[Scan]
initial_time=2016-01-27T22:36:17
final_time=2016-01-27T22:36:36
ip_count=19
run=1025
dataset=5
scan=381
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.7941E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.69265E-10
ql2_vset=
ql2_vmon=-6.4373E-4
ql2_imon=4.20296E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.82296E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=8.65543E-10
mult1=-1.77113E-8
mult2=-3.00405E-9
rf_tmon=-4.67465E-3
rf_agc=3.27928E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=4.35174E-10
bslens_vset=-6.2E0
bslens_vmon=-6.632E0
bslens_imon=2.49371E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19901E1
lens5a_imon=1.97625E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.0504E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=2.76705E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02032E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04616E1
cs_ea1_imon=2.57582E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02475E0
lens1_imon=1.56992E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64713E1
os_ef1alow_imon=2.98843E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03667E1
cs_ea2_imon=1.53241E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84423E1
cs_ef1a_imon=2.89668E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=4.1883E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11361E1
os_restr1_imon=2.87757E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15423E1
os_ea1_imon=1.87714E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.08365E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25033E0
cs_ionrep_imon=1.1951E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93399E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01705E1
cs_anode1_imon=2.90328E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=8.04091E-10
tplens_vset=1.4E-1
tplens_vmon=1.6261E0
tplens_imon=-4.05069E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.48215E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27137E1
iondef2_imon=1.59081E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.9831E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=4.25041E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25387E0
ionrepsh_imon=1.7515E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33062E1
lens5b_imon=2.19746E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.32748E-1
os_ea2_imon=-7.34234E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.0058E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71206E1
cs_ef2a_imon=3.18617E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61581E0
os_ef2alow_imon=-2.5016E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42206E-1
os_ef2bup_imon=-5.27138E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10764E1
os_restr2_imon=2.86436E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.27911E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01885E1
cs_anode2_imon=2.23986E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73628E1
iondef1_imon=1.096E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68001E1
iondef4_imon=1.08225E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.04344E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=3.53205E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10524E0
cs_ionaccel_imon=-1.74747E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47271E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.66004E-6
window_vset=0.0E0
window_vmon=2.14211E-1
window_imon=-1.02462E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39136E-4
mask2_vset=0.0E0
mask2_vmon=-1.86848E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.26837E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.2207E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.24005E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.51041E0
defgridb_imon=6.21362E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33854E1
os_fil1_imon=4.64043E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.79133E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62243E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30638E1
cs_fil1_imon=9.96958E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63171E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62657E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.99037E-2
os_fil2_imon=-2.34483E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.48146E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.39837E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32898E-1
cs_fil2_imon=-2.40854E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2157E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.15389E-1
res40_imon=-2.39387E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.392E3	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80013E1	-5.96046E-4	-8.80004E1	3.8147E-4	4.8399E-3	9.38416E-2	2.72738E1	-3.26567E1	-3.26231E1	2.68154E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.9892E-1
2.0E0	9.9887E4	8.9E1	3.16E2	1.6E2	-7.31692E-2	-8.80015E1	-5.72205E-4	-8.80006E1	6.4373E-4	4.673E-3	9.38654E-2	2.73213E1	-3.26441E1	-3.26154E1	2.67552E1	1.20209E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.99941E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80017E1	-7.86781E-4	-8.80004E1	3.57628E-4	5.24521E-3	9.36508E-2	2.7357E1	-3.26803E1	-3.26419E1	2.68169E1	1.20045E-7	2.52521E-3	2.52521E-3	6.34164E-3	3.00251E-1
4.0E0	2.1228E4	1.3E1	6.55E2	3.98E2	-7.286E-2	-8.80014E1	-5.72205E-4	-8.80003E1	6.19888E-4	4.72069E-3	9.3627E-2	2.73086E1	-3.26797E1	-3.26231E1	2.68106E1	1.20158E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80014E1	-3.8147E-4	-8.80004E1	6.19888E-4	5.31673E-3	9.35316E-2	2.72653E1	-3.26646E1	-3.26193E1	2.68118E1	1.19705E-7	2.51225E-3	2.51225E-3	6.29098E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80014E1	-1.04904E-3	-8.80001E1	5.96046E-4	4.95911E-3	9.38892E-2	2.72775E1	-3.26561E1	-3.25533E1	2.68016E1	1.20122E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80012E1	-6.91414E-4	-8.80002E1	3.09944E-4	5.14984E-3	9.3627E-2	2.72846E1	-3.26704E1	-3.26249E1	2.67995E1	1.20174E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80014E1	-7.62939E-4	-8.79999E1	3.57628E-4	4.86374E-3	9.377E-2	2.72663E1	-3.26565E1	-3.26801E1	2.67988E1	1.20177E-7	2.51575E-3	2.51575E-3	6.3126E-3	2.99506E-1
1.2E1	4.5E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80012E1	-1.07288E-3	-8.80003E1	5.48363E-4	5.05447E-3	9.36747E-2	2.73027E1	-3.26603E1	-3.2644E1	2.67956E1	1.2006E-7	2.52222E-3	2.52222E-3	6.3074E-3	2.98435E-1
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80012E1	-9.29832E-4	-8.80004E1	3.33786E-4	5.26905E-3	9.39846E-2	2.7263E1	-3.2623E1	-3.2632E1	2.68028E1	1.2033E-7	2.50789E-3	2.50789E-3	6.34588E-3	2.9874E-1
1.4E1	3.249E3	2.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80013E1	-7.62939E-4	-8.80003E1	1.66893E-4	5.48363E-3	9.36985E-2	2.72931E1	-3.26933E1	-3.2602E1	2.67884E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.9978E-1
1.5E1	3.9E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80017E1	-4.76837E-4	-8.80004E1	1.19209E-4	5.53131E-3	9.39131E-2	2.73281E1	-3.26856E1	-3.26242E1	2.68106E1	1.2054E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01085E-1
1.6E1	2.41E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80016E1	-6.67572E-4	-8.80002E1	2.6226E-4	5.19753E-3	9.35316E-2	2.73802E1	-3.26458E1	-3.26308E1	2.67968E1	1.20011E-7	2.51918E-3	2.51918E-3	6.32371E-3	3.02064E-1
1.7E1	3.32E2	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80013E1	-7.39098E-4	-8.80003E1	4.05312E-4	5.05447E-3	9.37462E-2	2.71897E1	-3.26536E1	-3.26428E1	2.67565E1					
1.8E1	1.294E3	3.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80014E1	-7.15256E-4	-8.80003E1	3.57628E-4	5.126E-3	9.39846E-2	2.7385E1	-3.26681E1	-3.26032E1	2.6795E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00302E-1
1.9E1	1.015E3	0.0E0	7.68E2	5.29E2	-7.07733E-2	-8.8001E1	-8.10623E-4	-8.80002E1	3.33786E-4	4.98295E-3	9.38416E-2	2.72473E1	-3.26272E1	-3.26248E1	2.6807E1	1.19705E-7	2.51225E-3	2.51225E-3	6.29645E-3	3.01085E-1
2.0E1	2.3553E4	7.0E0	8.08E2	5.58E2	-7.12368E-2	-8.80008E1	-7.39098E-4	-8.80004E1	5.72205E-4	4.98295E-3	9.35793E-2	2.72907E1	-3.26687E1	-3.25984E1	2.68514E1	1.20158E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.99175E-1
2.1E1	5.6E1	0.0E0	8.49E2	5.88E2	-7.13915E-2	-8.80013E1	-7.39098E-4	-8.80001E1	5.00679E-4	4.98295E-3	9.37939E-2	2.73476E1	-3.26661E1	-3.26638E1	2.68136E1	1.20226E-7	2.52209E-3	2.52209E-3	6.34588E-3	3.01609E-1
2.2E1	1.672E3	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80015E1	-5.00679E-4	-8.80005E1	4.76837E-4	5.53131E-3	9.36985E-2	2.72579E1	-3.26284E1	-3.26136E1	2.67848E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80012E1	-6.4373E-4	-8.80004E1	2.14577E-4	5.65052E-3	9.34601E-2	2.73628E1	-3.27137E1	-3.2629E1	2.68001E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00966E-1