E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02208E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04922E1
cs_ea1_imon=2.58654E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02814E0
lens1_imon=1.36975E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64666E1
os_ef1alow_imon=3.0065E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.50866E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=2.87653E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=4.179E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11187E1
os_restr1_imon=2.87548E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15173E1
os_ea1_imon=1.88826E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.0906E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2569E0
cs_ionrep_imon=1.18133E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.9333E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01682E1
cs_anode1_imon=2.89633E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=8.00681E-10
tplens_vset=1.4E-1
tplens_vmon=1.62461E0
tplens_imon=-2.81321E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26062E1
iondef3_imon=1.48559E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26458E1
iondef2_imon=1.58364E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.9822E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=4.08697E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28875E0
ionrepsh_imon=1.72532E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.17666E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7471E1
cs_ef2b_imon=3.12744E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.16876E-1
os_ea2_imon=-4.72384E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06063E2
lens4b_imon=2.005E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.1893E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65751E0
os_ef2alow_imon=-2.52593E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.56107E-1
os_ef2bup_imon=-5.26443E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10666E1
os_restr2_imon=2.8661E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.29712E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01844E1
cs_anode2_imon=2.227E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73363E1
iondef1_imon=1.08832E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.1038E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.04402E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=3.28469E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11334E0
cs_ionaccel_imon=-1.91776E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56318E1
einzel_imon=7.59401E-6
window_vset=0.0E0
window_vmon=2.33324E-1
window_imon=-1.05937E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82674E2
mask1_imon=2.39307E-4
mask2_vset=0.0E0
mask2_vmon=-1.86437E1
mask2_imon=-7.01421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.60271E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93692E3
defgrida_imon=6.54286E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=6.93219E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.50057E0
defgridb_imon=5.95885E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33851E1
os_fil1_imon=5.15593E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.77192E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62122E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30641E1
cs_fil1_imon=9.99073E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6243E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6224E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18289E-2
os_fil2_imon=-2.53597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.45077E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.46017E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.7329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.48953E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2161E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=2.99879E-1
chamber_ion_pmon=1.20403E-7
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.24657E-1
res40_imon=-2.41472E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.451E3	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80013E1	-4.29153E-4	-8.8E1	2.14577E-4	4.81606E-3	9.38892E-2	2.73549E1	-3.26359E1	-3.26312E1	2.68094E1	1.20158E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
2.0E0	9.8206E4	8.6E1	3.16E2	1.6E2	-7.3401E-2	-8.80014E1	-7.39098E-4	-8.80003E1	4.05312E-4	4.60148E-3	9.37223E-2	2.73153E1	-3.26567E1	-3.26101E1	2.67879E1	1.20192E-7	2.51393E-3	2.51393E-3	6.28103E-3	3.01609E-1
3.0E0	1.5E1	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80015E1	-9.29832E-4	-8.80003E1	2.38419E-4	4.72069E-3	9.38416E-2	2.72886E1	-3.26635E1	-3.25967E1	2.67907E1	1.20092E-7	2.51709E-3	2.51709E-3	6.29157E-3	3.006E-1
4.0E0	2.1122E4	1.2E1	6.55E2	3.98E2	-7.29374E-2	-8.80016E1	-5.72205E-4	-8.80003E1	2.38419E-4	4.57764E-3	9.38892E-2	2.72642E1	-3.26518E1	-3.26927E1	2.67764E1	1.19895E-7	2.51642E-3	2.51642E-3	6.3016E-3	2.99811E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80015E1	-2.86102E-4	-8.80003E1	3.57628E-4	4.8399E-3	9.3627E-2	2.72756E1	-3.26484E1	-3.26408E1	2.68018E1	1.20278E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80015E1	-2.86102E-4	-8.80003E1	4.52995E-4	4.64916E-3	9.39131E-2	2.74047E1	-3.26539E1	-3.26533E1	2.68094E1	1.2026E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99175E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80013E1	-3.57628E-4	-8.80005E1	3.57628E-4	4.48227E-3	9.40084E-2	2.72781E1	-3.26567E1	-3.26609E1	2.68118E1	1.20078E-7	2.51886E-3	2.51886E-3	6.27633E-3	3.00989E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.43285E-2	-8.80012E1	-2.6226E-4	-8.80001E1	3.8147E-4	4.74453E-3	9.36985E-2	2.73015E1	-3.26543E1	-3.26146E1	2.6777E1	1.20122E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01609E-1
1.2E1	4.8E1	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80012E1	-6.67572E-4	-8.80002E1	3.33786E-4	4.69685E-3	9.38654E-2	2.7269E1	-3.26825E1	-3.26464E1	2.6789E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02133E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80014E1	-6.67572E-4	-8.80002E1	2.86102E-4	4.62532E-3	9.34839E-2	2.7321E1	-3.27062E1	-3.26297E1	2.68022E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01085E-1
1.4E1	3.13E3	2.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80016E1	-4.52995E-4	-8.8E1	4.29153E-4	4.48227E-3	9.35793E-2	2.72862E1	-3.26868E1	-3.26006E1	2.68238E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.98222E-1
1.5E1	3.5E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80017E1	-2.14577E-4	-8.8E1	1.43051E-4	4.45843E-3	9.37223E-2	2.72855E1	-3.26505E1	-3.26468E1	2.6789E1	1.20226E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00302E-1
1.6E1	2.68E2	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80014E1	-3.57628E-4	-8.80002E1	5.72205E-4	5.00679E-3	9.377E-2	2.73213E1	-3.26837E1	-3.26284E1	2.67848E1	1.20226E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9978E-1
1.7E1	3.02E2	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80016E1	-2.6226E-4	-8.80003E1	5.00679E-4	4.86374E-3	9.35793E-2	2.73081E1	-3.26302E1	-3.262E1	2.67505E1	1.20084E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.03618E-1
1.8E1	1.308E3	0.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80015E1	-1.90735E-4	-8.80006E1	4.52995E-4	4.86374E-3	9.34362E-2	2.72957E1	-3.26579E1	-3.26325E1	2.68094E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.0148E-1
1.9E1	9.91E2	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80013E1	-5.96046E-4	-8.80002E1	1.90735E-4	5.00679E-3	9.37223E-2	2.72727E1	-3.26484E1	-3.26614E1	2.68118E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.01995E-1
2.0E1	2.3525E4	9.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80013E1	-5.96046E-4	-8.80004E1	4.05312E-4	4.48227E-3	9.36985E-2	2.73838E1	-3.26699E1	-3.25773E1	2.67469E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.03804E-1
2.1E1	4.5E1	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80012E1	-5.00679E-4	-8.80004E1	2.86102E-4	5.05447E-3	9.38177E-2	2.72426E1	-3.26496E1	-3.26101E1	2.68395E1	1.19913E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.02396E-1
2.2E1	1.67E3	1.0E0	8.89E2	6.17E2	-7.17779E-2	-8.80011E1	-1.66893E-4	-8.80004E1	3.8147E-4	4.88758E-3	9.39846E-2	2.72955E1	-3.26603E1	-3.26567E1	2.67851E1	1.20055E-7	2.51954E-3	2.51954E-3	6.29128E-3	2.9892E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80015E1	-3.8147E-4	-8.80003E1	4.76837E-4	5.00679E-3	9.36985E-2	2.73363E1	-3.26458E1	-3.26062E1	2.68256E1	1.20403E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.99879E-1