[Scan]
initial_time=2016-01-27T22:37:37
final_time=2016-01-27T22:37:56
ip_count=19
run=1025
dataset=5
scan=384
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.81382E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-6.36876E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=3.95119E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.79632E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=8.79145E-10
mult1=-2.47787E-8
mult2=-2.88557E-9
rf_tmon=-1.7894E-3
rf_agc=3.66169E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=4.2249E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67424E0
bslens_imon=2.48238E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19752E1
lens5a_imon=1.9874E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.04983E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=2.75385E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05014E1
cs_ea1_imon=2.58386E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01189E0
lens1_imon=1.39614E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64699E1
os_ef1alow_imon=2.98933E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03846E1
cs_ea2_imon=1.52954E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84323E1
cs_ef1a_imon=2.88074E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=4.33457E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11428E1
os_restr1_imon=2.88891E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14956E1
os_ea1_imon=1.87916E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63564E1
os_ef1bup_imon=3.0808E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23523E0
cs_ionrep_imon=1.17057E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93389E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0188E1
cs_anode1_imon=2.89553E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=8.29613E-10
tplens_vset=1.4E-1
tplens_vmon=1.63494E0
tplens_imon=-4.22059E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27147E1
iondef3_imon=1.53188E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26631E1
iondef2_imon=1.5638E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02888E2
lens6_imon=2.9847E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.20141E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.35917E0
ionrepsh_imon=1.73783E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33762E1
lens5b_imon=2.18129E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74612E1
cs_ef2b_imon=3.12634E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.23605E-1
os_ea2_imon=-5.70006E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71044E1
cs_ef2a_imon=3.19874E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6397E0
os_ef2alow_imon=-2.5839E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.32336E-1
os_ef2bup_imon=-5.26179E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10721E1
os_restr2_imon=2.87101E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.2985E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01783E1
cs_anode2_imon=2.2315E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73103E1
iondef1_imon=1.09309E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67716E1
iondef4_imon=1.08717E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=2.05446E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=3.70955E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11846E0
cs_ionaccel_imon=-1.63807E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47148E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56172E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.21763E-1
window_imon=-9.76383E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82669E2
mask1_imon=2.39002E-4
mask2_vset=0.0E0
mask2_vmon=-1.86454E1
mask2_imon=-5.87155E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.61382E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93763E3
defgrida_imon=7.26341E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=6.80789E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.48E0
defgridb_imon=6.17328E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33847E1
os_fil1_imon=5.86534E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.81797E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62365E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30603E1
cs_fil1_imon=9.96419E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63131E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62717E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.11067E-2
os_fil2_imon=-2.54199E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.56168E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.43E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29372E-1
cs_fil2_imon=-2.47063E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18163E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21657E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40077E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.17966E-1
res40_imon=-2.42431E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.461E3	1.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80011E1	-6.91414E-4	-8.80002E1	3.33786E-4	4.60148E-3	9.3627E-2	2.72839E1	-3.26638E1	-3.26065E1	2.68076E1	1.20171E-7	2.52106E-3	2.52106E-3	6.32483E-3	3.00639E-1
2.0E0	9.9487E4	9.5E1	3.16E2	1.6E2	-7.31692E-2	-8.80016E1	-5.24521E-4	-8.8E1	5.00679E-4	4.72069E-3	9.37223E-2	2.72889E1	-3.26675E1	-3.26374E1	2.67938E1	1.20106E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.01223E-1
3.0E0	1.0E1	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80019E1	-5.00679E-4	-8.80003E1	5.00679E-4	4.8399E-3	9.35316E-2	2.73246E1	-3.26714E1	-3.26231E1	2.67972E1	1.20031E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.99879E-1
4.0E0	2.1444E4	1.8E1	6.55E2	3.98E2	-7.29374E-2	-8.80013E1	-3.57628E-4	-8.80002E1	4.52995E-4	4.93526E-3	9.41515E-2	2.7266E1	-3.26416E1	-3.2608E1	2.68268E1	1.19953E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80012E1	-4.76837E-4	-8.80003E1	6.4373E-4	5.05447E-3	9.39369E-2	2.72957E1	-3.26573E1	-3.26478E1	2.68106E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01609E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80015E1	-8.10623E-4	-8.79999E1	6.4373E-4	4.48227E-3	9.37939E-2	2.73134E1	-3.26555E1	-3.26183E1	2.6803E1	1.20158E-7	2.51203E-3	2.51203E-3	6.32896E-3	2.99686E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.80013E1	-8.58307E-4	-8.8E1	5.24521E-4	4.79221E-3	9.37939E-2	2.73314E1	-3.26376E1	-3.26309E1	2.67882E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37874E-2	-8.80016E1	-7.15256E-4	-8.80003E1	3.09944E-4	4.91142E-3	9.37223E-2	2.72432E1	-3.26697E1	-3.25977E1	2.68047E1	1.20191E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.00144E-1
1.2E1	5.1E1	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.80013E1	-6.4373E-4	-8.80001E1	5.48363E-4	5.10216E-3	9.37223E-2	2.73177E1	-3.26693E1	-3.26332E1	2.67956E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.02253E-1
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80016E1	-8.34465E-4	-8.80002E1	5.48363E-4	5.126E-3	9.35078E-2	2.73535E1	-3.26779E1	-3.26461E1	2.67866E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01085E-1
1.4E1	3.198E3	1.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80014E1	-9.53674E-4	-8.79999E1	4.52995E-4	4.88758E-3	9.38177E-2	2.72877E1	-3.26098E1	-3.2629E1	2.6804E1	1.20209E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.9943E-1
1.5E1	3.4E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80015E1	-8.10623E-4	-8.80001E1	4.52995E-4	4.79221E-3	9.34839E-2	2.73189E1	-3.26795E1	-3.26657E1	2.68076E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9874E-1
1.6E1	2.95E2	1.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80015E1	-1.00136E-3	-8.80002E1	4.76837E-4	4.45843E-3	9.35078E-2	2.72925E1	-3.265E1	-3.2596E1	2.67962E1	1.19861E-7	2.51007E-3	2.51007E-3	6.30192E-3	2.97963E-1
1.7E1	3.05E2	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80016E1	-7.62939E-4	-8.80003E1	4.76837E-4	4.50611E-3	9.34362E-2	2.73339E1	-3.26753E1	-3.26651E1	2.68418E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.98481E-1
1.8E1	1.243E3	3.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80012E1	-6.91414E-4	-8.80002E1	6.19888E-4	4.33922E-3	9.34124E-2	2.72073E1	-3.26874E1	-3.26422E1	2.68016E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9952E-1
1.9E1	1.04E3	2.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80014E1	-9.29832E-4	-8.8E1	1.66893E-4	4.74453E-3	9.38416E-2	2.73603E1	-3.26482E1	-3.26118E1	2.67992E1	1.20197E-7	2.51566E-3	2.51566E-3	6.3074E-3	3.00631E-1
2.0E1	2.3942E4	1.7E1	8.08E2	5.58E2	-7.31692E-2	-8.80013E1	-4.05312E-4	-8.80002E1	2.86102E-4	5.14984E-3	9.37462E-2	2.72227E1	-3.26784E1	-3.26216E1	2.679E1	1.19991E-7	2.51603E-3	2.51603E-3	6.32328E-3	3.01862E-1
2.1E1	5.0E1	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80012E1	-5.24521E-4	-8.80001E1	4.05312E-4	5.00679E-3	9.35793E-2	2.72951E1	-3.26614E1	-3.26178E1	2.68117E1	1.20045E-7	2.51952E-3	2.51952E-3	6.30171E-3	3.01881E-1
2.2E1	1.629E3	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80011E1	-8.10623E-4	-8.8E1	1.90735E-4	4.91142E-3	9.35078E-2	2.73346E1	-3.26567E1	-3.26313E1	2.68018E1	1.19891E-7	2.51287E-3	2.51287E-3	6.30212E-3	3.00852E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80011E1	-5.96046E-4	-8.80001E1	5.72205E-4	4.95911E-3	9.3317E-2	2.73103E1	-3.26631E1	-3.27147E1	2.67716E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9978E-1